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EP1815041
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EP About this file: EP1815041
| EP1815041 - WAFER FAB [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 05.03.2010 Database last updated on 04.06.2024 | Most recent event Tooltip | 05.03.2010 | Application deemed to be withdrawn | published on 07.04.2010 [2010/14] | Applicant(s) | For all designated states INTEVAC, INC. 3560 Bassett Street Santa Clara California 95054-2704 / US | [2007/32] | Inventor(s) | 01 /
FAIRBAIRN, Kevin, P. 14810 Sky Lane Los Gatos, CA 95032 / US | 02 /
PONNEKANTI, Hari 3694 Meadowlands Lane San Jose, CA 95135 / US | 03 /
LANE, Christopher 17930 Overlook Road Los Gatos, CA 95030 / US | 04 /
WEISS, Robert, Edward 455 Diamond Street San Francisco, CA 94114 / US | 05 /
LATCHFORD, Ian 171 Heather Lane Palo Alto, CA 94303 / US | 06 /
BLUCK, Terry 3128 Butte Street Santa Clara, CA 95051 / US | [2007/32] | Representative(s) | Foster, Mark Charles, et al Mathisen & Macara LLP Charta House 30-38 Church Street Staines-upon-Thames, Middlesex TW18 4EP / GB | [N/P] |
| Former [2007/32] | Foster, Mark Charles, et al Mathisen, Macara & Co. The Coach House 6-8 Swakeleys Road Ickenham, Uxbridge UB10 8BZ / GB | Application number, filing date | 05825763.5 | 31.10.2005 | [2007/32] | WO2005US39433 | Priority number, date | US20040991722 | 18.11.2004 Original published format: US 991722 | [2007/32] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2006055236 | Date: | 26.05.2006 | Language: | EN | [2006/21] | Type: | A2 Application without search report | No.: | EP1815041 | Date: | 08.08.2007 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.05.2006 takes the place of the publication of the European patent application. | [2007/32] | Search report(s) | International search report - published on: | US | 15.11.2007 | (Supplementary) European search report - dispatched on: | EP | 30.06.2009 | Classification | IPC: | C23C16/00, H01L21/306 | [2007/32] | CPC: |
H01L21/67201 (EP,US);
H01L21/67161 (EP,US);
H01L21/67173 (EP,US);
H01L21/6719 (EP,US);
H01L21/67745 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/32] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | WAFER-FAB | [2007/32] | English: | WAFER FAB | [2007/32] | French: | FABRICATION DES PLAQUETTES | [2007/32] | Entry into regional phase | 07.05.2007 | National basic fee paid | 07.05.2007 | Search fee paid | 07.05.2007 | Designation fee(s) paid | 07.05.2007 | Examination fee paid | Examination procedure | 11.09.2006 | Request for preliminary examination filed International Preliminary Examining Authority: US | 07.05.2007 | Examination requested [2007/32] | 12.02.2008 | Amendment by applicant (claims and/or description) | 29.09.2009 | Application deemed to be withdrawn, date of legal effect [2010/14] | 03.11.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2010/14] | Fees paid | Renewal fee | 14.03.2008 | Renewal fee patent year 03 | 14.10.2008 | Renewal fee patent year 04 | 13.10.2009 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 31.10.2007 | 03 M06 Fee paid on 14.03.2008 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]WO9961678 (WHITESELL ANDREW B [US]) [X] 1-3,5-17,19-28,30,31 * abstract * * claims 1,23,59 * * page 1, line 1 - line 7 * * page 5, line 5 - line 11 * * page 7, line 1 - line 5 * * page 7, line 24 - line 30 * * page 8, line 14 - line 30 * * page 12, line 10 - line 16 * * page 13, line 1 - line 5 * * figures 1,2,3A,3B,4,6 *; | [A]EP0843348 (APPLIED MATERIALS INC [US]) [A] 1-31 * abstract * * figure 1B * | International search | [X]US4981408 (HUGHES JOHN L [US], et al); | [A]US3717119 (BOYS D, et al) |