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EP1705695
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EP About this file: EP1705695
| EP1705695 - EXPOSURE APPARATUS AND DEVICE PRODUCING METHOD [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 26.07.2013 Database last updated on 15.06.2024 | Most recent event Tooltip | 26.07.2013 | Application deemed to be withdrawn | published on 28.08.2013 [2013/35] | Applicant(s) | For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | [N/P] |
| Former [2010/30] | For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | ||
| Former [2006/39] | For all designated states NIKON CORPORATION Fuji Building, 2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8831 / JP | Inventor(s) | 01 /
TSUJI, Toshihiko, c/o NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 1008331 / JP | 02 /
SHIRAISHI, Kenichi, c/o NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 1008331 / JP | 03 /
NAGASAKA, Hiroyuki, c/o NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 1008331 / JP | 04 /
NAKANO, Katsushi, c/o NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 1008331 / JP | [2006/39] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [N/P] |
| Former [2008/31] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | ||
| Former [2006/39] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 05703467.0 | 12.01.2005 | [2006/39] | WO2005JP00228 | Priority number, date | JP20040007948 | 15.01.2004 Original published format: JP 2004007948 | [2006/39] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2005069355 | Date: | 28.07.2005 | Language: | EN | [2005/30] | Type: | A1 Application with search report | No.: | EP1705695 | Date: | 27.09.2006 | Language: | EN | The application published by WIPO in one of the EPO official languages on 28.07.2005 takes the place of the publication of the European patent application. | [2006/39] | Search report(s) | International search report - published on: | JP | 28.07.2005 | (Supplementary) European search report - dispatched on: | EP | 10.07.2007 | Classification | IPC: | H01L21/027, G03F7/20 | [2006/39] | CPC: |
G03F7/70725 (EP,KR,US);
G03F7/70775 (EP,KR,US);
G03F7/70716 (KR);
G03F7/7085 (KR)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2006/39] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | LV | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | BELICHTUNGSVORRICHTUNG UND BAUELEMENTE-HERSTELLUNGSVERFAHREN | [2006/39] | English: | EXPOSURE APPARATUS AND DEVICE PRODUCING METHOD | [2006/39] | French: | DISPOSITIF D'EXPOSITION ET SON PROCEDE DE FABRICATION | [2006/39] | Entry into regional phase | 07.07.2006 | Translation filed | 07.07.2006 | National basic fee paid | 07.07.2006 | Search fee paid | 07.07.2006 | Designation fee(s) paid | 07.07.2006 | Examination fee paid | Examination procedure | 07.07.2006 | Examination requested [2006/39] | 12.11.2007 | Despatch of a communication from the examining division (Time limit: M06) | 19.05.2008 | Reply to a communication from the examining division | 24.06.2009 | Despatch of a communication from the examining division (Time limit: M06) | 29.12.2009 | Reply to a communication from the examining division | 25.10.2010 | Despatch of a communication from the examining division (Time limit: M04) | 23.02.2011 | Reply to a communication from the examining division | 18.10.2012 | Despatch of a communication from the examining division (Time limit: M04) | 01.03.2013 | Application deemed to be withdrawn, date of legal effect [2013/35] | 09.04.2013 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2013/35] | Divisional application(s) | EP08020525.5 / EP2037489 | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 12.11.2007 | Fees paid | Renewal fee | 25.01.2007 | Renewal fee patent year 03 | 23.01.2008 | Renewal fee patent year 04 | 28.01.2009 | Renewal fee patent year 05 | 26.01.2010 | Renewal fee patent year 06 | 25.01.2011 | Renewal fee patent year 07 | 24.01.2012 | Renewal fee patent year 08 | Penalty fee | Additional fee for renewal fee | 31.01.2013 | 09 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]JPH06204108 (CANON KK) [Y] 8-13 * the whole document *; | [XY]EP0834773 (NIPPON KOGAKU KK [JP]) [X] 1,2,7,14,16 * columns 1-8; figures 1-4,9-13 * * columns 10-12,18 * * columns 27-30 * * column 3; figures 9,10 * [Y] 7-14,16; | [DY]WO9949504 (NIKON CORP [JP], et al) [DY] 7-16 * figures 1-6 *; | [XY]EP1143492 (NIKON CORP [JP]) [X] 1,2,4-6,16 * paragraphs [0089] - [0183]; figures 1-3 * [Y] 7-16; | [PXA]EP1477858 (ASML NETHERLANDS BV [NL]) [PX] 1-3,16 * paragraphs [0001] , [0063] - [0069]; figures 1,10,11 * * paragraphs [0079] , [0080]; figure 14 * [PA] 4; | [PX]EP1477856 (ASML NETHERLANDS BV [NL]) [PX] 7,14-16* the whole document * | International search | [XP]JP2004343120 (ASML NETHERLANDS BV); | [A]JP2002227924 (CANON KK); | [A]JP2001102286 (NIKON CORP); | [A]JPH09236151 (CANON KK); | [A]JPH06204108 (CANON KK) |