EP1735817 - SINGLE WORKPIECE PROCESSING CHAMBER [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 11.06.2010 Database last updated on 08.10.2024 | Most recent event Tooltip | 19.10.2012 | Lapse of the patent in a contracting state New state(s): TR | published on 21.11.2012 [2012/47] | Applicant(s) | For all designated states SEMITOOL, INC. 655 West Reserve Drive Kalispell Montana 59901 / US | [2006/52] | Inventor(s) | 01 /
WOODRUFF, Daniel, J. 409 Northridge Drive Kalispell, MT 59901 / US | [2006/52] | Representative(s) | Moore, Barry, et al Hanna Moore + Curley Garryard House 25/26 Earlsfort Terrace Dublin 2, D02 PX51 / IE | [N/P] |
Former [2006/52] | Moore, Barry, et al Hanna, Moore & Curley 13 Lower Lad Lane Dublin 2 / IE | Application number, filing date | 05725306.4 | 09.03.2005 | [2006/52] | WO2005US08066 | Priority number, date | US20040552642P | 12.03.2004 Original published format: US 552642 P | US20050075099 | 08.03.2005 Original published format: US 75099 | [2006/52] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2005091340 | Date: | 29.09.2005 | Language: | EN | [2005/39] | Type: | A1 Application with search report | No.: | EP1735817 | Date: | 27.12.2006 | Language: | EN | The application published by WIPO in one of the EPO official languages on 29.09.2005 takes the place of the publication of the European patent application. | [2006/52] | Type: | B1 Patent specification | No.: | EP1735817 | Date: | 05.08.2009 | Language: | EN | [2009/32] | Search report(s) | International search report - published on: | EP | 29.09.2005 | Classification | IPC: | H01L21/00, C25D7/12 | [2006/52] | CPC: |
C25D17/001 (EP,KR,US);
C25D17/16 (EP,KR,US);
H01L21/00 (EP,US);
Y10S134/902 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2006/52] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | LV | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | EINZEL-ARBEITSSTÜCK-VERARBEITUNGSKAMMER | [2006/52] | English: | SINGLE WORKPIECE PROCESSING CHAMBER | [2006/52] | French: | CHAMBRE DE TRAITEMENT POUR UNE SEULE PIECE A TRAITER | [2006/52] | Entry into regional phase | 11.10.2006 | National basic fee paid | 11.10.2006 | Designation fee(s) paid | 11.10.2006 | Examination fee paid | Examination procedure | 11.10.2006 | Amendment by applicant (claims and/or description) | 11.10.2006 | Examination requested [2006/52] | 23.01.2008 | Despatch of a communication from the examining division (Time limit: M04) | 14.03.2008 | Reply to a communication from the examining division | 09.03.2009 | Communication of intention to grant the patent | 23.06.2009 | Fee for grant paid | 23.06.2009 | Fee for publishing/printing paid | Opposition(s) | 07.05.2010 | No opposition filed within time limit [2010/28] | Fees paid | Renewal fee | 28.03.2007 | Renewal fee patent year 03 | 27.03.2008 | Renewal fee patent year 04 | 26.03.2009 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | BE | 05.08.2009 | CY | 05.08.2009 | CZ | 05.08.2009 | DK | 05.08.2009 | EE | 05.08.2009 | FI | 05.08.2009 | IT | 05.08.2009 | LT | 05.08.2009 | NL | 05.08.2009 | PL | 05.08.2009 | RO | 05.08.2009 | SE | 05.08.2009 | SI | 05.08.2009 | SK | 05.08.2009 | TR | 05.08.2009 | BG | 05.11.2009 | GR | 06.11.2009 | ES | 16.11.2009 | IS | 05.12.2009 | PT | 05.12.2009 | HU | 06.02.2010 | IE | 09.03.2010 | LU | 09.03.2010 | MC | 31.03.2010 | [2012/47] |
Former [2012/43] | BE | 05.08.2009 | |
CY | 05.08.2009 | ||
CZ | 05.08.2009 | ||
DK | 05.08.2009 | ||
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
IT | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
RO | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
SK | 05.08.2009 | ||
BG | 05.11.2009 | ||
GR | 06.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
HU | 06.02.2010 | ||
IE | 09.03.2010 | ||
LU | 09.03.2010 | ||
MC | 31.03.2010 | ||
Former [2012/42] | BE | 05.08.2009 | |
CY | 05.08.2009 | ||
CZ | 05.08.2009 | ||
DK | 05.08.2009 | ||
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
IT | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
RO | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
SK | 05.08.2009 | ||
BG | 05.11.2009 | ||
GR | 06.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
HU | 06.02.2010 | ||
IE | 09.03.2010 | ||
MC | 31.03.2010 | ||
Former [2012/37] | BE | 05.08.2009 | |
CY | 05.08.2009 | ||
CZ | 05.08.2009 | ||
DK | 05.08.2009 | ||
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
IT | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
RO | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
SK | 05.08.2009 | ||
BG | 05.11.2009 | ||
GR | 06.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
IE | 09.03.2010 | ||
MC | 31.03.2010 | ||
Former [2011/16] | BE | 05.08.2009 | |
CZ | 05.08.2009 | ||
DK | 05.08.2009 | ||
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
IT | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
RO | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
SK | 05.08.2009 | ||
BG | 05.11.2009 | ||
GR | 06.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
IE | 09.03.2010 | ||
MC | 31.03.2010 | ||
Former [2011/07] | BE | 05.08.2009 | |
CZ | 05.08.2009 | ||
DK | 05.08.2009 | ||
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
RO | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
SK | 05.08.2009 | ||
BG | 05.11.2009 | ||
GR | 06.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
IE | 09.03.2010 | ||
MC | 31.03.2010 | ||
Former [2010/46] | BE | 05.08.2009 | |
CZ | 05.08.2009 | ||
DK | 05.08.2009 | ||
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
RO | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
SK | 05.08.2009 | ||
BG | 05.11.2009 | ||
GR | 06.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
MC | 31.03.2010 | ||
Former [2010/28] | BE | 05.08.2009 | |
CZ | 05.08.2009 | ||
DK | 05.08.2009 | ||
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
RO | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
SK | 05.08.2009 | ||
BG | 05.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
Former [2010/23] | CZ | 05.08.2009 | |
DK | 05.08.2009 | ||
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
RO | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
SK | 05.08.2009 | ||
BG | 05.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
Former [2010/20] | DK | 05.08.2009 | |
EE | 05.08.2009 | ||
FI | 05.08.2009 | ||
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
BG | 05.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
Former [2010/17] | FI | 05.08.2009 | |
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
BG | 05.11.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | ||
PT | 05.12.2009 | ||
Former [2010/12] | FI | 05.08.2009 | |
LT | 05.08.2009 | ||
NL | 05.08.2009 | ||
PL | 05.08.2009 | ||
SE | 05.08.2009 | ||
SI | 05.08.2009 | ||
ES | 16.11.2009 | ||
IS | 05.12.2009 | Cited in | International search | [A]JP2003168673 ; | [A]JP2003251255 | by applicant | JP2003251255 |