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Extract from the Register of European Patents

EP About this file: EP1927891

EP1927891 - Projection objective with conjugated pupils [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  01.05.2009
Database last updated on 24.04.2024
Most recent event   Tooltip01.05.2009Application deemed to be withdrawnpublished on 03.06.2009  [2009/23]
Applicant(s)For all designated states
Carl Zeiss SMT AG
Rudolf-Eber-Strasse 2
73447 Oberkochen / DE
[2008/23]
Inventor(s)01 / Epple, Alexander
Langertstrasse 38
73431 Aalen / DE
 [2008/23]
Representative(s)Patentanwälte Ruff, Wilhelm, Beier, Dauster & Partner mbB
Kronenstrasse 30
70174 Stuttgart / DE
[N/P]
Former [2008/23]Patentanwälte Ruff, Wilhelm, Beier, Dauster & Partner
Kronenstrasse 30
70174 Stuttgart / DE
Application number, filing date06024790.530.11.2006
[2008/23]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP1927891
Date:04.06.2008
Language:EN
[2008/23]
Search report(s)(Supplementary) European search report - dispatched on:EP11.10.2007
ClassificationIPC:G03F7/20, G02B17/08
[2008/23]
CPC:
G03F7/70341 (EP); G02B13/22 (EP); G02B17/08 (EP);
G02B17/0812 (EP); G03F7/70225 (EP); G03F7/70308 (EP)
Designated contracting statesDE,   NL [2009/07]
Former [2008/23]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Projektionsobjektiv mit konjugierten Pupillen[2008/23]
English:Projection objective with conjugated pupils[2008/23]
French:Objectif de projection avec pupilles conjuguées[2008/23]
Examination procedure05.12.2008Application deemed to be withdrawn, date of legal effect  [2009/23]
19.01.2009Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time  [2009/23]
Fees paidPenalty fee
Additional fee for renewal fee
30.11.200803   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[X]US2002036832  (SCHULTZ JORG [DE], et al) [X] 1,2,4,5,8,25,27,28,30 * paragraphs [0049] , [0084] , [0085]; figure 9 *;
 [X]WO2006005547  (ZEISS CARL SMT AG [DE], et al) [X] 1,7,12-14,28,29 * pages 29-32; figure 16 *;
 [X]WO2005069055  (ZEISS CARL SMT AG [DE], et al) [X] 1,13,16-19,32 * pages 38-40; figures 10,11 * * page 59; figure 30 *;
 [DX]WO2005111689  (ZEISS CARL SMT AG [DE], et al) [DX] 1,13,15 * pages 37-39; figure 12 *;
 [XY]US2005002111  (GRUNER TORALF [DE], et al) [X] 20,21,32 * paragraph [0055]; figure 1; claim 80 * [Y] 23;
 [Y]US2006077371  (WEGMANN ULRICH [DE], et al) [Y] 23 * paragraphs [0006] , [0007] *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.