EP1875498 - MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 18.05.2012 Database last updated on 03.08.2024 | Most recent event Tooltip | 18.07.2014 | Lapse of the patent in a contracting state New state(s): HU | published on 20.08.2014 [2014/34] | Applicant(s) | For all designated states Panasonic Corporation 1006, Oaza Kadoma Kadoma-shi Osaka 571-8501 / JP | [N/P] |
Former [2008/47] | For all designated states Panasonic Corporation 1006, Oaza Kadoma Kadoma-shi Osaka 571-8501 / JP | ||
Former [2008/02] | For all designated states MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 1006, Oaza Kadoma, Kadoma-shi Osaka 571-8501 / JP | Inventor(s) | 01 /
ARITA, Kiyoshi c/o Matsushita Electric Industrial Co., Ltd. 7F Twin 21 OBP Panasonic Tower, 2-1-61 Shiromi Chuo-ku, Osaka 540-6207 / JP | 02 /
NAKAGAWA, Akira c/o Matsushita Electric Industrial Co., Ltd. 7F Twin 21 OBP Panasonic Tower, 2-1-61 Shiromi Chuo-ku, Osaka 540-6207 / JP | [2008/02] | Representative(s) | Eisenführ Speiser Patentanwälte Rechtsanwälte PartGmbB Postfach 10 60 78 28060 Bremen / DE | [N/P] |
Former [2008/02] | Eisenführ, Speiser & Partner Patentanwälte Rechtsanwälte Postfach 10 60 78 28060 Bremen / DE | Application number, filing date | 06731933.5 | 11.04.2006 | [2008/02] | WO2006JP307997 | Priority number, date | JP20050117239 | 14.04.2005 Original published format: JP 2005117239 | [2008/02] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2006112424 | Date: | 26.10.2006 | Language: | EN | [2006/43] | Type: | A1 Application with search report | No.: | EP1875498 | Date: | 09.01.2008 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.10.2006 takes the place of the publication of the European patent application. | [2008/02] | Type: | B1 Patent specification | No.: | EP1875498 | Date: | 13.07.2011 | Language: | EN | [2011/28] | Search report(s) | International search report - published on: | EP | 26.10.2006 | Classification | IPC: | H01L21/78, H01L21/68, H01L21/3065 | [2008/02] | CPC: |
H01L21/30 (KR);
H01L21/3065 (EP,KR,US);
H01L21/68 (KR);
H01L21/6835 (EP,US);
H01L21/78 (EP,KR,US);
H01L2221/6834 (EP,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2008/02] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | HERSTELLUNGSVERFAHREN FÜR HALBLEITERCHIPS | [2008/02] | English: | MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS | [2008/02] | French: | METHODE DE FABRICATION DE PUCES SEMI-CONDUCTRICES | [2008/02] | Entry into regional phase | 14.11.2007 | National basic fee paid | 14.11.2007 | Designation fee(s) paid | 14.11.2007 | Examination fee paid | Examination procedure | 14.11.2007 | Examination requested [2008/02] | 26.03.2008 | Despatch of a communication from the examining division (Time limit: M04) | 10.07.2008 | Reply to a communication from the examining division | 27.01.2011 | Communication of intention to grant the patent | 25.05.2011 | Fee for grant paid | 25.05.2011 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 26.03.2008 | Opposition(s) | 16.04.2012 | No opposition filed within time limit [2012/25] | Fees paid | Renewal fee | 26.03.2008 | Renewal fee patent year 03 | 04.05.2009 | Renewal fee patent year 04 | 03.03.2010 | Renewal fee patent year 05 | 02.05.2011 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 11.04.2006 | AT | 13.07.2011 | BE | 13.07.2011 | CY | 13.07.2011 | CZ | 13.07.2011 | DK | 13.07.2011 | EE | 13.07.2011 | FI | 13.07.2011 | IT | 13.07.2011 | LT | 13.07.2011 | LV | 13.07.2011 | NL | 13.07.2011 | PL | 13.07.2011 | RO | 13.07.2011 | SE | 13.07.2011 | SI | 13.07.2011 | SK | 13.07.2011 | TR | 13.07.2011 | BG | 13.10.2011 | GR | 14.10.2011 | ES | 24.10.2011 | IS | 13.11.2011 | PT | 14.11.2011 | GB | 11.04.2012 | IE | 11.04.2012 | LU | 11.04.2012 | [2014/34] |
Former [2014/27] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
DK | 13.07.2011 | ||
EE | 13.07.2011 | ||
FI | 13.07.2011 | ||
IT | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
