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Extract from the Register of European Patents

EP About this file: EP1931975

EP1931975 - MEASURING METHOD AND SOFTWARE PRODUCT [Right-click to bookmark this link]
Former [2008/25]MEASURING METHOD, ARRANGEMENT AND SOFTWARE PRODUCT
[2017/29]
StatusNo opposition filed within time limit
Status updated on  18.01.2019
Database last updated on 30.10.2024
FormerThe patent has been granted
Status updated on  09.02.2018
FormerGrant of patent is intended
Status updated on  26.06.2017
FormerExamination is in progress
Status updated on  27.01.2017
Most recent event   Tooltip10.07.2020Lapse of the patent in a contracting state
New state(s): IS		published on 12.08.2020  [2020/33]
Applicant(s)For all designated states
Aalto University Foundation sr
P.O. Box 11000
02150 ESPOO / FI
[2018/11]
Former [2008/25]For all designated states
Teknillinen Korkeakoulu
P.O. Box 1000
02015 Tkk / FI
Inventor(s)01 / SAVIN, Hele
Kalasääksentie 4D 22
FI-02620 Espoo / FI
02 / HAARAHILTUNEN, Antti
Sahamäenpolku 25
FI-01860 Perttula / FI
03 / YLI-KOSKI, Marko, Veli
Kirstinsyrjä 7 D 84
FI-02760 Espoo / FI
 [2008/25]
Representative(s)Berggren Oy, Helsinki & Oulu
P.O. Box 16
Eteläinen Rautatiekatu 10A
00101 Helsinki / FI
[2018/11]
Former [2013/24]Berggren Oy Ab
P.O. Box 16
Antinkatu 3 C
00101 Helsinki / FI
Former [2008/25]Konkonen, Tomi-Matti Juhani
Berggren Oy Ab P.O. Box 16
00101 Helsinki / FI
Application number, filing date06794103.906.10.2006
[2008/25]
WO2006FI00327
Priority number, dateFI2005000100907.10.2005         Original published format: FI 20051009
[2008/25]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2007042606
Date:19.04.2007
Language:EN
[2007/16]
Type: A1 Application with search report 
No.:EP1931975
Date:18.06.2008
Language:EN
The application published by WIPO in one of the EPO official languages on 19.04.2007 takes the place of the publication of the European patent application.
[2008/25]
Type: B1 Patent specification 
No.:EP1931975
Date:14.03.2018
Language:EN
[2018/11]
Search report(s)International search report - published on:FI19.04.2007
(Supplementary) European search report - dispatched on:EP23.06.2014
ClassificationIPC:G01N21/95, G01N27/20, G01N21/17, G01N33/00, H01L21/66
[2014/30]
CPC:
H01L22/12 (EP,FI,US); G01N21/17 (FI); G01N33/0095 (EP,US);
G01N2021/1719 (EP,US)
Former IPC [2008/25]G01N21/95, G01N27/20
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2018/11]
Former [2008/25]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
MKNot yet paid
RSNot yet paid
TitleGerman:MESSVERFAHREN UND SOFTWARE-PRODUKT[2017/29]
English:MEASURING METHOD AND SOFTWARE PRODUCT[2017/29]
French:PROCEDE DE MESURE ET PRODUIT LOGICIEL[2017/29]
Former [2008/25]MESSVERFAHREN, -ANORDNUNG UND SOFTWARE-PRODUKT
Former [2008/25]MEASURING METHOD, ARRANGEMENT AND SOFTWARE PRODUCT
Former [2008/25]PROCEDE DE MESURE, AGENCEMENT ET PRODUIT LOGICIEL
Entry into regional phase31.03.2008National basic fee paid 
31.03.2008Search fee paid 
31.03.2008Designation fee(s) paid 
31.03.2008Examination fee paid 
Examination procedure31.03.2008Examination requested  [2008/25]
09.01.2015Amendment by applicant (claims and/or description)
02.06.2015Despatch of a communication from the examining division (Time limit: M04)
30.09.2015Reply to a communication from the examining division
21.12.2015Despatch of a communication from the examining division (Time limit: M04)
30.05.2016Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time
08.07.2016Reply to a communication from the examining division
29.09.2016Despatch of a communication from the examining division (Time limit: M06)
22.03.2017Reply to a communication from the examining division
27.06.2017Communication of intention to grant the patent
26.10.2017Fee for grant paid
26.10.2017Fee for publishing/printing paid
26.10.2017Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  02.06.2015
Opposition(s)17.12.2018No opposition filed within time limit [2019/08]
Request for further processing for:The application is deemed to be withdrawn due to failure to reply to the examination report
08.07.2016Request for further processing filed
08.07.2016Full payment received (date of receipt of payment)
Request granted
21.07.2016Decision despatched
Fees paidRenewal fee
20.10.2008Renewal fee patent year 03
22.10.2009Renewal fee patent year 04
19.10.2010Renewal fee patent year 05
20.12.2011Renewal fee patent year 06
15.10.2012Renewal fee patent year 07
15.10.2013Renewal fee patent year 08
20.10.2014Renewal fee patent year 09
12.10.2015Renewal fee patent year 10
25.10.2016Renewal fee patent year 11
23.10.2017Renewal fee patent year 12
Penalty fee
Additional fee for renewal fee
31.10.201106   M06   Fee paid on   20.12.2011
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU06.10.2006
AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
TR14.03.2018
BG14.06.2018
GR15.06.2018
IS14.07.2018
PT16.07.2018
GB06.10.2018
IE06.10.2018
LU06.10.2018
BE31.10.2018
CH31.10.2018
FR31.10.2018
LI31.10.2018
[2020/33]
Former [2020/30]HU06.10.2006
AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
TR14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
GB06.10.2018
IE06.10.2018
LU06.10.2018
BE31.10.2018
CH31.10.2018
FR31.10.2018
LI31.10.2018
Former [2020/16]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
TR14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
GB06.10.2018
IE06.10.2018
LU06.10.2018
BE31.10.2018
CH31.10.2018
FR31.10.2018
LI31.10.2018
Former [2019/49]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
GB06.10.2018
IE06.10.2018
LU06.10.2018
BE31.10.2018
CH31.10.2018
FR31.10.2018
LI31.10.2018
Former [2019/48]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
GB06.10.2018
IE06.10.2018
LU06.10.2018
BE31.10.2018
CH31.10.2018
LI31.10.2018
Former [2019/47]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
GB06.10.2018
LU06.10.2018
BE31.10.2018
CH31.10.2018
LI31.10.2018
Former [2019/39]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
LU06.10.2018
BE31.10.2018
CH31.10.2018
LI31.10.2018
Former [2019/38]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
LU06.10.2018
BE31.10.2018
Former [2019/30]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
LU06.10.2018
Former [2019/28]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
MC14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
Former [2019/13]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SI14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
Former [2019/08]AT14.03.2018
CY14.03.2018
CZ14.03.2018
DK14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
Former [2019/03]AT14.03.2018
CY14.03.2018
CZ14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
PT16.07.2018
Former [2018/50]AT14.03.2018
CY14.03.2018
CZ14.03.2018
EE14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
NL14.03.2018
PL14.03.2018
RO14.03.2018
SE14.03.2018
SK14.03.2018
BG14.06.2018
GR15.06.2018
Former [2018/47]CY14.03.2018
ES14.03.2018
FI14.03.2018
IT14.03.2018
LT14.03.2018
LV14.03.2018
NL14.03.2018
SE14.03.2018
BG14.06.2018
GR15.06.2018
Former [2018/45]CY14.03.2018
ES14.03.2018
FI14.03.2018
LT14.03.2018
LV14.03.2018
NL14.03.2018
SE14.03.2018
BG14.06.2018
GR15.06.2018
Former [2018/40]CY14.03.2018
ES14.03.2018
FI14.03.2018
LT14.03.2018
LV14.03.2018
SE14.03.2018
BG14.06.2018
GR15.06.2018
Former [2018/37]CY14.03.2018
ES14.03.2018
FI14.03.2018
LT14.03.2018
GR15.06.2018
Former [2018/36]CY14.03.2018
ES14.03.2018
FI14.03.2018
LT14.03.2018
Former [2018/35]CY14.03.2018
FI14.03.2018
LT14.03.2018
Documents cited:Search[A]US6150175  (SHELTON GAIL D [US], et al) [A] 1-39* sentence 45, paragraph 1 - sentence 60, paragraph 3 *;
 [XI]  - VÄINÖLÄ H ET AL, "Quantitative copper measurement in oxidized p-type silicon wafers using microwave photoconductivity decay", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS, US, (20050715), vol. 87, no. 3, doi:10.1063/1.1999008, ISSN 0003-6951, pages 32109 - 032109, XP012077172 [X] 1,29 * page 1, column right - page 3, column left; figures 1-3 * [I] 2-28,30-39

