EP2038919 - METHOD OF MANUFACTURING A SEMICONDUCTOR NANOWIRE DEVICE [Right-click to bookmark this link] | |||
Former [2009/13] | METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE OBTAINED BY SUCH A METHOD | ||
[2014/37] | Status | No opposition filed within time limit Status updated on 15.01.2016 Database last updated on 31.08.2024 | Most recent event Tooltip | 13.10.2017 | Lapse of the patent in a contracting state New state(s): BG, CY, HU, TR | published on 15.11.2017 [2017/46] | Applicant(s) | For all designated states NXP B.V. High Tech Campus 60 5656 AG Eindhoven / NL | [2009/50] |
Former [2009/13] | For all designated states NXP B.V. High Tech Campus 60 5656 AG Eindhoven / NL | Inventor(s) | 01 /
HURX, Fred NXP Semiconductors Austria GmbH Intellectual Property Department 1102 Vienna / AT | 02 /
DONKERS, Johannes Josephus Theodorus Marinus NXP Semiconductors Austria GmbH Intellectual Property Department 1102 Vienna / AT | [2015/11] |
Former [2009/13] | 01 /
HURX, Fred NXP Semiconductors Austria GmbH Intellectual Property Department 1102 Vienna / AT | ||
02 /
DONKERS, Johannes Josephus Theodorus Marinus NXP Semiconductors Austria GmbH Intellectual Property Department 1102 Vienna / AT | Representative(s) | Schouten, Marcus Maria, et al NXP B.V. Intellectual Property & Licensing High Tech Campus 60 5656 AG Eindhoven / NL | [2015/11] |
Former [2009/42] | Schouten, Marcus Maria, et al NXP B.V. IP & L Department High Tech Campus 32 5656 AE Eindhoven / NL | ||
Former [2009/13] | Röggla, Harald NXP Semiconductors Intellectual Property Department Gutheil-Schoder-Gasse 8-12 1101 Vienna / AT | ||
Former [2009/13] | Röggla, Harald NXP Semiconductors IP Department Gutheil-Schoder-Gasse 8-12 1100 Wien / AT | Application number, filing date | 07766771.5 | 18.06.2007 | [2009/13] | WO2007IB52319 | Priority number, date | EP20060115650 | 19.06.2006 Original published format: EP 06115650 | [2009/13] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2007148277 | Date: | 27.12.2007 | Language: | EN | [2007/52] | Type: | A2 Application without search report | No.: | EP2038919 | Date: | 25.03.2009 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.12.2007 takes the place of the publication of the European patent application. | [2009/13] | Type: | B1 Patent specification | No.: | EP2038919 | Date: | 11.03.2015 | Language: | EN | [2015/11] | Search report(s) | International search report - published on: | EP | 28.02.2008 | Classification | IPC: | H01L29/775, H01L29/06, H01L29/66, B82Y40/00, B82Y10/00, H01L21/321, H01L21/335 | [2014/37] | CPC: |
H01L29/0665 (EP,US);
H01L21/18 (KR);
B82Y10/00 (EP,US);
B82Y40/00 (EP,KR,US);
H01L22/00 (KR);
H01L29/0673 (EP,US);
H01L29/0676 (EP,US);
H01L29/66439 (EP,US);
H01L29/772 (KR);
|
Former IPC [2009/13] | H01L21/335, H01L29/772, H01L29/06, H01L21/66 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2009/13] | Extension states | AL | 19.01.2009 | BA | 19.01.2009 | HR | 19.01.2009 | MK | 19.01.2009 | RS | 19.01.2009 | Title | German: | VERFAHREN ZUR HERSTELLUNG EINER NANODRAHT-HALBLEITERVORRICHTUNG | [2014/41] | English: | METHOD OF MANUFACTURING A SEMICONDUCTOR NANOWIRE DEVICE | [2014/41] | French: | PROCÉDÉ DE FABRICATION D'UN DISPOSITIF NANOFIL SEMI-CONDUCTEUR | [2014/41] |
Former [2009/13] | VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERVORRICHTUNG UND IN EINEM SOLCHEN VERFAHREN HERGESTELLTE HALBLEITERVORRICHTUNG | ||
Former [2009/13] | METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE OBTAINED BY SUCH A METHOD | ||
Former [2009/13] | PROCÉDÉ DE FABRICATION D'UN DISPOSITIF SEMI-CONDUCTEUR ET DISPOSITIF SEMI-CONDUCTEUR OBTENU PAR UN TEL PROCÉDÉ | Entry into regional phase | 19.01.2009 | National basic fee paid | 19.01.2009 | Designation fee(s) paid | 19.01.2009 | Examination fee paid | Examination procedure | 19.01.2009 | Examination requested [2009/13] | 15.07.2009 | Despatch of a communication from the examining division (Time limit: M06) | 13.01.2010 | Reply to a communication from the examining division | 24.10.2014 | Communication of intention to grant the patent | 28.01.2015 | Fee for grant paid | 28.01.2015 | Fee for publishing/printing paid | 28.01.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 15.07.2009 | Opposition(s) | 14.12.2015 | No opposition filed within time limit [2016/07] | Fees paid | Renewal fee | 30.06.2009 | Renewal fee patent year 03 | 30.06.2010 | Renewal fee patent year 04 | 30.06.2011 | Renewal fee patent year 05 | 02.07.2012 | Renewal fee patent year 06 | 01.07.2013 | Renewal fee patent year 07 | 30.06.2014 | Renewal fee patent year 08 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 18.06.2007 | AT | 11.03.2015 | BE | 11.03.2015 | BG | 11.03.2015 | CY | 11.03.2015 | CZ | 11.03.2015 | DK | 11.03.2015 | EE | 11.03.2015 | ES | 11.03.2015 | FI | 11.03.2015 | IT | 11.03.2015 | LT | 11.03.2015 | LV | 11.03.2015 | MC | 11.03.2015 | MT | 11.03.2015 | NL | 11.03.2015 | PL | 11.03.2015 | RO | 11.03.2015 | SE | 11.03.2015 | SI | 11.03.2015 | SK | 11.03.2015 | TR | 11.03.2015 | GR | 12.06.2015 | GB | 18.06.2015 | IE | 18.06.2015 | LU | 18.06.2015 | CH | 30.06.2015 | LI | 30.06.2015 | IS | 11.07.2015 | PT | 13.07.2015 | [2017/39] |
