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Extract from the Register of European Patents

EP About this file: EP1551066

EP1551066 - MATERIAL WITH PATTERN SURFACE FOR USE AS TEMPLATE AND PROCESS FOR PRODUCING THE SAME [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 28.10.2011 Database last updated on 15.06.2024
Most recent event Tooltip	28.10.2011	Application deemed to be withdrawn	published on 30.11.2011 [2011/48]
Applicant(s)	For all designated states DAIKIN INDUSTRIES, LTD. Umeda Center Building, 4-12, Nakazaki-nishi 2-chome, Kita-ku Osaka-shi, Osaka 530-8323 / JP
	[N/P]
Former [2005/27]	For all designated states Daikin Industries, Ltd. Umeda Center Building, 4-12, Nakazaki-nishi 2-chome, Kita-ku Osaka-shi, Osaka 530-8323 / JP
Inventor(s)	01 / Morita, Masamichi 1-12-11 Tsutsujigaoka-kita Sanda-shi, Hyogo 669-1348 / JP
	02 / Otsuka, Hideyuki 3-3-3-403 Hakomatsu, Higashi-ku Fukuoka-shi, Fukuoka 812-0061 / JP
	03 / Takahara, Atsushi 5-19-8 Nanakuma, Jonan-ku Fukuoka-shi, Fukuoka 814-0133 / JP
	04 / Yamamoto, Ikuo, Yodogawa Works of DAIKIN IND. LTD. 1-1 Nishihitotsuya Settsu-shi, Osaka 566-8585 / JP
	05 / Itami, Yasuo, Yodogawa Works of DAIKIN IND. LTD. 1-1 Nishihitotsuya Settsu-shi, Osaka 566-8585 / JP
	06 / Aoyama, Hirokazu, Yodogawa Works DAIKIN IND. LTD., 1-1 Nishihitotsuya Settsu-shi, Osaka 566-8585 / JP
	[2005/27]
Representative(s)	Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE
	[N/P]
Former [2005/27]	HOFFMANN - EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE
Application number, filing date	03797648.7	18.09.2003
	[2005/27]
	WO2003JP11876
Priority number, date	JP20020273144	19.09.2002 Original published format: JP 2002273144
	[2005/27]
Filing language	JA
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2004027889
	Date:	01.04.2004
	Language:	EN
	[2004/14]
	Type:	A1 Application with search report
	No.:	EP1551066
	Date:	06.07.2005
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 01.04.2004 takes the place of the publication of the European patent application.
	[2005/27]
Search report(s)	International search report - published on:	JP	01.04.2004
	(Supplementary) European search report - dispatched on:	EP	11.12.2008
Classification	IPC:	H01L51/00, G03F7/004, G03F7/075	[2009/03]
	CPC:	B82Y10/00 (EP,US); G03F7/0002 (EP,US); B82Y40/00 (EP,US); H10K71/191 (EP,US); Y10T428/24917 (EP,US); Y10T428/24926 (EP,US)
	Former IPC [2005/27]	H01L51/00
Designated contracting states	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2005/27]
Extension states	AL	Not yet paid
	LT	Not yet paid
	LV	Not yet paid
	MK	Not yet paid
Title	German:	MATERIAL MIT STRUKTUROBERFLÄCHE ZUR VERWENDUNG ALS VORLAGE UND PROZESS SEINER HERSTELLUNG	[2005/27]
	English:	MATERIAL WITH PATTERN SURFACE FOR USE AS TEMPLATE AND PROCESS FOR PRODUCING THE SAME	[2005/27]
	French:	MATERIAU A SURFACE DE STRUCTURE EN TANT QUE GABARIT ET PROCEDE DE PRODUCTION ASSOCIE	[2005/27]
Entry into regional phase	18.04.2005	Translation filed
	18.04.2005	National basic fee paid
	18.04.2005	Search fee paid
	18.04.2005	Designation fee(s) paid
	18.04.2005	Examination fee paid
Examination procedure	18.04.2005	Examination requested [2005/27]
	14.01.2011	Despatch of a communication from the examining division (Time limit: M04)
	25.05.2011	Application deemed to be withdrawn, date of legal effect [2011/48]
