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EP1783548
European procedure
Extract from the Register of European Patents
EP About this file: EP1783548
| EP1783548 - Method of forming a patterned layer on a substrate [Right-click to bookmark this link] | |||
| Former [2007/19] | Photosensitive composition | ||
| [2016/32] | Status | No opposition filed within time limit Status updated on 12.01.2018 Database last updated on 26.06.2024 | |
| Former | The patent has been granted Status updated on 03.02.2017 | ||
| Former | Grant of patent is intended Status updated on 09.01.2017 | ||
| Former | Examination is in progress Status updated on 02.12.2016 | Most recent event Tooltip | 09.11.2018 | Lapse of the patent in a contracting state New state(s): GB | published on 12.12.2018 [2018/50] | Applicant(s) | For all designated states Rohm and Haas Electronic Materials LLC 455 Forest Street Marlborough, MA 01752 / US | [2017/10] |
| Former [2007/19] | For all designated states Rohm and Haas Electronic Materials LLC 455 Forest Street Marlborough MA 01752 / US | Inventor(s) | 01 /
Winkle, Mark R. 905 Sycamore Drive Lansdale, Pennsylvania 19446 / US | 02 /
Steeper, Jill E. 81 West Highland Avenue Melrose, Massachusetts 02176 / US | 03 /
Liu, Xiang-Qian 228 Mill Grove Drive Norristown, Pennsylvania 19403 / US | 04 /
Okada-Coakley, Janet 7 Rocky Pond Road Boylston, Massachusetts 01505 / US | 05 /
Ibbitson, Scott A. 121 Pennapacker Road Trappe, Pennsylvania 19426 / US | [2007/19] | Representative(s) | Hoggins, Mark Andrew, et al Patent Outsourcing Limited 1 King Street Bakewell Derbyshire DE45 1DZ / GB | [2017/10] |
| Former [2009/51] | Kent, Venetia Katherine, et al Patent Outsourcing Limited 1 King Street Bakewell Derbyshire DE 45 1DZ / GB | ||
| Former [2007/19] | Kent, Venetia Katherine, et al Rohm and Haas (UK) Ltd. European Patent Department 4th Floor, 22 Tudor Street London EC4Y 0AY / GB | Application number, filing date | 06255719.4 | 06.11.2006 | [2007/19] | Priority number, date | US20050734599P | 08.11.2005 Original published format: US 734599 P | [2007/19] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1783548 | Date: | 09.05.2007 | Language: | EN | [2007/19] | Type: | A3 Search report | No.: | EP1783548 | Date: | 15.06.2011 | [2011/24] | Type: | B1 Patent specification | No.: | EP1783548 | Date: | 08.03.2017 | Language: | EN | [2017/10] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 16.05.2011 | Classification | IPC: | G03F7/16, G03F7/033, H01L23/00 | [2016/32] | CPC: |
G03F7/033 (EP,KR,US);
G03F7/027 (KR);
G03F7/028 (KR);
H01L24/11 (EP,US);
G03F7/161 (EP,US);
G03F7/162 (EP,US);
H01L2224/0345 (EP,US);
H01L2224/03464 (EP,US);
H01L2224/0401 (EP,US);
H01L2224/05647 (EP,US);
H01L2224/05655 (EP,US);
H01L2224/11462 (EP,US);
H01L2224/11464 (EP,US);
H01L2224/1147 (EP,US);
H01L2224/11849 (EP,US);
H01L2224/131 (EP,US);
H01L2224/13111 (EP,US);
H01L2224/13139 (EP,US);
H01L2224/13144 (EP,US);
H01L2224/13147 (EP,US);
H01L2224/13155 (EP,US);
H01L2224/13164 (EP,US);
H01L2924/00013 (EP,US);
H01L2924/01005 (EP,US);
H01L2924/01006 (EP,US);
H01L2924/01011 (EP,US);
H01L2924/01012 (EP,US);
H01L2924/01013 (EP,US);
H01L2924/01015 (EP,US);
H01L2924/01016 (EP,US);
H01L2924/01019 (EP,US);
H01L2924/01029 (EP,US);
H01L2924/0103 (EP,US);
H01L2924/01033 (EP,US);
H01L2924/01038 (EP,US);
H01L2924/01046 (EP,US);
H01L2924/01047 (EP,US);
H01L2924/01049 (EP,US);
H01L2924/01051 (EP,US);
H01L2924/0106 (EP,US);
H01L2924/01067 (EP,US);
H01L2924/01074 (EP,US);
H01L2924/01078 (EP,US);
H01L2924/01079 (EP,US);
H01L2924/01082 (EP,US);
H01L2924/014 (EP,US)
(-)