Former [2017/03] | AT | 11.03.2015 | |
BE | 11.03.2015 | ||
CZ | 11.03.2015 | ||
DK | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
MC | 11.03.2015 | ||
MT | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SI | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
GB | 18.06.2015 | ||
IE | 18.06.2015 | ||
LU | 18.06.2015 | ||
CH | 30.06.2015 | ||
LI | 30.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2016/37] | AT | 11.03.2015 | |
BE | 11.03.2015 | ||
CZ | 11.03.2015 | ||
DK | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
MC | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SI | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
GB | 18.06.2015 | ||
IE | 18.06.2015 | ||
LU | 18.06.2015 | ||
CH | 30.06.2015 | ||
LI | 30.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2016/23] | AT | 11.03.2015 | |
CZ | 11.03.2015 | ||
DK | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
MC | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SI | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
GB | 18.06.2015 | ||
IE | 18.06.2015 | ||
LU | 18.06.2015 | ||
CH | 30.06.2015 | ||
LI | 30.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2016/22] | AT | 11.03.2015 | |
CZ | 11.03.2015 | ||
DK | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
MC | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SI | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
IE | 18.06.2015 | ||
LU | 18.06.2015 | ||
CH | 30.06.2015 | ||
LI | 30.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2016/20] | AT | 11.03.2015 | |
CZ | 11.03.2015 | ||
DK | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
MC | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SI | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
IE | 18.06.2015 | ||
LU | 18.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2016/11] | AT | 11.03.2015 | |
CZ | 11.03.2015 | ||
DK | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
MC | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SI | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
LU | 18.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2016/09] | AT | 11.03.2015 | |
CZ | 11.03.2015 | ||
DK | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
MC | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2016/07] | AT | 11.03.2015 | |
CZ | 11.03.2015 | ||
DK | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2016/03] | AT | 11.03.2015 | |
CZ | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
IT | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2015/51] | AT | 11.03.2015 | |
CZ | 11.03.2015 | ||
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2015/50] | CZ | 11.03.2015 | |
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
NL | 11.03.2015 | ||
PL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
IS | 11.07.2015 | ||
PT | 13.07.2015 | ||
Former [2015/49] | CZ | 11.03.2015 | |
EE | 11.03.2015 | ||
ES | 11.03.2015 | ||
FI | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
NL | 11.03.2015 | ||
RO | 11.03.2015 | ||
SE | 11.03.2015 | ||
SK | 11.03.2015 | ||
GR | 12.06.2015 | ||
PT | 13.07.2015 | ||
Former [2015/41] | ES | 11.03.2015 | |
FI | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
NL | 11.03.2015 | ||
SE | 11.03.2015 | ||
GR | 12.06.2015 | ||
Former [2015/39] | ES | 11.03.2015 | |
FI | 11.03.2015 | ||
LT | 11.03.2015 | ||
LV | 11.03.2015 | ||
SE | 11.03.2015 | ||
GR | 12.06.2015 | ||
Former [2015/37] | ES | 11.03.2015 | |
FI | 11.03.2015 | ||
LT | 11.03.2015 | ||
SE | 11.03.2015 | ||
GR | 12.06.2015 | ||
Former [2015/36] | ES | 11.03.2015 | |
FI | 11.03.2015 | ||
LT | 11.03.2015 | ||
SE | 11.03.2015 | ||
Former [2015/35] | ES | 11.03.2015 | |
LT | 11.03.2015 | ||
Former [2015/33] | ES | 11.03.2015 | Cited in | International search | [A]US2003100189 (LEE CHUN-TAO [TW], et al) [A] 1-14 * paragraphs [0004] , [0010] - [0013]; figures 1A-1F *; | [Y]US2004005769 (MIKOLAS DAVID G [US]) [Y] 5,6,13 * paragraph [0055]; figures 2A,2B,4,6 * * abstract *; | [A]US2005084990 (LIU YUH-TURNG [TW], et al) [A] 1-14 * abstract *; | [A]WO2005050730 (UNIV MAGDEBURG TECH [DE], et al) [A] 1-14 * abstract *; | [A]US2005130341 (FURUKAWA TOSHIHARU [US], et al) [A] 1-14* abstract *; | [XY]WO2005076381 (IBM [US], et al) [X] 1-4,8,10-12,14 * paragraphs [0028] - [0031]; figures 2,3 * * paragraphs [0033] , [0034]; figures 6,7 * [Y] 5,6,13; | [X]WO2005117131 (KONINKL PHILIPS ELECTRONICS NV [NL], et al) [X] 1,2,4,7-12,14 * page 8, line 27 - page 10, line 10; figures 1,2 * | by applicant | US2004005769 | WO2005076381 | WO2005117131 |