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EP1664934
European procedure
Extract from the Register of European Patents
EP About this file: EP1664934
| EP1664934 - IMMERSION LITHOGRAPHY METHOD AND DEVICE FOR ILLUMINATING A SUBSTRATE [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 24.10.2014 Database last updated on 19.03.2026 | Most recent event Tooltip | 31.07.2015 | Lapse of the patent in a contracting state | published on 02.09.2015 [2015/36] | Applicant(s) | For all designated states Infineon Technologies AG Am Campeon 1-12 85579 Neubiberg / DE | [2010/22] |
| Former [2006/23] | For all designated states Infineon Technologies AG St.-Martin-Strasse 53 81669 München / DE | Inventor(s) | 01 /
NIEHOFF, Martin St,-Wendel-Str. 13/3 Stw. 81379 München / DE | [2007/31] |
| Former [2006/23] | 01 /
NIEHOFF, Martin Hagenauer Str. 18 81479 München / DE | Representative(s) | Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte Am Brauhaus 8 01099 Dresden / DE | [N/P] |
| Former [2013/51] | Viering, Jentschura & Partner Am Brauhaus 8 01099 Dresden / DE | ||
| Former [2012/18] | Viering, Jentschura & Partner Schwepnitzer Str. 2 01097 Dresden / DE | ||
| Former [2008/28] | Viering, Jentschura & Partner Postfach 22 14 43 80504 München / DE | ||
| Former [2006/23] | Viering, Jentschura & Partner Patent- und Rechtsanwälte, Steinsdorfstrasse 6 80538 München / DE | Application number, filing date | 04786744.5 | 10.09.2004 | [2006/23] | WO2004DE02022 | Priority number, date | DE2003144567 | 25.09.2003 Original published format: DE 10344567 | [2006/23] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | WO2005031465 | Date: | 07.04.2005 | Language: | DE | [2005/14] | Type: | A2 Application without search report | No.: | EP1664934 | Date: | 07.06.2006 | Language: | DE | The application published by WIPO in one of the EPO official languages on 07.04.2005 takes the place of the publication of the European patent application. | [2006/23] | Type: | B1 Patent specification | No.: | EP1664934 | Date: | 18.12.2013 | Language: | DE | [2013/51] | Search report(s) | International search report - published on: | EP | 07.07.2005 | Classification | IPC: | G03F7/20 | [2006/23] | CPC: |
G03F7/70333 (EP,US);
G03F7/70341 (EP,US);
G03F7/70358 (EP,US);
G03F7/70858 (EP,US)
| Designated contracting states | DE, FR, GB [2007/01] |
| Former [2006/23] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | IMMERSIONS-LITHOGRAPHIE-VERFAHREN UND VORRICHTUNG ZUM BELICHTEN EINES SUBSTRATS | [2006/23] | English: | IMMERSION LITHOGRAPHY METHOD AND DEVICE FOR ILLUMINATING A SUBSTRATE | [2006/23] | French: | PROCEDE DE LITHOGRAPHIE PAR IMMERSION ET DISPOSITIF POUR EXPOSER UN SUBSTRAT | [2006/23] | Entry into regional phase | 14.03.2006 | National basic fee paid | 14.03.2006 | Designation fee(s) paid | 14.03.2006 | Examination fee paid | Examination procedure | 14.03.2006 | Examination requested [2006/23] | 05.04.2012 | Despatch of a communication from the examining division (Time limit: M04) | 12.07.2012 | Reply to a communication from the examining division | 04.07.2013 | Cancellation of oral proceeding that was planned for 18.07.2013 | 18.07.2013 | Date of oral proceedings (cancelled) | 24.07.2013 | Communication of intention to grant the patent | 07.11.2013 | Fee for grant paid | 07.11.2013 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 05.04.2012 | Opposition(s) | 19.09.2014 | No opposition filed within time limit [2014/48] | Fees paid | Renewal fee | 14.03.2006 | Renewal fee patent year 03 | 11.09.2007 | Renewal fee patent year 04 | 18.09.2008 | Renewal fee patent year 05 | 17.09.2009 | Renewal fee patent year 06 | 14.09.2010 | Renewal fee patent year 07 | 13.09.2011 | Renewal fee patent year 08 | 13.09.2012 | Renewal fee patent year 09 | 19.09.2013 | Renewal fee patent year 10 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | GB | 10.09.2014 | [2015/36] |