| C-Set: |
H01L2224/0345, H01L2924/00014 (US,EP);
H01L2224/03464, H01L2924/00014 (US,EP);
H01L2224/05647, H01L2924/00014 (US,EP);
H01L2224/05655, H01L2924/00014 (US,EP);
H01L2224/11464, H01L2924/00014 (US,EP);
H01L2224/13111, H01L2924/01029 (US,EP);
H01L2224/13111, H01L2924/01047 (EP,US);
H01L2224/13111, H01L2924/01049 (US,EP);
H01L2224/13111, H01L2924/01051 (EP,US);
H01L2224/13111, H01L2924/01082 (US,EP);
H01L2224/13111, H01L2924/01083 (US,EP);
H01L2224/13139, H01L2924/00014 (EP,US);
H01L2224/13144, H01L2924/00014 (US,EP);
H01L2224/13147, H01L2924/00014 (US,EP);
H01L2224/13155, H01L2924/00014 (US,EP);
H01L2224/13164, H01L2924/00014 (EP,US);
H01L2224/131, H01L2924/014 (US,EP);
H01L2924/00013, H01L2224/05099 (US,EP);
H01L2924/00013, H01L2224/05599 (EP,US);
H01L2924/00013, H01L2224/13099 (EP,US);
H01L2924/00013, H01L2224/13599 (EP,US);
H01L2924/00013, H01L2224/29099 (US,EP); |
| Former IPC [2011/24] | G03F7/033, H01L23/00 | ||
| Former IPC [2007/19] | G03F7/033 | Designated contracting states | DE, FR, GB [2012/08] |
| Former [2007/19] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | Verfahren zur Bildung einer gemusterten Schicht auf einem Substrat | [2016/32] | English: | Method of forming a patterned layer on a substrate | [2016/32] | French: | Procédé de formation d'une couche à motifs sur un substrat | [2016/32] |
| Former [2007/19] | Lichtempfindiliche Zusammensetzung | ||
| Former [2007/19] | Photosensitive composition | ||
| Former [2007/19] | Composition photosensible | Examination procedure | 17.11.2006 | Examination requested [2007/19] | 27.05.2011 | Despatch of a communication from the examining division (Time limit: M06) | 05.12.2011 | Reply to a communication from the examining division | 16.12.2011 | Loss of particular rights, legal effect: designated state(s) | 23.01.2012 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR | 08.12.2015 | Despatch of a communication from the examining division (Time limit: M06) | 18.04.2016 | Reply to a communication from the examining division | 28.07.2016 | Communication of intention to grant the patent | 29.11.2016 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 29.11.2016 | Fee for grant paid | 29.11.2016 | Fee for publishing/printing paid | 17.01.2017 | Communication of intention to grant the patent | 23.01.2017 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 27.05.2011 | Opposition(s) | 11.12.2017 | No opposition filed within time limit [2018/07] | Fees paid | Renewal fee | 25.11.2008 | Renewal fee patent year 03 | 25.11.2009 | Renewal fee patent year 04 | 12.11.2010 | Renewal fee patent year 05 | 14.11.2011 | Renewal fee patent year 06 | 13.11.2012 | Renewal fee patent year 07 | 18.11.2013 | Renewal fee patent year 08 | 10.11.2014 | Renewal fee patent year 09 | 10.11.2015 | Renewal fee patent year 10 | 10.11.2016 | Renewal fee patent year 11 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | GB | 06.11.2017 | FR | 30.11.2017 | [2018/50] |
| Former [2018/49] | FR | 30.11.2017 | Documents cited: | Search | [X]US5085669 (FROMMELD HANS-DIETER [DE], et al) [X] 1,2,4-6,10 * column 9, line 5 - line 46; examples 3,G * * column 7 - column 8; compound VI * * column 6, line 12 - line 59 *; | [XY]JP2003215790 (HITACHI LTD) [X] 1-4,6,10 * paragraph [0080] - paragraph [0082]; example 3 * * paragraph [0007] * * paragraph [0014] * [Y] 7-9; | [YD]US2004063025 (NATORI MICHIKO [JP], et al) [YD] 7-9 * paragraph [0123] - paragraph [0133] * * figures 2-4 ** claim 33 *; | [X]WO2004049071 (KODAK POLYCHROME GRAPHICS GMBH [DE], et al) [X] 1,2,4,6,10 * page 22 - page 26; tables 1,2 * |