RO | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
SK | 13.07.2011 | ||
TR | 13.07.2011 | ||
BG | 13.10.2011 | ||
GR | 14.10.2011 | ||
ES | 24.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
GB | 11.04.2012 | ||
IE | 11.04.2012 | ||
LU | 11.04.2012 | ||
Former [2014/21] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
DK | 13.07.2011 | ||
EE | 13.07.2011 | ||
FI | 13.07.2011 | ||
IT | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
RO | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
SK | 13.07.2011 | ||
TR | 13.07.2011 | ||
BG | 13.10.2011 | ||
GR | 14.10.2011 | ||
ES | 24.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
GB | 11.04.2012 | ||
IE | 11.04.2012 | ||
Former [2013/29] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
DK | 13.07.2011 | ||
EE | 13.07.2011 | ||
FI | 13.07.2011 | ||
IT | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
RO | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
SK | 13.07.2011 | ||
BG | 13.10.2011 | ||
GR | 14.10.2011 | ||
ES | 24.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
GB | 11.04.2012 | ||
IE | 11.04.2012 | ||
Former [2013/22] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
DK | 13.07.2011 | ||
EE | 13.07.2011 | ||
FI | 13.07.2011 | ||
IT | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
RO | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
SK | 13.07.2011 | ||
GR | 14.10.2011 | ||
ES | 24.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
GB | 11.04.2012 | ||
IE | 11.04.2012 | ||
Former [2013/10] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
DK | 13.07.2011 | ||
EE | 13.07.2011 | ||
FI | 13.07.2011 | ||
IT | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
RO | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
SK | 13.07.2011 | ||
GR | 14.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
GB | 11.04.2012 | ||
IE | 11.04.2012 | ||
Former [2013/08] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
DK | 13.07.2011 | ||
EE | 13.07.2011 | ||
FI | 13.07.2011 | ||
IT | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
RO | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
SK | 13.07.2011 | ||
GR | 14.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
IE | 11.04.2012 | ||
Former [2012/31] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
DK | 13.07.2011 | ||
EE | 13.07.2011 | ||
FI | 13.07.2011 | ||
IT | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
RO | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
SK | 13.07.2011 | ||
GR | 14.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
Former [2012/23] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
EE | 13.07.2011 | ||
FI | 13.07.2011 | ||
IT | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
RO | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
SK | 13.07.2011 | ||
GR | 14.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
Former [2012/21] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
CZ | 13.07.2011 | ||
FI | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
GR | 14.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
Former [2012/12] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
CY | 13.07.2011 | ||
FI | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
GR | 14.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
Former [2012/11] | AT | 13.07.2011 | |
BE | 13.07.2011 | ||
FI | 13.07.2011 | ||
LT | 13.07.2011 | ||
LV | 13.07.2011 | ||
NL | 13.07.2011 | ||
PL | 13.07.2011 | ||
SE | 13.07.2011 | ||
SI | 13.07.2011 | ||
GR | 14.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
Former [2012/10] | BE | 13.07.2011 | |
FI | 13.07.2011 | ||
LT | 13.07.2011 | ||
NL | 13.07.2011 | ||
SE | 13.07.2011 | ||
GR | 14.10.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
Former [2012/09] | BE | 13.07.2011 | |
FI | 13.07.2011 | ||
LT | 13.07.2011 | ||
NL | 13.07.2011 | ||
IS | 13.11.2011 | ||
PT | 14.11.2011 | ||
Former [2012/08] | LT | 13.07.2011 | |
NL | 13.07.2011 | ||
IS | 13.11.2011 |