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Extract from the Register of European Patents

EP About this file: EP2206138

EP2206138 - METHOD FOR MANUFACTURING A TREATED SURFACE AND VACUUM PLASMA SOURCES [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  26.01.2018
Database last updated on 05.10.2024
FormerThe patent has been granted
Status updated on  17.02.2017
FormerGrant of patent is intended
Status updated on  06.11.2016
Most recent event   Tooltip06.03.2020Lapse of the patent in a contracting state
New state(s): TR		published on 08.04.2020  [2020/15]
Applicant(s)For all designated states
Oerlikon Surface Solutions Ltd., Pfäffikon
Churerstrasse 120
8808 Pfäffikon SZ / CH
[2017/21]
Former [2010/28]For all designated states
Oerlikon Trading AG, Trübbach
9477 Trübbach / CH
Inventor(s)01 / RAMM, Juergen
Muehlebuendtestrasse 12
CH-7304 Maienfeld / CH
02 / WIDRIG, Beno
Rheinstrasse 13
CH-7310 Bad Ragaz / CH
03 / KURAPOV, Denis
Hanflaenderweg 5
CH-8880 Walenstadt / CH
 [2010/28]
Representative(s)Troesch Scheidegger Werner AG
Schwäntenmos 14
8126 Zumikon / CH
[2017/12]
Former [2010/28]Troesch, Jacques J.
Troesch Scheidegger Werner AG Schwäntenmos 14
8126 Zumikon / CH
Application number, filing date07822148.801.11.2007
[2010/28]
WO2007EP61805
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2009056173
Date:07.05.2009
Language:EN
[2009/19]
Type: A1 Application with search report 
No.:EP2206138
Date:14.07.2010
Language:EN
The application published by WIPO in one of the EPO official languages on 07.05.2009 takes the place of the publication of the European patent application.
[2010/28]
Type: B1 Patent specification 
No.:EP2206138
Date:22.03.2017
Language:EN
[2017/12]
Type: B8 Corrected title page of specification 
No.:EP2206138
Date:12.07.2017
[2017/28]
Search report(s)International search report - published on:EP07.05.2009
ClassificationIPC:H01J37/32, C23C14/00, C23C14/22, C23C14/35, C23C14/54
[2016/44]
CPC:
H01J37/32009 (EP,KR,US); C23C14/54 (KR,US); C23C14/0036 (KR,US);
C23C14/228 (KR,US); C23C14/35 (US); C23C14/351 (US);
H01J37/32 (KR); H01J37/32055 (EP,KR,US); H01J37/32477 (EP,KR,US);
H01J37/32541 (EP,KR,US) (-)
Former IPC [2010/28]H01J37/32
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2017/12]
Former [2010/28]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MT,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:VERFAHREN ZUR HERSTELLUNG EINER BEHANDELTEN OBERFLÄCHE UND VAKUUMPLASMAQUELLEN[2010/28]
English:METHOD FOR MANUFACTURING A TREATED SURFACE AND VACUUM PLASMA SOURCES[2010/28]
French:PROCÉDÉ DE FABRICATION D'UNE SURFACE TRAITÉE ET DE SOURCES DE PLASMA SOUS VIDE[2010/28]
Entry into regional phase06.05.2010National basic fee paid 
06.05.2010Designation fee(s) paid 
06.05.2010Examination fee paid 
Examination procedure06.05.2010Examination requested  [2010/28]
14.07.2010Amendment by applicant (claims and/or description)
19.05.2016Despatch of a communication from the examining division (Time limit: M04)
19.09.2016Reply to a communication from the examining division
07.11.2016Communication of intention to grant the patent
07.02.2017Fee for grant paid
07.02.2017Fee for publishing/printing paid
07.02.2017Receipt of the translation of the claim(s)
Divisional application(s)EP10178841.2  / EP2267756
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  19.05.2016
Opposition(s)02.01.2018No opposition filed within time limit [2018/09]
Fees paidRenewal fee
12.05.2010Renewal fee patent year 03
01.09.2010Renewal fee patent year 04
01.09.2011Renewal fee patent year 05
04.09.2012Renewal fee patent year 06
31.08.2013Renewal fee patent year 07
23.01.2015Renewal fee patent year 08
03.11.2015Renewal fee patent year 09
21.09.2016Renewal fee patent year 10
Penalty fee
Additional fee for renewal fee
30.11.201408   M06   Fee paid on   23.01.2015
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU01.11.2007