DOI:   http://dx.doi.org/10.1063/1.1999008
 [XA]  - VAINOLA, "Sensitive copper detection in P-type CZ Silicon using uPCD", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, ELECTROCHEMICAL SOCIETY, MANCHESTER, NEW HAMPSHIRE; US, (20031023), vol. 150, no. 12, doi:10.1149/1.1624845, ISSN 0013-4651, pages G790 - G794, XP003012392 [X] 1 * page 1, column right - page 4, column left * [A] 2-39

DOI:   http://dx.doi.org/10.1149/1.1624845
International search[A]JPH05315428  ;
 [A]JP2005142359  ;
 [A]JPH01278037  (NEC CORP);
 [A]US6150175  (SHELTON GAIL D [US], et al);
 [A]US2003064533  (RAMAPPA DEEPAK A [US], et al);
 [X]  - VAINOLA, "Quantitative copper measurement in oxidized p-type silicon wafers using microwave photoconductivity decay", APPLIED PHYSICS LETTERS, vol. 87, page 032109-2, XP012077172

DOI:   http://dx.doi.org/10.1063/1.1999008
 [X]  - VAINOLA, "Sensitive copper detection in P-type CZ Silicon using uPCD", JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 150, no. 12, pages G790 - G794, XP003012392

DOI:   http://dx.doi.org/10.1149/1.1624845
 [A]  - PATENT ABSTRACTS OF JAPAN, & JP05315428 A 19931126 (NIPPON TELEGRAPH & TELEPHONE)
 [A]  - PATENT ABSTRACTS OF JAPAN, & JP2005142359 A 20050602 (TOSHIBA CERAMICS CO)
 [A]  - YLI-KOSKI, "Detection of low-level copper contamination in p-type silicon by means of microwave photoconductive decay measurements", JOURNAL OF PHYSICS: CONDENSED MATTER, vol. 14, pages 13119 - 13125, XP003012391

DOI:   http://dx.doi.org/10.1088/0953-8984/14/48/358
by applicant   - H. VAINOLA ET AL., QUANTITATIVE COPPER MEASUREMENT IN OXIDIZED P-TYPE SILICON WAFERS USING MICROWAVE PHOTOCONDUCTIVITY DECAY
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.