blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Extract from the Register of European Patents

EP About this file: EP1863077

EP1863077 - Substrate inspecting method and methods of manufacturing an element and a substrate [Right-click to bookmark this link]
Former [2007/49]Substrate, substrate inspecting method and methods of manufacturing an element and a substrate
[2013/15]
StatusNo opposition filed within time limit
Status updated on  20.06.2014
Database last updated on 14.09.2024
Most recent event   Tooltip08.05.2015Lapse of the patent in a contracting statepublished on 10.06.2015  [2015/24]
Applicant(s)For all designated states
Sumitomo Electric Industries, Ltd.
5-33 Kitahama 4-chome, Chuo-ku
Osaka-shi, Osaka 541-0041 / JP
[2007/49]
Inventor(s)01 / Nakamura, Takao
Itami Works of Sumitomo Electric Ind., Ltd.
1-1, Koyakita 1-chome
Itami-shi Hyogo 664-0016 / JP
02 / Ueda, Toshio
Itami Works of Sumitomo Electric Ind., Ltd.
1-1, Koyakita 1-chome
Itami-shi Hyogo 664-0016 / JP
03 / Kyono, Takashi
Itami Works of Sumitomo Electric Ind., Ltd.
1-1, Koyakita 1-chome
Itami-shi Hyogo 664-0016 / JP
 [2013/33]
Former [2007/49]01 / Nakamura, Takao
Itami Works of Sumitomo Electric Ind., Ltd. 1-1, Koyakita 1-chome
Itami-shi Hyogo 664-0016 / JP
02 / Ueda, Toshio
Itami Works of Sumitomo Electric Ind., Ltd. 1-1, Koyakita 1-chome
Itami-shi Hyogo 664-0016 / JP
03 / Kyono, Takashi
Itami Works of Sumitomo Electric Ind., Ltd. 1-1, Koyakita 1-chome
Itami-shi Hyogo 664-0016 / JP
Representative(s)Grünecker Patent- und Rechtsanwälte PartG mbB
Leopoldstrasse 4
80802 München / DE
[N/P]
Former [2013/33]Grünecker, Kinkeldey, Stockmair & Schwanhäusser
Leopoldstrasse 4
80802 München / DE
Former [2007/49]Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
Maximilianstrasse 58
80538 München / DE
Application number, filing date07008890.102.05.2007
[2007/49]
Priority number, dateJP2006015355501.06.2006         Original published format: JP 2006153555
JP2007001417224.01.2007         Original published format: JP 2007014172
[2007/49]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP1863077
Date:05.12.2007
Language:EN
[2007/49]
Type: A3 Search report 
No.:EP1863077
Date:06.05.2009
[2009/19]
Type: B1 Patent specification 
No.:EP1863077
Date:14.08.2013
Language:EN
[2013/33]
Search report(s)(Supplementary) European search report - dispatched on:EP08.04.2009
ClassificationIPC:H01L21/66
[2007/49]
CPC:
H01L22/10 (EP,US); H01L22/00 (KR); H01L22/20 (EP,US)
Designated contracting statesDE,   FR,   GB [2010/02]
Former [2007/49]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MT,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Substratprüfungsverfahren und Verfahren zur Herstellung eines Elements und eines Substrats[2013/15]
English:Substrate inspecting method and methods of manufacturing an element and a substrate[2013/15]
French:Procédé d'inspection de substrats et procédés de fabrication d'un élément et d'un substrat[2013/15]
Former [2007/49]Substrat, Substratprüfungsverfahren und Verfahren zur Herstellung eines Elements und eines Substrats
Former [2007/49]Substrate, substrate inspecting method and methods of manufacturing an element and a substrate
Former [2007/49]Substrat, procédé d'inspection de substrats et procédés de fabrication d'un élément et d'un substrat
Examination procedure05.11.2009Amendment by applicant (claims and/or description)
05.11.2009Examination requested  [2009/51]
07.11.2009Loss of particular rights, legal effect: designated state(s)
15.12.2009Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR
06.04.2010Despatch of a communication from the examining division (Time limit: M04)
16.08.2010Reply to a communication from the examining division
21.05.2012Despatch of a communication from the examining division (Time limit: M04)
26.09.2012Reply to a communication from the examining division
22.03.2013Communication of intention to grant the patent
03.07.2013Fee for grant paid
03.07.2013Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  06.04.2010
Opposition(s)15.05.2014No opposition filed within time limit [2014/30]
Fees paidRenewal fee
29.05.2009Renewal fee patent year 03
30.03.2010Renewal fee patent year 04
27.05.2011Renewal fee patent year 05
29.03.2012Renewal fee patent year 06
28.05.2013Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court
See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipGB02.05.2014
[2015/24]
Documents cited:Search[X]EP0295065  (HITACHI LTD [JP]) [X] 1-4,9-12 * page 19, line 33 - page 21, line 60; figure 6 *;
 [X]JP2000021824  (OKI ELECTRIC IND CO LTD) [X] 1-4,9-12 * paragraph [0007] - paragraph [0025]; figures 1-3,6 *;
 [X]US6329667  (OTA HIROYUKI [JP], et al) [X] 9-12* column 5, line 15 - column 8, line 24; figures 2,4 *;
 [X]US2005003572  (HAHN BERTHOLD [DE], et al) [X] 9-12 * paragraph [0040] - paragraph [0055]; figure 1 *;
 [X]US2005039673  (ISHIDA MASAHIRO [JP]) [X] 9-12 * paragraph [0101] - paragraph [0120]; figure 9G *;
 [X]US6972201  (SUBRAMANIAN RAMKUMAR [US], et al) [X] 1-12 * column 3, line 26 - column 9, line 10; figures 1-4 *
ExaminationUS6031229
 US2005012512
by applicantJP2000021824
 US2005012512
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.