AT22.03.2017
CY22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
MC22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
TR22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
IE01.11.2017
LU01.11.2017
MT01.11.2017
BE30.11.2017
[2020/15]
Former [2019/46]HU01.11.2007
AT22.03.2017
CY22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
MC22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
IE01.11.2017
LU01.11.2017
MT01.11.2017
BE30.11.2017
Former [2019/31]HU01.11.2007
AT22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
MC22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
IE01.11.2017
LU01.11.2017
MT01.11.2017
BE30.11.2017
Former [2018/50]AT22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
MC22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
IE01.11.2017
LU01.11.2017
MT01.11.2017
BE30.11.2017
Former [2018/45]AT22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
MC22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
IE01.11.2017
LU01.11.2017
MT01.11.2017
Former [2018/43]AT22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
MC22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
LU01.11.2017
MT01.11.2017
Former [2018/41]AT22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
MC22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
LU01.11.2017
Former [2018/33]AT22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
MC22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
Former [2018/14]AT22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
PL22.03.2017
RO22.03.2017
SI22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
Former [2018/09]AT22.03.2017
CZ22.03.2017
DK22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
PL22.03.2017
RO22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
Former [2017/51]AT22.03.2017
CZ22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
PL22.03.2017
RO22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
PT24.07.2017
Former [2017/50]AT22.03.2017
CZ22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
PL22.03.2017
RO22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
Former [2017/49]AT22.03.2017
CZ22.03.2017
EE22.03.2017
ES22.03.2017
FI22.03.2017
IT22.03.2017
LT22.03.2017
LV22.03.2017
RO22.03.2017
SK22.03.2017
BG22.06.2017
GR23.06.2017
IS22.07.2017
Former [2017/48]CZ22.03.2017
FI22.03.2017
LT22.03.2017
LV22.03.2017
BG22.06.2017
GR23.06.2017
Former [2017/41]FI22.03.2017
LT22.03.2017
LV22.03.2017
BG22.06.2017
GR23.06.2017
Cited inInternational search[X]EP1628323  (JDS UNIPHASE CORP [US]) [X] 27,28,34,36,37,42,44 * paragraphs [0051] , [0052]; figures 1a,1b * * paragraph [0086]; figure 11 *;
 [X]US4038171  (MOSS RONALD W, et al) [X] 19,20,27,32,42,46 * column 3, line 1 - line 67; figure 1 * * column 5, line 44 - column 6, line 14; figures 1,2 *;
 [DYA]DE4306611  (LEYBOLD AG [DE]) [DY] 24,30,38 * page 4, line 11 - line 31; figure 1 * * page 4, line 55 - page 5, line 50; figure 4 * [A] 24,30,37;
 [X]US5605637  (SHAN HONGCHING [US], et al) [X] 19,20,22,27,28,32,34,36,40 * column 3, line 55 - column 4, line 30; figure 1 *;
 [A]US6446572  (BRCKA JOZEF [US]) [A] 1-46 * column 5, line 3 - line 39; figure 1 * * column 6, line 49 - column 7, line 37; figures 2A,2B ** column 10, line 1 - line 53; figure 5 *;
 [X]US6495000  (ATKINSON JAMES MIKEL [US], et al) [X] 19,20,27,32,42 * column 2, line 20 - column 3, line 13; figure 3 *;
 [XAY]US2007034501  (BENDER EFIM [IL]) [X] 19,20,27,32,42,43,45 * paragraph [0100] * * paragraphs [0117] - [0120] - [0122]; figure 3B * [A] 1-18,21,23,25,26,29,31,33,35,39,41 [Y] 24,30,38
ExaminationUS6010636
 US2005040144
by applicant   - L. DORF ET AL., "Experimental studies of anode sheath phenomena in a Hall thruster discharge", JOURNAL OF APPLIED PHYSICS, (2005), vol. 97, page 103309, XP012069312
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.