	01.07.2011	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2011/48]
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 14.01.2011
Fees paid	Renewal fee
	26.09.2005	Renewal fee patent year 03
	21.09.2006	Renewal fee patent year 04
	24.09.2007	Renewal fee patent year 05
	27.03.2008	Renewal fee patent year 06
	26.03.2009	Renewal fee patent year 07
	22.09.2010	Renewal fee patent year 08
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[Y]US2002081520 (SOORIYAKUMARAN RATNAM [US], et al) [Y] 1,9,10,12-14 * the whole document *;
		[X]JP2002261048 (SEIKO EPSON CORP) [X] 1-14 * see passages of US-Doc *;
		US2003024103 [ ] (KIGUCHI HIROSHI [JP], et al) [ ] * paragraphs [0046] , [0050] *;
		[Y] - SUGIMURA H ET AL, "MICROPATTERNING OF ALKYL-AND FLUOROALKYLSILANE SELF-ASSEMBLED MONOLAYERS USING VACUUM ULTRAVIOLET LIGHT", LANGMUIR, ACS, WASHINGTON, DC, US, (20000208), vol. 16, no. 3, ISSN 0743-7463, pages 885 - 888, XP000929923 [Y] 1-14 * the whole document * DOI: http://dx.doi.org/10.1021/la990953e
		[Y] - JEON N L ET AL, "PATTERNED SELF-ASSEMBLED MONOLAYERS FORMED BY MICROCONTACT PRINTING DIRECT SELECTIVE METALIZATION BY CHEMICAL VAPOR DEPOSITION ON PLANAR AND NONPLANAR SUBSTRATES", LANGMUIR, ACS, WASHINGTON, DC, US, (19950808), vol. 11, ISSN 0743-7463, pages 3024 - 3026, XP001088596 [Y] 1-14 * the whole document * DOI: http://dx.doi.org/10.1021/la00008a029
		[Y] - NOO LI JEON ET AL, "A MONOLAYER-BASED LIFT-OFF PROCESS FOR PATTERNING CHEMICAL VAPOR DEPOSITION COPPER THIN FILMS", LANGMUIR, ACS, WASHINGTON, DC, US, (19961030), vol. 12, ISSN 0743-7463, pages 5350 - 5355, XP001088595 [Y] 1-14 * the whole document * DOI: http://dx.doi.org/10.1021/la960377b
		[Y] - RIEKE P C ET AL, "SPATIALLY RESOLVED MINERAL DEPOSITION ON PATTERNED SELF-ASSEMBLED MONOLAYERS", LANGMUIR, ACS, WASHINGTON, DC, US, (19940101), vol. 10, ISSN 0743-7463, pages 619 - 622, XP009071465 [Y] 1-14 * page 620, column 2, line 15 - line 22 * * page 619, column 2, line 12 - line 23 * DOI: http://dx.doi.org/10.1021/la00015a003
		[A] - HOFFMANN P W ET AL, "Vapor phase self-assembly of fluorinated monolayers on silicon and germanium oxide", LANGMUIR, ACS, WASHINGTON, DC, US, (19970101), vol. 13, ISSN 0743-7463, pages 1877 - 1880, XP002272050 DOI: http://dx.doi.org/10.1021/la961091+
		[A] - ST JOHN P M ET AL, "MONOLAYERS OF FLUORINATED SILANES AS ELECTRON-BEAM RESISTS", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AVS / AIP, MELVILLE, NEW YORK, NY, US, (19960101), vol. 14, no. 1, ISSN 1071-1023, pages 69 - 74, XP000558383 DOI: http://dx.doi.org/10.1116/1.588436
		[A] - "Low temperature deposition of patterned TiO2 thin films using photopatterned self-assembled monolayers", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, (19960805), vol. 69, no. 6, ISSN 0003-6951, pages 860 - 862, XP012017157 DOI: http://dx.doi.org/10.1063/1.117916
	International search	[X]EP1041652 (LUCENT TECHNOLOGIES INC [US]);
		[X]JP2001284289 (SEIKO EPSON CORP);
		[X]JP2001284288 (SEIKO EPSON CORP);
		[X]JP2001284274 (SEIKO EPSON CORP);
		[X]JP2002023356 (SEIKO EPSON CORP);
		[X]JP2002261048 (SEIKO EPSON CORP);
		[XP]JP2002311592 (SEIKO EPSON CORP);
		[XP]JP2003162058 (SEIKO EPSON CORP)

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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