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Extract from the Register of European Patents

EP About this file: EP1583135

EP1583135 - Proximity head heating method and apparatus [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  21.11.2008
Database last updated on 21.05.2024
Most recent event   Tooltip26.11.2010Lapse of the patent in a contracting state
New state(s): GR		published on 29.12.2010  [2010/52]
Applicant(s)For all designated states
Lam Research Corporation
4650 Cushing Parkway
Fremont, CA 94538 / US
[2007/35]
Former [2005/40]For all designated states
Lam Research
4650 Cushing Parkway
Fremont, CA 94538 / US
Inventor(s)01 / Mikhaylichenko, Katrina
1751 Wayne Circle
San Jose, California 95131 / US
02 / deLarios, John
941 Loma Verde
Palo Alto, California 94303 / US
 [2007/34]
Former [2005/40]01 / Mikhaylichenko, Katrina
1751 Wayne Circle
San Jose California 95131 / US
02 / deLarios, John
941 Loma Verde
Palo Alto California 94303 / US
Representative(s)Thomson, Paul Anthony
Potts, Kerr & Co. 15, Hamilton Square Birkenhead
Merseyside CH41 6BR / GB
[N/P]
Former [2005/40]Thomson, Paul Anthony
Potts, Kerr & Co. 15, Hamilton Square Birkenhead
Merseyside CH41 6BR / GB
Application number, filing date05251719.021.03.2005
[2005/40]
Priority number, dateUS2004081648731.03.2004         Original published format: US 816487
[2005/40]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP1583135
Date:05.10.2005
Language:EN
[2005/40]
Type: B1 Patent specification 
No.:EP1583135
Date:16.01.2008
Language:EN
[2008/03]
Search report(s)(Supplementary) European search report - dispatched on:EP12.08.2005
ClassificationIPC:H01L21/00, C23C18/16, C25D5/22, C25D7/12, B08B3/00, B08B3/04
[2005/40]
CPC:
H01L21/67023 (EP,US); H01L21/30 (KR); B08B3/02 (EP,US);
C25D17/001 (EP,US); H01L21/67028 (EP,US); H01L21/6704 (EP,US);
H01L21/67051 (EP,US); H01L21/67063 (EP,US); H01L21/6708 (EP,US);
H01L21/67109 (EP,US); C25D17/00 (EP,US); C25D21/02 (EP,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2005/40]
TitleGerman:Ein Heizverfahren und eine Heizvorrichtung in Nahköpfen für die Halbleiterwaferherstellung[2005/40]
English:Proximity head heating method and apparatus[2005/40]
French:Un procédé et un appareil de chauffage dans les têtes de proximité pour la fabrication de plaquettes semiconductrices[2005/40]
Examination procedure25.03.2006Examination requested  [2006/21]
24.05.2006Despatch of a communication from the examining division (Time limit: M04)
03.10.2006Reply to a communication from the examining division
15.11.2006Despatch of a communication from the examining division (Time limit: M06)
18.05.2007Reply to a communication from the examining division
07.08.2007Communication of intention to grant the patent
03.12.2007Fee for grant paid
03.12.2007Fee for publishing/printing paid
Opposition(s)17.10.2008No opposition filed within time limit [2008/52]
Fees paidRenewal fee
28.03.2007Renewal fee patent year 03
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT16.01.2008
BE16.01.2008
CH16.01.2008
CY16.01.2008
CZ16.01.2008
DK16.01.2008
EE16.01.2008
FI16.01.2008
IT16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
RO16.01.2008
SI16.01.2008
SK16.01.2008
TR16.01.2008
IE21.03.2008
LU21.03.2008
MC31.03.2008
BG16.04.2008
SE16.04.2008
GR17.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
HU17.07.2008
[2010/52]
Former [2010/39]AT16.01.2008
BE16.01.2008
CH16.01.2008
CY16.01.2008
CZ16.01.2008
DK16.01.2008
EE16.01.2008
FI16.01.2008
IT16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
RO16.01.2008
SI16.01.2008
SK16.01.2008
TR16.01.2008
IE21.03.2008
LU21.03.2008
MC31.03.2008
BG16.04.2008
SE16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
HU17.07.2008
Former [2010/33]AT16.01.2008
BE16.01.2008
CH16.01.2008
CY16.01.2008
CZ16.01.2008
DK16.01.2008
EE16.01.2008
FI16.01.2008
IT16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
RO16.01.2008
SI16.01.2008
SK16.01.2008
IE21.03.2008
LU21.03.2008
MC31.03.2008
BG16.04.2008
SE16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2009/45]AT16.01.2008
BE16.01.2008
CH16.01.2008
CY16.01.2008
CZ16.01.2008
DK16.01.2008
EE16.01.2008
FI16.01.2008
IT16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
RO16.01.2008
SI16.01.2008
SK16.01.2008
IE21.03.2008
MC31.03.2008
BG16.04.2008
SE16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2009/12]AT16.01.2008
BE16.01.2008
CH16.01.2008
CZ16.01.2008
DK16.01.2008
EE16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
RO16.01.2008
SI16.01.2008
SK16.01.2008
IE21.03.2008
MC31.03.2008
BG16.04.2008
SE16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2009/08]AT16.01.2008
BE16.01.2008
CH16.01.2008
CZ16.01.2008
DK16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
RO16.01.2008
SI16.01.2008
SK16.01.2008
IE21.03.2008
MC31.03.2008
BG16.04.2008
SE16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2008/50]AT16.01.2008
BE16.01.2008
CH16.01.2008
CZ16.01.2008
DK16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
RO16.01.2008
SI16.01.2008
SK16.01.2008
MC31.03.2008
BG16.04.2008
SE16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2008/46]AT16.01.2008
BE16.01.2008
CH16.01.2008
DK16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
SI16.01.2008
MC31.03.2008
BG16.04.2008
SE16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2008/44]AT16.01.2008
BE16.01.2008
CH16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
SI16.01.2008
BG16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2008/43]AT16.01.2008
BE16.01.2008
CH16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
BG16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2008/42]AT16.01.2008
CH16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
PL16.01.2008
BG16.04.2008
ES27.04.2008
IS16.05.2008
PT16.06.2008
Former [2008/39]AT16.01.2008
CH16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
BG16.04.2008
ES27.04.2008
IS16.05.2008
Former [2008/36]CH16.01.2008
FI16.01.2008
LI16.01.2008
LT16.01.2008
NL16.01.2008
ES27.04.2008
IS16.05.2008
Former [2008/35]CH16.01.2008
LI16.01.2008
NL16.01.2008
ES27.04.2008
IS16.05.2008
Former [2008/27]NL16.01.2008
Documents cited:Search[X]WO9916109  (IMEC INTER UNI MICRO ELECTR [BE], et al) [X] 1-21 * column 3, paragraph 3 - column 4, paragraph 1; figure 1 *;
 [X]US2002051644  (SUGIMOTO HIROAKI [JP], et al) [X] 1-21* paragraphs [0065] , [0086] , [0136] , [0189]; figures 6,9 *;
 [X]WO03014416  (EBARA CORP [JP], et al) [X] 1-21 * page 27, line 31 - page 30, line 22; figure 9 *;
 [X]US6530823  (AHMADI GOODARZ [US], et al) [X] 1-21 * column 3, line 36 - column 6, line 23; figures 1,2 *;
 [X]US2003092264  (KAJITA SHINJI [JP], et al) [X] 1-21 * paragraphs [0018] - [0020]; figures 1,2 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.