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EP1915470
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EP About this file: EP1915470
| EP1915470 - DEPOSITION APPARATUS FOR SEMICONDUCTOR PROCESSING [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 29.06.2012 Database last updated on 15.06.2024 | Most recent event Tooltip | 29.06.2012 | Application deemed to be withdrawn | published on 01.08.2012 [2012/31] | Applicant(s) | For all designated states Aviza Technology, Inc. 440 Kings Village Road Scotts Valley, CA 95066-4081 / US | [2008/18] | Inventor(s) | 01 /
BERCAW, Craig 605 N. Spring Creek Road Boulder Creek, California 95006 / US | 02 /
COSSENTINE, Dan 117 Dellview Avenue Santa Cruz, California 95062 / US | 03 /
BAILEY, Robert Jeffrey 1325 Whispering Pines Drive Scotts Valley, California 95066 / US | 04 /
YAO, Jack Chihchieh 29 Dunslee Way Scotts Valley, 95066 / US | 05 /
LO, Tommy 104 B San Augustine Way Scotts Valley, California 95066 / US | [2008/33] |
| Former [2008/30] | 01 /
BERCAW, Craig 605 N. Spring Creek Road Boulder Creek, California 95006 / US | ||
| 02 /
COSSENTINE, Dan 117 Dellview Avenue Santa Cruz, California 95062 / US | |||
| 03 /
BAILEY, Robert Jeffrey 1325 Whispering Pines Drive Scotts Valley, California 95066 / US | |||
| 04 /
YAO, Jack Chihchieh 29 Dunsiee Way Scotts Valley, 95066 / US | |||
| 05 /
LO, Tommy 104 B San Augustine Way Scotts Valley, California 95066 / US | |||
| Former [2008/18] | 01 /
BERCAW, Craig 605 N. Spring Creek Road Boulder Creek, California 95006 / US | ||
| 02 /
COSSENTINE, Dan 117 Dellview Avenue Santa Cruz, California 95062 / US | |||
| 03 /
BAILEY, Robert Jeffrey 1325 Whispering Pines Drive Scotts Valley, California 95066 / US | |||
| 04 /
YAO, Jack Chihchieh 21 Silver Birch Lane Scotts Valley, 95066 / US | |||
| 05 /
LO, Tommy 104 B San Augustine Way Scotts Valley, California 95066 / US | Representative(s) | Dunlop, Brian Kenneth Charles, et al Wynne-Jones, Lainé & James LLP Essex Place 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ / GB | [N/P] |
| Former [2008/18] | Dunlop, Brian Kenneth Charles, et al Wynne-Jones, Lainé & James LLP Essex Place 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ / GB | Application number, filing date | 06800800.2 | 31.07.2006 | [2008/18] | WO2006US30547 | Priority number, date | US20050703723P | 29.07.2005 Original published format: US 703723 P | US20050703717P | 29.07.2005 Original published format: US 703717 P | US20050703711P | 29.07.2005 Original published format: US 703711 P | [2008/18] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2007016701 | Date: | 08.02.2007 | Language: | EN | [2007/06] | Type: | A2 Application without search report | No.: | EP1915470 | Date: | 30.04.2008 | Language: | EN | The application published by WIPO in one of the EPO official languages on 08.02.2007 takes the place of the publication of the European patent application. | [2008/18] | Search report(s) | International search report - published on: | US | 21.12.2007 | (Supplementary) European search report - dispatched on: | EP | 02.03.2012 | Classification | IPC: | C23C16/00, C23C16/44, C23C16/455 | [2012/14] | CPC: |
C23C16/4401 (EP,US);
C23C16/4409 (EP,KR,US);
C23C16/4412 (EP,KR,US);
C23C16/455 (EP,US);
C23C16/45525 (EP,US);
C23C16/45536 (EP,KR,US);
C23C16/45544 (EP,KR,US);
C23C16/45561 (EP,KR,US);
C23C16/4583 (KR);
|
| Former IPC [2008/18] | C23C16/00 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2008/18] | Title | German: | AUFTRAGUNGSVORRICHTUNG FÜR HALBLEITERVERARBEITUNG | [2008/18] | English: | DEPOSITION APPARATUS FOR SEMICONDUCTOR PROCESSING | [2008/18] | French: | APPAREIL DE DEPOT DESTINE AU TRAITEMENT DE SEMICONDUCTEURS | [2008/18] | Entry into regional phase | 28.02.2008 | National basic fee paid | 28.02.2008 | Search fee paid | 28.02.2008 | Designation fee(s) paid | 28.02.2008 | Examination fee paid | Examination procedure | 28.02.2008 | Examination requested [2008/18] | 01.02.2012 | Application deemed to be withdrawn, date of legal effect [2012/31] | 13.03.2012 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2012/31] | Fees paid | Renewal fee | 24.12.2008 | Renewal fee patent year 03 | 29.01.2010 | Renewal fee patent year 04 | 26.07.2010 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 31.07.2008 | 03 M06 Fee paid on 24.12.2008 | 31.07.2009 | 04 M06 Fee paid on 29.01.2010 | 31.07.2011 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]US5993916 (ZHAO JUN [US], et al) [Y] 5,6 * column 6, line 42 - column 7, line 9; figure 1 *; | [XY]US2001042514 (MIZUNO SHIGERU [JP], et al) [X] 1-4,8-12 * paragraphs [0052] - [0077] - [0 87] - [0089]; figures 1, 3 * [Y] 5-7; | [Y]US2004069225 (FAIRBAIRN KEVIN [US], et al) [Y] 7* paragraphs [0091] - [0095]; figure 19 * | International search | [Y]US5851299 (CHENG DAVID [US], et al); | [Y]US2003049372 (COOK ROBERT C [US], et al); | [Y]US2003194493 (CHANG MEI [US], et al) |