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EP1735831
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EP About this file: EP1735831
| EP1735831 - MANUFACTURE OF POROUS DIAMOND FILMS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 02.03.2012 Database last updated on 27.07.2024 | Most recent event Tooltip | 02.03.2012 | Application deemed to be withdrawn | published on 04.04.2012 [2012/14] | Applicant(s) | For all designated states Intel Corporation 2200 Mission College Boulevard Santa Clara, CA 95054 / US | [N/P] |
| Former [2006/52] | For all designated states Intel Corporation (A Delaware Corporation) 2200 Mission College Boulevard Santa Clara, CA 95052 / US | Inventor(s) | 01 /
RAVI, Kramadhati 89 Fairoaks Lane Atherton, CA 94027 / US | [2006/52] | Representative(s) | Goddar, Heinz J., et al Boehmert & Boehmert Anwaltspartnerschaft mbB Pettenkoferstrasse 22 80336 München / DE | [N/P] |
| Former [2006/52] | Goddar, Heinz J., et al FORRESTER & BOEHMERT Pettenkoferstrasse 20-22 80336 München / DE | Application number, filing date | 05729544.6 | 31.03.2005 | [2006/52] | WO2005US10917 | Priority number, date | US20040823836 | 13.04.2004 Original published format: US 823836 | [2006/52] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2005101500 | Date: | 27.10.2005 | Language: | EN | [2005/43] | Type: | A2 Application without search report | No.: | EP1735831 | Date: | 27.12.2006 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.10.2005 takes the place of the publication of the European patent application. | [2006/52] | Search report(s) | International search report - published on: | EP | 04.05.2006 | Classification | IPC: | H01L23/532, C23C16/27, C23C16/56 | [2006/52] | CPC: |
C23C16/56 (EP,KR,US);
C23C16/27 (EP,KR,US);
C23C16/26 (EP,US);
H01L23/532 (KR);
H01L23/5329 (EP,US);
H01L2924/0002 (EP,US);
Y10T428/30 (EP,US)
(-)
| C-Set: |
H01L2924/0002, H01L2924/00 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2006/52] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | LV | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | HERSTELLUNG PORÖSER DIAMANTFILME | [2006/52] | English: | MANUFACTURE OF POROUS DIAMOND FILMS | [2006/52] | French: | FABRICATION DE FILMS DE DIAMANT POREUX | [2006/52] | Entry into regional phase | 06.10.2006 | National basic fee paid | 06.10.2006 | Designation fee(s) paid | 06.10.2006 | Examination fee paid | Examination procedure | 06.10.2006 | Examination requested [2006/52] | 15.06.2011 | Despatch of a communication from the examining division (Time limit: M04) | 01.10.2011 | Application deemed to be withdrawn, date of legal effect [2012/14] | 09.11.2011 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2012/14] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 15.06.2011 | Fees paid | Renewal fee | 14.03.2007 | Renewal fee patent year 03 | 14.03.2008 | Renewal fee patent year 04 | 13.03.2009 | Renewal fee patent year 05 | 15.03.2010 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.03.2011 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]US4957591 (SATO YOICHIRO [JP], et al) [X] 1-3,6,7,9,10,19 * column 3, lines 10-35; example - *; | [X] - MASUDA H ET AL, "FABRICATION OF A NANOSTRUCTURED DIAMOND HONEYCOMB FILM", ADVANCED MATERIALS, VCH VERLAGSGESELLSCHAFT, WEINHEIM, DE, (20000316), vol. 12, no. 6, ISSN 0935-9648, pages 444 - 447, XP000923877 [X] 19 * the whole document * DOI: http://dx.doi.org/10.1002/(SICI)1521-4095(200003)12:6<444::AID-ADMA444>3.3.CO;2-B | [A] - RAMESHAM R ET AL, "Plasma etching and patterning of CVD diamond at < 100 DEG C for microelectronics applications", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, (199707), vol. 304, no. 1-2, ISSN 0040-6090, pages 245 - 251, XP004096481 [A] 8 * the whole document * DOI: http://dx.doi.org/10.1016/S0040-6090(97)00195-8 |