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EP1711961
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EP About this file: EP1711961
| EP1711961 - METHOD AND APPARATUS FOR MAINTAINING PARALLELISM OF LAYERS AND/OR ACHIEVING DESIRED THICKNESSES OF LAYERS DURING THE ELECTROCHEMICAL FABRICATION OF STRUCTURES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 03.08.2012 Database last updated on 14.08.2024 | Most recent event Tooltip | 03.08.2012 | Application deemed to be withdrawn | published on 05.09.2012 [2012/36] | Applicant(s) | For all designated states Microfabrica Inc. 1103 West Isabel Street Burbank, CA 91506 / US | [2006/42] | Inventor(s) | 01 /
KUMAR, Ananda, H. 1999 Blackfoot Drive Fremont, CA 94539 / US | 02 /
COHEN, Adam, L. 9537 Kirkside Road Los Angeles, CA 90035 / US | 03 /
LOCKARD, Michael, S. 15152 Bluffton Street Lake Elizabeth, CA 93532 / US | [2006/42] | Representative(s) | Freeman, Jacqueline Carol WP Thompson 138 Fetter Lane London EC4A 1BT / GB | [N/P] |
| Former [2009/49] | Freeman, Jacqueline Carol W.P.Thompson & Co. 55 Drury Lane London WC2B 5SQ / GB | ||
| Former [2006/42] | Freeman, Jacqueline Carol W.P. THOMPSON & CO. 55 Drury Lane London WC2B 5SQ / GB | Application number, filing date | 05704921.5 | 03.01.2005 | [2006/42] | WO2005US00086 | Priority number, date | US20030534183P | 31.12.2003 Original published format: US 534183 P | US20030534159P | 31.12.2003 Original published format: US 534159 P | [2006/42] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2005065436 | Date: | 21.07.2005 | Language: | EN | [2005/29] | Type: | A2 Application without search report | No.: | EP1711961 | Date: | 18.10.2006 | Language: | EN | The application published by WIPO in one of the EPO official languages on 21.07.2005 takes the place of the publication of the European patent application. | [2006/42] | Search report(s) | International search report - published on: | US | 06.04.2006 | (Supplementary) European search report - dispatched on: | EP | 22.09.2008 | Classification | IPC: | C25D1/00, C25D15/02, C25D21/12, B24B49/00, B81C1/00, G01B5/06, G01B5/28, H01L21/3105 | [2008/43] | CPC: |
C25D5/10 (EP,US);
H01L21/304 (KR);
B33Y10/00 (EP,US);
B81C1/00492 (EP,US);
B81C99/0065 (EP,US);
C25D1/00 (EP,US);
C25D1/003 (EP,US);
C25D21/12 (EP,US);
C25D5/022 (EP,US);
C25D5/48 (US);
H01L21/2885 (EP,US);
H01L21/76885 (EP,US);
|
| Former IPC [2006/42] | H01L21/4763 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2006/42] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | LV | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | VERFAHREN UND VORRICHTUNG ZUR AUFRECHTERHALTUNG DER PARALLELITÄT VON SCHICHTEN UND/ODER ZUM ERZIELEN GEWÜNSCHTER DICKEN VON SCHICHTEN WÄHREND DER ELEKTROCHEMISCHEN HERSTELLUNG VON STRUKTUREN | [2006/42] | English: | METHOD AND APPARATUS FOR MAINTAINING PARALLELISM OF LAYERS AND/OR ACHIEVING DESIRED THICKNESSES OF LAYERS DURING THE ELECTROCHEMICAL FABRICATION OF STRUCTURES | [2006/42] | French: | PROCEDE ET DISPOSITIF POUR MAINTENIR LE PARALLELISME DE COUCHES ET/OU OBTENIR DES EPAISSEURS VOULUES DE COUCHES PENDANT LA FABRICATION ELECTROCHIMIQUE DE STRUCTURES | [2006/42] | Entry into regional phase | 19.07.2006 | National basic fee paid | 19.07.2006 | Search fee paid | 19.07.2006 | Designation fee(s) paid | 19.07.2006 | Examination fee paid | Examination procedure | 19.07.2006 | Examination requested [2006/42] | 03.11.2011 | Despatch of a communication from the examining division (Time limit: M04) | 14.03.2012 | Application deemed to be withdrawn, date of legal effect [2012/36] | 19.04.2012 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2012/36] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 03.11.2011 | Fees paid | Renewal fee | 12.01.2007 | Renewal fee patent year 03 | 14.01.2008 | Renewal fee patent year 04 | 14.01.2009 | Renewal fee patent year 05 | 13.01.2010 | Renewal fee patent year 06 | 14.01.2011 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 31.01.2012 | 08 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US5718618 (GUCKEL HENRY [US], et al) [X] 1-18 * the whole document *; | [X]US6027630 (COHEN ADAM L [US]) [X] 1-18 * column 15, line 54 - column 16, line 21 * * column 17, line 58 - column 18, line 12 *; | [X]US2003121791 (COHEN ADAM L [US]) [X] 1-18 * the whole document *; | [X]WO03095712 (UNIV SOUTHERN CALIFORNIA [US]) [X] 8,10,12 * page 7 * * page 16 *; | [X]WO03095708 (MEMGEN CORP [US]) [X] 8,10,12 * pages 6,7 * * figures 2d,3c *; | [X]US2003234179 (BANG CHRISTOPHER A [US]) [X] 8,10,12 * paragraph [0030] ** figures 2d,3a *; | [X] - COHEN A ET AL, "EFAB: rapid, low-cost desktop micromachining of high aspect ratio true 3-D MEMS", MICRO ELECTRO MECHANICAL SYSTEMS, 1999. MEMS '99. TWELFTH IEEE INTERNA TIONAL CONFERENCE ON ORLANDO, FL, USA 17-21 JAN. 1999, PISCATAWAY, NJ, USA,IEEE, US, (19990117), ISBN 978-0-7803-5194-3, pages 244 - 251, XP010321754 [X] 8,10,12 * page 246, paragraph EFAB * * figure 7c * | [X] - COHEN A ET AL, "EFAB: LOW-COST AUTOMATED ELECTROCHEMICAL BATCH FABRICATION OF ARBITRARY 3-D MICROSTRUCTURES", PROCEEDINGS OF SPIE-THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, SPIE, BELLINGHAM, WA; US, (19990920), vol. 3874, pages 236 - 247, XP008045823 [X] 8,10,12 * abstract * * page 239, paragraph EFAB - page 240 * * figure 7c * DOI: http://dx.doi.org/10.1117/12.361227 | International search | [A]US5718618 (GUCKEL HENRY [US], et al); | [A]US2003121791 (COHEN ADAM L [US]) |