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Extract from the Register of European Patents

EP About this file: EP1564593

EP1564593 - Exposure apparatus and exposure method [Right-click to bookmark this link]
StatusThe application has been withdrawn
Status updated on  11.11.2011
Database last updated on 19.10.2024
Most recent event   Tooltip11.11.2011Withdrawal of applicationpublished on 14.12.2011  [2011/50]
Applicant(s)For all designated states
CANON KABUSHIKI KAISHA
30-2, 3-chome, Shimomaruko, Ohta-ku
Tokyo / JP
[N/P]
Former [2005/33]For all designated states
CANON KABUSHIKI KAISHA
30-2, 3-chome, Shimomaruko, Ohta-ku
Tokyo / JP
Inventor(s)01 / Kohno, Michio
Canon Kabushiki Kaisha 3-30-2, Shimomaruko Ohta-ku
Tokyo / JP
 [2005/33]
Representative(s)TBK
Bavariaring 4-6
80336 München / DE
[N/P]
Former [2008/22]TBK-Patent
Bavariaring 4-6
80336 München / DE
Former [2005/33]TBK-Patent
Bavariaring 4-6
80336 München / DE
Application number, filing date05002777.010.02.2005
[2005/33]
Priority number, dateJP2004003446212.02.2004         Original published format: JP 2004034462
[2005/33]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP1564593
Date:17.08.2005
Language:EN
[2005/33]
Type: A3 Search report 
No.:EP1564593
Date:19.09.2007
[2007/38]
Search report(s)(Supplementary) European search report - dispatched on:EP22.08.2007
ClassificationIPC:G03F7/20
[2005/33]
CPC:
G03F7/70158 (EP,KR,US); G03F7/70141 (EP,KR,US); G03F7/70108 (EP,KR,US);
G03F7/7025 (KR); G03F7/705 (EP,KR,US); G03F7/70516 (KR);
G03F7/706835 (KR); G03F7/706843 (KR); G03F7/70858 (KR) (-)
Designated contracting statesDE,   FR,   GB,   IT,   NL [2008/22]
Former [2005/33]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Belichtungsapparat und Belichtungsverfahren[2005/33]
English:Exposure apparatus and exposure method[2005/33]
French:Appareil d'exposition et méthode d'exposition[2005/33]
Examination procedure19.03.2008Examination requested  [2008/19]
20.03.2008Loss of particular rights, legal effect: designated state(s)
25.04.2008Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IE, IS, LT, LU, MC, PL, PT, RO, SE, SI, SK, TR
25.06.2008Despatch of a communication from the examining division (Time limit: M04)
04.11.2008Reply to a communication from the examining division
15.07.2011Application withdrawn by applicant  [2011/50]
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  25.06.2008
Fees paidRenewal fee
28.02.2007Renewal fee patent year 03
29.02.2008Renewal fee patent year 04
13.03.2008Renewal fee patent year 05
01.03.2010Renewal fee patent year 06
28.02.2011Renewal fee patent year 07
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Documents cited:Search[A]GB2308667  (HYUNDAI ELECTRONICS IND [KR]) [A] 1,10,11,14,18,19 * abstract * * figures 1,2A,2B,3A,3B * * page 1, line 5 - line 10 ** page 4, line 18 - page 6, line 13 *;
 [XA]US2001026448  (KOIZUMI RYO [JP], et al) [X] 1,14-17,19 * abstract * * figure 1 * * paragraph [0001] * * paragraph [0050] - paragraph [0061] * [A] 10,11,18;
 [XA]US2002085286  (DRODOFSKY ULRICH [DE], et al) [X] 1-10,18 * abstract * * figures 1-3 * * paragraph [0001] * * paragraph [0031] - paragraph [0082] * [A] 11,14,19;
 [XA]US2003038931  (TOYODA MITSUNORI [JP], et al) [X] 1 * abstract * * figures 18-23 * * paragraph [0002] * * paragraph [0137] - paragraph [0173] * [A] 10,11,14,18,19
by applicantGB2308667
 US2001026448
 US2002085286
 US2003038931
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.