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EP1611600
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EP About this file: EP1611600
| EP1611600 - METHODS AND APPARATUS FOR VERTICAL TRANSFER OF SEMICONDUCTOR SUBSTRATES BETWEEN CLEANING MODULES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 19.01.2007 Database last updated on 22.08.2024 | Most recent event Tooltip | 19.01.2007 | Application deemed to be withdrawn | published on 21.02.2007 [2007/08] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2006/01] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue Santa Clara California 95054 / US | Inventor(s) | 01 /
ACHKIRE, Younes 216 Wedgewood Avenue Los Gatos, CA 95032 / US | 02 /
MAROHL, Dan 3461 Outlook Court San Jose, CA 95132 / US | 03 /
KARUPPIAH, Lakshmanan 2720 Sycamore Grove Place San Jose, CA 95121 / US | [2006/01] | Representative(s) | Bayliss, Geoffrey Cyril BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [2006/01] | Bayliss, Geoffrey Cyril BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | Application number, filing date | 04749586.6 | 31.03.2004 | [2006/01] | WO2004US09937 | Priority number, date | US20030408036 | 03.04.2003 Original published format: US 408036 | [2006/01] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2004090948 | Date: | 21.10.2004 | Language: | EN | [2004/43] | Type: | A1 Application with search report | No.: | EP1611600 | Date: | 04.01.2006 | Language: | EN | The application published by WIPO in one of the EPO official languages on 21.10.2004 takes the place of the publication of the European patent application. | [2006/01] | Search report(s) | International search report - published on: | EP | 21.10.2004 | Classification | IPC: | H01L21/00 | [2006/01] | CPC: |
H01L21/68707 (EP,US);
H01L21/68 (KR);
H01L21/6704 (EP,US);
H01L21/67742 (EP,US);
H01L21/67155 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2006/01] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | Title | German: | EIN VERFAHREN UND EINE VORRICHTUNG FÜR DEN VERTIKALEN TRANSFER VON HALBLEITERSUBSTRATEN ZWISCHEN REINIGUNGSMODULEN | [2006/01] | English: | METHODS AND APPARATUS FOR VERTICAL TRANSFER OF SEMICONDUCTOR SUBSTRATES BETWEEN CLEANING MODULES | [2006/01] | French: | PROCEDES ET APPAREIL DE TRANSFERT VERTICAL DE SUBSTRATS SEMICONDUCTEURS ENTRE DES MODULES DE NETTOYAGE | [2006/01] | Entry into regional phase | 27.10.2005 | National basic fee paid | 27.10.2005 | Designation fee(s) paid | 27.10.2005 | Examination fee paid | Examination procedure | 27.10.2005 | Examination requested [2006/01] | 27.01.2006 | Despatch of a communication from the examining division (Time limit: M04) | 22.03.2006 | Reply to a communication from the examining division | 21.04.2006 | Despatch of a communication from the examining division (Time limit: M04) | 02.09.2006 | Application deemed to be withdrawn, date of legal effect [2007/08] | 09.10.2006 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2007/08] | Fees paid | Renewal fee | 18.05.2006 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 31.03.2006 | 03 M06 Fee paid on 18.05.2006 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]EP1068936 (APPLIED MATERIALS INC [US]) [X] 1-27 * column 1, paragraph 7 - column 2, paragraph 11; figures 1a,3 * * column 3, line 3, paragraph 14 - line 4, paragraph 18 *; | [XA]WO0117000 (TEC SEM AG [CH], et al) [X] 1,2,13,19 * page 11, line 31 - page 15, line 35; figures 3a-5 * [A] 3-12,14-27; | [A]US6283701 (SUNDAR SATISH [US], et al) [A] 1-27* column 6, line 25 - column 7, line 17; figure 2 *; | [XA]US2002096436 (OLGADO DONALD J K [US], et al) [X] 1,2,13,19 * column 3, paragraph 33 - column 3, paragraph 34; figure 1B * [A] 3-12,14-27 |