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EP1876495
European procedure
Extract from the Register of European Patents
EP About this file: EP1876495
| EP1876495 - COMPOSITION COMPRISING POLYMER HAVING ETHYLENE-DICARBONYL STRUCTURE FOR USE IN FORMING ANTI-REFLECTIVE COATING FOR LITHOGRAPHY [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 25.05.2012 Database last updated on 12.07.2024 | Most recent event Tooltip | 25.05.2012 | No opposition filed within time limit | published on 27.06.2012 [2012/26] | Applicant(s) | For all designated states Nissan Chemical Industries, Ltd. 7-1, Kanda Nishiki-cho 3-chome Chiyoda-ku Tokyo 101-0054 / JP | [2008/02] | Inventor(s) | 01 /
SAKAMOTO, Rikimaru, Nissan Chem. Ind., Ltd. Elec. Mat. Res. Lab., 635, Sasakura, Fuchi-machi Toyama-shi, Toyama 9392753 / JP | [2008/02] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE | [N/P] |
| Former [2008/02] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 06731784.2 | 13.04.2006 | [2008/02] | WO2006JP307848 | Priority number, date | JP20050120697 | 19.04.2005 Original published format: JP 2005120697 | [2008/02] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2006115074 | Date: | 02.11.2006 | Language: | JA | [2006/44] | Type: | A1 Application with search report | No.: | EP1876495 | Date: | 09.01.2008 | Language: | EN | [2008/02] | Type: | B1 Patent specification | No.: | EP1876495 | Date: | 20.07.2011 | Language: | EN | [2011/29] | Search report(s) | International search report - published on: | JP | 02.11.2006 | (Supplementary) European search report - dispatched on: | EP | 22.06.2010 | Classification | IPC: | G03F7/11, C08G59/42, H01L21/027 | [2008/02] | CPC: |
G03F7/091 (EP,KR,US);
C08G59/4207 (EP,KR,US);
G03F7/004 (KR);
G03F7/0045 (KR);
G03F7/0047 (KR);
G03F7/11 (KR);
| Designated contracting states | DE, FR, GB, IT, NL [2008/30] |
| Former [2008/02] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | VERBINDUNG MIT EINEM POLYMER MIT ETHYLENDICARBONYLSTRUKTUR ZUR VERWENDUNG BEI DER BILDUNG EINER ANTIREFLEXBESCHICHTUNG FÜR DIE LITHOGRAPHIE | [2008/02] | English: | COMPOSITION COMPRISING POLYMER HAVING ETHYLENE-DICARBONYL STRUCTURE FOR USE IN FORMING ANTI-REFLECTIVE COATING FOR LITHOGRAPHY | [2008/02] | French: | COMPOSITION COMPRENANT UN POLYMERE AYANT UNE STRUCTURE ETHYLENE-DICARBONYLE A UTILISER DANS LA FORMATION DE REVETEMENT ANTI-REFLECTIF POUR LITHOGRAPHIE | [2008/02] | Entry into regional phase | 07.11.2007 | Translation filed | 07.11.2007 | National basic fee paid | 07.11.2007 | Search fee paid | 07.11.2007 | Designation fee(s) paid | 07.11.2007 | Examination fee paid | Examination procedure | 07.11.2007 | Examination requested [2008/02] | 07.12.2010 | Communication of intention to grant the patent | 09.03.2011 | Fee for grant paid | 09.03.2011 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 07.12.2010 | Opposition(s) | 23.04.2012 | No opposition filed within time limit [2012/26] | Fees paid | Renewal fee | 25.03.2008 | Renewal fee patent year 03 | 24.04.2009 | Renewal fee patent year 04 | 23.03.2010 | Renewal fee patent year 05 | 28.04.2011 | Renewal fee patent year 06 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US2005008964 (TAKEI SATOSHI [JP], et al) [A] 1-12 * claims 1-3 * |