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Extract from the Register of European Patents

EP About this file: EP1775757

EP1775757 - A method for bonding wafers [Right-click to bookmark this link]
Former [2007/16]A method and an apparatus for bonding wafers
[2012/25]
StatusNo opposition filed within time limit
Status updated on  09.08.2013
Database last updated on 09.09.2024
Most recent event   Tooltip09.08.2013No opposition filed within time limitpublished on 11.09.2013  [2013/37]
Applicant(s)For all designated states
Thallner, Erich
Bubing 71
4782 St. Florian / AT
[2012/40]
Former [2007/16]For all designated states
Thallner, Erich, Dipl.-Ing.
Bubing 71
4782 St. Florian / AT
Inventor(s)01 / see applicant
...
 [2007/16]
Representative(s)Schweiger, Johannes, et al
Becker & Müller, Berkenbrink
Patentanwälte
Turmstrasse 22
40878 Ratingen / DE
[N/P]
Former [2007/16]Schweiger, Johannes, et al
Becker & Müller, Berkenbrink Patentanwälte Turmstrasse 22
40878 Ratingen / DE
Application number, filing date05022314.813.10.2005
[2007/16]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report 
No.:EP1775757
Date:18.04.2007
Language:DE
[2007/16]
Type: B1 Patent specification 
No.:EP1775757
Date:03.10.2012
Language:DE
[2012/40]
Search report(s)(Supplementary) European search report - dispatched on:EP28.03.2006
ClassificationIPC:H01L21/20, H01L21/18
[2012/25]
CPC:
H01L21/2007 (EP,US); H01L21/187 (EP,US)
Former IPC [2007/16]H01L21/18
Designated contracting statesAT,   DE [2007/52]
Former [2007/16]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Verfahren zum Bonden von Wafern[2012/25]
English:A method for bonding wafers[2012/25]
French:Un procédé pour joindre des wafers[2012/25]
Former [2007/16]Verfahren und eine Vorrichtung zum Bonden von Wafern
Former [2007/16]A method and an apparatus for bonding wafers
Former [2007/16]Un appareil et un procédé pour joindre des wafers
Examination procedure10.05.2006Amendment by applicant (claims and/or description)
12.05.2007Examination requested  [2007/26]
19.10.2007Loss of particular rights, legal effect: designated state(s)
26.11.2007Despatch of communication of loss of particular rights: designated state(s) BE, BG, CH, CY, CZ, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR
28.05.2008Despatch of a communication from the examining division (Time limit: M06)
05.12.2008Reply to a communication from the examining division
22.09.2009Despatch of a communication from the examining division (Time limit: M06)
24.03.2010Reply to a communication from the examining division
13.07.2010Despatch of a communication from the examining division (Time limit: M06)
22.12.2010Reply to a communication from the examining division
15.05.2012Date of oral proceedings
28.06.2012Minutes of oral proceedings despatched
04.07.2012Communication of intention to grant the patent
16.08.2012Fee for grant paid
16.08.2012Fee for publishing/printing paid
Divisional application(s)EP10005551.6  / EP2216802
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  28.05.2008
Opposition(s)04.07.2013No opposition filed within time limit [2013/37]
Fees paidRenewal fee
04.10.2007Renewal fee patent year 03
20.08.2008Renewal fee patent year 04
02.09.2009Renewal fee patent year 05
11.09.2010Renewal fee patent year 06
28.10.2011Renewal fee patent year 07
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[XY]JPH04342110  ;
 [X]US4339295  (BORETOS JOHN W, et al) [X] 12 * abstract *;
 [X]GB2263015  (MUKERJEE ROBIN [GB]) [X] 12 * abstract *;
 [X]US5421953  (NAGAKUBO MASAO [JP], et al) [X] 1,3,7,9,10 * abstract *;
 [XY]US5904860  (NAGAKUBO MASAO [JP], et al) [X] 12 * abstract * [Y] 6,11;
 [X]US6548176  (GWO DZ-HUNG [US]) [X] 1-5,7-10 * abstract *;
 [X]US2004009649  (KUB FRANCIS J [US], et al) [X] 12* abstract *;
 [X]US6905945  (BARMATZ MARTIN B [US], et al) [X] 12 * abstract *
 [XY]  - PATENT ABSTRACTS OF JAPAN, (19930415), vol. 017, no. 193, Database accession no. (E - 1351), & JP04342110 A 19921127 (FUJITSU LTD) [X] 1,3,7,9,10 * abstract * [Y] 6,11
ExaminationJPH04342110
    - PLOSZL A ET AL, "Wafer direct bonding: tailoring adhesion between brittle materials", MATERIALS SCIENCE AND ENGINEERING R: REPORTS, ELSEVIER SEQUOIA S.A., LAUSANNE, CH LNKD- DOI:10.1016/S0927-796X(98)00017-5, (19990310), vol. 25, no. 1-2, ISSN 0927-796X, pages 1 - 88, XP004167445

DOI:   http://dx.doi.org/10.1016/S0927-796X(98)00017-5
    - PATENT ABSTRACTS OF JAPAN, (19930415), vol. 017, no. 193, Database accession no. (E - 1351), & JP04342110 A 19921127 (FUJITSU LTD)
by applicantJPH04342110
 US5421953
 US6548176
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.