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EP1666968
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EP About this file: EP1666968
| EP1666968 - Photoresist compositions [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 18.12.2009 Database last updated on 19.07.2024 | Most recent event Tooltip | 18.12.2009 | Application deemed to be withdrawn | published on 20.01.2010 [2010/03] | Applicant(s) | For all designated states Rohm and Haas Electronic Materials, LLC 455 Forest Street Marlborough Massachusetts 01752 / US | [N/P] |
| Former [2006/23] | For all designated states Rohm and Haas Electronic Materials, L.L.C. 455 Forest Street Marlborough Massachusetts 01752 / US | Inventor(s) | 01 /
Mintz, Joan M. 45 Westcott Road Harvard, Massachusetts 01451 / US | 02 /
Kaufman, Michael J. 43 Hiding Rock Road Holliston, Massachusetts 01746 / US | 03 /
Jessiman, Norman S. 52 Edgewood Road Southborough, Massachusetts 01772 / US | [2006/23] | Representative(s) | Kent, Venetia Katherine, et al Patent Outsourcing Limited 1 King Street Bakewell Derbyshire DE45 1DZ / GB | [N/P] |
| Former [2009/51] | Kent, Venetia Katherine, et al Patent Outsourcing Limited 1 King Street Bakewell Derbyshire DE 45 1DZ / GB | ||
| Former [2006/23] | Kent, Venetia Katherine, et al Rohm and Haas (UK) Ltd. European Patent Department 4th Floor, 22 Tudor Street London EC4Y 0AY / GB | Application number, filing date | 05257252.6 | 25.11.2005 | [2006/23] | Priority number, date | US20040633923P | 06.12.2004 Original published format: US 633923 P | [2006/23] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1666968 | Date: | 07.06.2006 | Language: | EN | [2006/23] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 03.04.2006 | Classification | IPC: | G03F7/004, G03F7/039, G03F7/038 | [2006/23] | CPC: |
G03F7/0045 (EP,US);
G03F7/0048 (EP,US);
G03F7/0382 (EP,US);
G03F7/0392 (EP,US)
| Designated contracting states | DE, FR, GB [2007/07] |
| Former [2006/23] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | Photoresistzusammensetzungen | [2006/23] | English: | Photoresist compositions | [2006/23] | French: | Compositions pour photoréserves | [2006/23] | Examination procedure | 27.12.2005 | Examination requested [2006/23] | 04.09.2006 | Despatch of a communication from the examining division (Time limit: M06) | 29.06.2007 | Reply to a communication from the examining division | 03.06.2009 | Application deemed to be withdrawn, date of legal effect [2010/03] | 21.08.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2010/03] | Request for further processing for: | 29.06.2007 | Request for further processing filed | 29.06.2007 | Full payment received (date of receipt of payment) Request granted | 16.07.2007 | Decision despatched | Fees paid | Renewal fee | 27.11.2007 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 30.11.2008 | 04 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]EP0561625 (OCG MICROELECTRONIC MATERIALS [US]) [X] 1-10 * page 3, line 25 - line 50 * * page 8; example 8 *; | [X]US5674662 (SZMANDA CHARLES R [US], et al) [X] 1-10 * column 4, line 39 - line 40 *; | [X]US6767687 (KIM DEOG-BAE [KR], et al) [X] 1-6,8-10 * column 16; example 4; table 1 * | by applicant | US6680159 | US6042997 | US5075199 | US4968851 | US4883740 | US4810613 | US4491628 | US6743563 | US6727049 | US6607870 | US6300035 | US6667136 | US5492793 | US5929176 | US6090526 | US5843624 | US6048664 | US6057083 | EP1008913 | EP0930542 | US6136501 | US6048662 | WO0186353 | US6306554 | WO0017712 | EP0783136 | EP0164248 | EP0232972 | US5128232 | US2003235785 |