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EP1876636
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EP About this file: EP1876636
| EP1876636 - EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 10.04.2009 Database last updated on 08.10.2024 | Most recent event Tooltip | 31.07.2009 | Change - representative | published on 02.09.2009 [2009/36] | Applicant(s) | For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | [N/P] |
| Former [2008/02] | For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
KIDA, Yoshiki, c/o NIKON CORPORATION Intellectual Property Dept. 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP | [2008/02] | Representative(s) | Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte Grillparzerstrasse 14 81675 München / DE | [N/P] |
| Former [2009/36] | Viering, Jentschura & Partner Postfach 22 14 43 80504 München / DE | ||
| Former [2008/28] | Viering, Jentschura & Partner Grillparzerstrasse 14 81675 München / DE | ||
| Former [2008/02] | Viering, Jentschura & Partner Grillparzerstrasse 14 81675 München / DE | Application number, filing date | 06745753.1 | 27.04.2006 | [2008/02] | WO2006JP308825 | Priority number, date | JP20050131862 | 28.04.2005 Original published format: JP 2005131862 | [2008/02] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2006118189 | Date: | 09.11.2006 | Language: | EN | [2006/45] | Type: | A1 Application with search report | No.: | EP1876636 | Date: | 09.01.2008 | Language: | EN | The application published by WIPO in one of the EPO official languages on 09.11.2006 takes the place of the publication of the European patent application. | [2008/02] | Search report(s) | International search report - published on: | JP | 09.11.2006 | Classification | IPC: | H01L21/027, G03F7/20 | [2008/02] | CPC: |
G03F7/70341 (EP,KR,US);
G03F7/2041 (KR);
G03F7/70525 (KR);
G03F7/70533 (EP,KR,US);
G03F7/706849 (KR);
G03F7/70716 (KR);
G03F7/70808 (KR)
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| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2008/02] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | BELICHTUNGSVERFAHREN, BELICHTUNGSVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON BAUELEMENTEN | [2008/02] | English: | EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE PRODUCING METHOD | [2008/02] | French: | PROCÉDÉ D EXPOSITION, APPAREIL D EXPOSITION, ET PROCÉDÉ DE PRODUCTION DU DISPOSITIF | [2008/02] | Entry into regional phase | 26.10.2007 | Translation filed | 26.10.2007 | National basic fee paid | 26.10.2007 | Search fee paid | 26.10.2007 | Designation fee(s) paid | 26.10.2007 | Examination fee paid | Examination procedure | 26.10.2007 | Examination requested [2008/02] | 07.04.2009 | Application withdrawn by applicant [2009/20] | Fees paid | Renewal fee | 26.10.2007 | Renewal fee patent year 03 |
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