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Extract from the Register of European Patents

EP About this file: EP1828841

EP1828841 - TRI-TONE TRIM MASK FOR ALTERNATING PHASE-SHIFT PHOTOLITHOGRAPHY [Right-click to bookmark this link]
StatusThe application has been refused
Status updated on  08.04.2022
Database last updated on 14.05.2024
FormerExamination is in progress
Status updated on  06.12.2019
Most recent event   Tooltip08.04.2022Refusal of applicationpublished on 11.05.2022  [2022/19]
Applicant(s)For all designated states
Texas Instruments Incorporated
P.O. Box 655474
Mail Station 3999
Dallas, TX 75265-5474 / US
[N/P]
Former [2007/36]For all designated states
Texas Instruments Incorporated
P.O. Box 655474 Mail Station 3999
Dallas, Texas 75265-5474 / US
Inventor(s)01 / ATON, Thomas, J.
15735 Daleport Circle
Dallas, Texas 75248 / US
 [2007/36]
Representative(s)Zeller, Andreas, et al
Texas Instruments Deutschland GmbH
Haggertystraße 1
85356 Freising / DE
[N/P]
Former [2013/18]Holt, Michael
Texas Instruments Limited
3rd Floor
401 Grafton Gate
Milton Keynes
MK91AQ / GB
Former [2008/33]Holt, Michael
Texas Instruments Limited European Patents Department 800 Pavilion Drive
Northampton NN4 7YL / GB
Former [2007/36]Holt, Michael
Texas Instruments, Ltd. Patents 800 Pavillon Drive Northampton Business Park Northampton
Northamptonshire NN4 7YL / GB
Application number, filing date05826034.001.12.2005
[2007/36]
WO2005US43356
Priority number, dateUS2004000116501.12.2004         Original published format: US 1165
[2007/36]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2006060504
Date:08.06.2006
Language:EN
[2006/23]
Type: A2 Application without search report 
No.:EP1828841
Date:05.09.2007
Language:EN
The application published by WIPO in one of the EPO official languages on 08.06.2006 takes the place of the publication of the European patent application.
[2007/36]
Search report(s)International search report - published on:US07.05.2009
(Supplementary) European search report - dispatched on:EP28.11.2012
ClassificationIPC:G03F1/00, G03C5/00, // G03F1/30, G03F1/32
[2012/52]
CPC:
G03F1/32 (EP,US); G03F1/30 (EP,US); G03F1/70 (EP,US)
Former IPC [2007/36]G03F1/00, G03C5/00
Designated contracting statesDE,   FR,   GB [2009/51]
Former [2008/11]
Former [2007/36]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
MKNot yet paid
YUNot yet paid
TitleGerman:DREITON-TRIMMASKE FÜR DIE PHASENVERSCHIEBUNGSALTERNIERUNGS-FOTOLITHOGRAPHIE[2007/36]
English:TRI-TONE TRIM MASK FOR ALTERNATING PHASE-SHIFT PHOTOLITHOGRAPHY[2007/36]
French:MASQUE D'AJUSTAGE EN TROIS TONS PERMETTANT D'ALTERNER LA PHOTOLITHOGRAPHIE A DEPHASAGE[2007/36]
Entry into regional phase02.07.2007National basic fee paid 
02.07.2007Search fee paid 
09.11.2009Designation fee(s) paid 
09.11.2009Examination fee paid 
Examination procedure09.11.2009Examination requested  [2009/51]
14.10.2013Amendment by applicant (claims and/or description)
10.12.2019Despatch of a communication from the examining division (Time limit: M06)
14.07.2020Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time
24.09.2020Reply to a communication from the examining division
07.06.2021Cancellation of oral proceeding that was planned for 10.06.2021
10.06.2021Date of oral proceedings (cancelled)
17.06.2021Despatch of communication that the application is refused, reason: substantive examination [2022/19]
27.06.2021Application refused, date of legal effect [2022/19]
Appeal following examination27.08.2021Appeal received No.  T2144/21
27.08.2021Payment of appeal fee
22.03.2022Result of appeal procedure: appeal of the applicant inadmissible
25.03.2022Despatch of the decision of the Board of Appeal
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  10.12.2019
Request for further processing for:The application is deemed to be withdrawn due to failure to reply to the examination report
24.09.2020Request for further processing filed
24.09.2020Full payment received (date of receipt of payment)
Request granted
02.10.2020Decision despatched
The application is deemed to be withdrawn due to failure to reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report/Supplementary European search report
14.10.2013Request for further processing filed
14.10.2013Full payment received (date of receipt of payment)
Request granted
24.10.2013Decision despatched
Fees paidRenewal fee
02.01.2008Renewal fee patent year 03
05.01.2009Renewal fee patent year 04
04.01.2010Renewal fee patent year 05
03.01.2011Renewal fee patent year 06
02.01.2012Renewal fee patent year 07
02.01.2013Renewal fee patent year 08
02.01.2014Renewal fee patent year 09
05.01.2015Renewal fee patent year 10
04.01.2016Renewal fee patent year 11
02.01.2017Renewal fee patent year 12
02.01.2018Renewal fee patent year 13
02.01.2019Renewal fee patent year 14
02.01.2020Renewal fee patent year 15
11.01.2021Renewal fee patent year 16
03.01.2022Renewal fee patent year 17
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Documents cited:Search[X]US2004043305  (PARK CHUL-HONG [KR], et al) [X] 1-8 * abstract * * paragraph [0009] - paragraph [0020] * * paragraph [0034] - paragraph [0039] * * paragraph [0058] - paragraph [0061] * * example 1; claims 1, 11, 15, 25, 29, 39 *;
 [X]US6711732  (DAI CHANG-MING [TW], et al) [X] 1-8 * paragraph [0014] - paragraph [0020] * * paragraph [0044] * * paragraph [0055] - paragraph [0056] * * figures 3a, 3b, 8; claims 1,6 *;
 [XI]US2004074868  (CHANG CHUNG-HSING [TW]) [X] 1-6,8 * abstract * * figures 1-4 * * paragraph [0004] - paragraph [0008] * * paragraph [0017] * * paragraph [0020] - paragraph [0023] * [I] 7;
 [X]US2004197677  (KOHLE RODERICK [DE], et al) [X] 1-8 * paragraph [0013] - paragraph [0020] * * paragraph [0025] - paragraph [0027] * * paragraph [0033] - paragraph [0045] * * paragraph [0049] - paragraph [0053] * * paragraph [0060] - paragraph [0069] *
International search[X]US2004074868  (CHANG CHUNG-HSING [TW]);
 [X]US6551750  (PIERRAT CHRISTOPHE [US])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.