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Extract from the Register of European Patents

EP About this file: EP1655765

EP1655765 - EXPOSURE METHOD [Right-click to bookmark this link]
Former [2006/19]EXPOSURE METHOD AND EXPOSURE APPARATUS, STAGE UNIT, AND DEVICE MANUFACTURING METHOD
[2008/48]
StatusNo opposition filed within time limit
Status updated on  19.02.2010
Database last updated on 19.07.2024
Most recent event   Tooltip07.10.2011Lapse of the patent in a contracting state
New state(s): CY, TR		published on 09.11.2011  [2011/45]
Applicant(s)For all designated states
NIKON CORPORATION
Fuji Building
2-3 Marunouchi 3-chome
Chiyoda-ku
Tokyo 100-8831 / JP
[N/P]
Former [2006/19]For all designated states
NIKON CORPORATION
Fuji Building, 2-3 Marunouchi 3-chome, Chiyoda-ku
Tokyo 100-8831 / JP
Inventor(s)01 / SHIBAZAKI, Yuichi, c/o NIKON CORPORATION
2-3, Maruunouchi 3-chome, Chiyoda-ku
Tokyo 1008331 / JP
 [2006/19]
Representative(s)Gill, David Alan
WP Thompson
138 Fetter Lane
London EC4A 1BT / GB
[N/P]
Former [2006/19]Gill, David Alan
W.P. Thompson & Co., 55 Drury Lane
London WC2B 5SQ / GB
Application number, filing date04771271.605.08.2004
[2006/19]
WO2004JP11244
Priority number, dateJP2003028891907.08.2003         Original published format: JP 2003288919
[2006/19]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2005015615
Date:17.02.2005
Language:EN
[2005/07]
Type: A1 Application with search report 
No.:EP1655765
Date:10.05.2006
Language:EN
The application published by WIPO in one of the EPO official languages on 17.02.2005 takes the place of the publication of the European patent application.
[2006/19]
Type: B1 Patent specification 
No.:EP1655765
Date:15.04.2009
Language:EN
[2009/16]
Search report(s)International search report - published on:JP17.02.2005
(Supplementary) European search report - dispatched on:EP04.01.2008
ClassificationIPC:H01L21/027, G03F7/20
[2006/19]
CPC:
G03F7/70716 (EP,KR,US); G03F7/2004 (KR); G03F7/70733 (EP,KR,US);
G03F7/7085 (KR)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2006/19]
Extension statesALNot yet paid
HRNot yet paid
LTNot yet paid
LVNot yet paid
MKNot yet paid
TitleGerman:BELICHTUNGSVERFAHREN[2008/48]
English:EXPOSURE METHOD[2008/48]
French:PROCEDE D'EXPOSITION[2008/48]
Former [2006/19]BELICHTUNGSVERFAHREN UND BELICHTUNGSVORRICHTUNG, BÜHNENEINHEIT UND BAUELEMENTE-HERSTELLUNGSVERFAHREN
Former [2006/19]EXPOSURE METHOD AND EXPOSURE APPARATUS, STAGE UNIT, AND DEVICE MANUFACTURING METHOD
Former [2006/19]PROCEDE D'EXPOSITION ET APPAREIL D'EXPOSITION, UNITE DE PLATEAU ET PROCEDE DE PRODUCTION DE DISPOSITIF
Entry into regional phase24.02.2006Translation filed 
24.02.2006National basic fee paid 
24.02.2006Search fee paid 
24.02.2006Designation fee(s) paid 
24.02.2006Examination fee paid 
Examination procedure24.02.2006Examination requested  [2006/19]
29.04.2008Despatch of a communication from the examining division (Time limit: M04)
01.09.2008Reply to a communication from the examining division
03.11.2008Communication of intention to grant the patent
02.03.2009Fee for grant paid
02.03.2009Fee for publishing/printing paid
Divisional application(s)EP08163444.6  / EP1995769
Opposition(s)18.01.2010No opposition filed within time limit [2010/12]
Fees paidRenewal fee
14.08.2006Renewal fee patent year 03
14.08.2007Renewal fee patent year 04
31.03.2008Renewal fee patent year 05
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT15.04.2009
BE15.04.2009
CY15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
IT15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
TR15.04.2009
BG15.07.2009
SE15.07.2009
GR16.07.2009
ES26.07.2009
GB05.08.2009
IE05.08.2009
LU05.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
PT15.09.2009
HU16.10.2009
[2011/44]
Former [2011/32]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
IT15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
BG15.07.2009
SE15.07.2009
GR16.07.2009
ES26.07.2009
GB05.08.2009
IE05.08.2009
LU05.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
PT15.09.2009
HU16.10.2009
Former [2011/21]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
IT15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
BG15.07.2009
SE15.07.2009
GR16.07.2009
ES26.07.2009
GB05.08.2009
IE05.08.2009
LU05.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
PT15.09.2009
Former [2011/15]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
IT15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
BG15.07.2009
SE15.07.2009
GR16.07.2009
ES26.07.2009
GB05.08.2009
IE05.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
PT15.09.2009
Former [2011/01]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
BG15.07.2009
SE15.07.2009
GR16.07.2009
ES26.07.2009
GB05.08.2009
IE05.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
PT15.09.2009
Former [2010/51]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
BG15.07.2009
SE15.07.2009
GR16.07.2009
ES26.07.2009
IE05.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
PT15.09.2009
Former [2010/35]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
BG15.07.2009
SE15.07.2009
ES26.07.2009
IE05.08.2009
CH31.08.2009
FR31.08.2009
LI31.08.2009
MC31.08.2009
PT15.09.2009
Former [2010/22]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
BG15.07.2009
SE15.07.2009
ES26.07.2009
CH31.08.2009
LI31.08.2009
MC31.08.2009
PT15.09.2009
Former [2010/18]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
BG15.07.2009
SE15.07.2009
ES26.07.2009
MC31.08.2009
PT15.09.2009
Former [2010/16]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
SE15.07.2009
ES26.07.2009
MC31.08.2009
PT15.09.2009
Former [2010/10]AT15.04.2009
BE15.04.2009
CZ15.04.2009
DK15.04.2009
EE15.04.2009
FI15.04.2009
PL15.04.2009
RO15.04.2009
SI15.04.2009
SK15.04.2009
SE15.07.2009
ES26.07.2009
PT15.09.2009
Former [2010/01]AT15.04.2009
FI15.04.2009
PL15.04.2009
SI15.04.2009
SE15.07.2009
ES26.07.2009
PT15.09.2009
Former [2009/51]AT15.04.2009
FI15.04.2009
SI15.04.2009
SE15.07.2009
ES26.07.2009
PT15.09.2009
Former [2009/46]ES26.07.2009
Documents cited:Search[A]EP0696762  (ORC MFG CO LTD [JP]) [A] 1,4,8,16,17,20 * abstract * * figures 1-6 * * paragraph [0001] ** paragraph [0045] - paragraph [0085] *;
 [X]EP0722123  (ORC MFG CO LTD [JP]) [X] 1-21 * abstract * * figures 1-5 * * paragraph [0001] - paragraph [0003] * * paragraph [0101] - paragraph [0123] *
International search[X]JPS5853831  (FUJITSU LTD);
 [X]JPH01314247  (FUJI PLANT KOGYO KK);
 [A]JPH11191585  (CANON KK);
 [A]JP2003017404  (NIKON CORP)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.