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Extract from the Register of European Patents

EP About this file: EP2095189

EP2095189 - COMPOSITION FOR FORMING RESIST FOUNDATION FILM CONTAINING LOW MOLECULAR WEIGHT DISSOLUTION ACCELERATOR [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  16.05.2014
Database last updated on 15.07.2024
Most recent event   Tooltip04.09.2015Lapse of the patent in a contracting state
New state(s): MT		published on 07.10.2015  [2015/41]
Applicant(s)For all designated states
Nissan Chemical Industries, Ltd.
7-1, Kanda Nishiki-cho 3-chome Chiyoda-ku
Tokyo 101-0054 / JP
[2009/36]
Inventor(s)01 / KATO, Masakazu
Nissan Chemical Industries Ltd. Electronic
Materials Research Laboratories
635 Sasakura
Fuchu-machi
Toyama-shi Toyama 939-2753 / JP
02 / HAMADA, Takahiro
Nissan Chemical Industries Ltd. Electronic
Materials Research Laboratories
635 Sasakura
Fuchu-machi
Toyama-shi Toyama 939-2753 / JP
03 / ENOMOTO, Tomoyuki
Nissan Chemical Industries Ltd. Electronic
Materials Research Laboratories
635 Sasakura
Fuchu-machi
Toyama-shi Toyama 939-2753 / JP
 [2013/28]
Former [2009/36]01 / KATO, Masakazu
Nissan Chemical Industries Ltd. Electronic Materials Research Laboratories 635 Sasakura Fuchu-machi
Toyama-shi Toyama 939-2753 / JP
02 / HAMADA, Takahiro
Nissan Chemical Industries Ltd. Electronic Materials Research Laboratories 635 Sasakura Fuchu-machi
Toyama-shi Toyama 939-2753 / JP
03 / ENOMOTO, Tomoyuki
Nissan Chemical Industries Ltd. Electronic Materials Research Laboratories 635 Sasakura Fuchu-machi
Toyama-shi Toyama 939-2753 / JP
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastrasse 30
81925 München / DE
[N/P]
Former [2013/28]HOFFMANN EITLE
Patent- und Rechtsanwälte
Arabellastrasse 4
81925 München / DE
Former [2009/36]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München / DE
Application number, filing date07850422.211.12.2007
[2009/36]
WO2007JP73860
Priority number, dateJP2006033572313.12.2006         Original published format: JP 2006335723
[2009/36]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2008072624
Date:19.06.2008
Language:EN
[2008/25]
Type: A1 Application with search report 
No.:EP2095189
Date:02.09.2009
Language:EN
The application published by WIPO in one of the EPO official languages on 19.06.2008 takes the place of the publication of the European patent application.
[2009/36]
Type: B1 Patent specification 
No.:EP2095189
Date:10.07.2013
Language:EN
[2013/28]
Search report(s)International search report - published on:JP19.06.2008
(Supplementary) European search report - dispatched on:EP03.11.2010
ClassificationIPC:G03F7/11, G03F7/095, H01L21/027
[2009/36]
CPC:
G03F7/091 (EP,US); G03F7/095 (KR); G03F7/039 (US);
G03F7/0392 (US); G03F7/11 (KR); G03F7/30 (US);
G03F7/322 (US); H01L21/0276 (EP,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2009/36]
TitleGerman:EINEN AUFLÖSUNGSBESCHLEUNIGER MIT NIEDRIGEM MOLEKULARGEWICHT ENTHALTENDE ZUSAMMENSETZUNG ZUR BILDUNG EINES RESISTGRUNDFILMS[2009/36]
English:COMPOSITION FOR FORMING RESIST FOUNDATION FILM CONTAINING LOW MOLECULAR WEIGHT DISSOLUTION ACCELERATOR[2009/36]
French:COMPOSITION POUR FORMER UN FILM DE FONDATION DE RÉSIST CONTENANT UN ACCÉLÉRATEUR DE DISSOLUTION DE FAIBLE MASSE MOLÉCULAIRE[2009/36]
Entry into regional phase26.06.2009Translation filed 
26.06.2009National basic fee paid 
26.06.2009Search fee paid 
26.06.2009Designation fee(s) paid 
26.06.2009Examination fee paid 
Examination procedure26.06.2009Examination requested  [2009/36]
30.05.2011Amendment by applicant (claims and/or description)
04.07.2012Despatch of a communication from the examining division (Time limit: M04)
19.10.2012Reply to a communication from the examining division
19.02.2013Communication of intention to grant the patent
28.05.2013Fee for grant paid
28.05.2013Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  04.07.2012
Opposition(s)11.04.2014No opposition filed within time limit [2014/25]
Fees paidRenewal fee
23.12.2009Renewal fee patent year 03
22.12.2010Renewal fee patent year 04
09.12.2011Renewal fee patent year 05
19.12.2012Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU11.12.2007
AT10.07.2013
BE10.07.2013
BG10.07.2013
CY10.07.2013
CZ10.07.2013
DK10.07.2013
EE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
MC10.07.2013
MT10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
SK10.07.2013
TR10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
GB11.12.2013
IE11.12.2013
LU11.12.2013
CH31.12.2013
LI31.12.2013
[2015/41]
Former [2015/34]HU11.12.2007
AT10.07.2013
BE10.07.2013
BG10.07.2013
CY10.07.2013
CZ10.07.2013
DK10.07.2013
EE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
MC10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
SK10.07.2013
TR10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
GB11.12.2013
IE11.12.2013
LU11.12.2013
CH31.12.2013
LI31.12.2013
Former [2015/32]AT10.07.2013
BE10.07.2013
CY10.07.2013
CZ10.07.2013
DK10.07.2013
EE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
MC10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
SK10.07.2013
TR10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
GB11.12.2013
IE11.12.2013
LU11.12.2013
CH31.12.2013
LI31.12.2013
Former [2014/51]AT10.07.2013
BE10.07.2013
CY10.07.2013
CZ10.07.2013
DK10.07.2013
EE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
MC10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
SK10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
GB11.12.2013
IE11.12.2013
LU11.12.2013
CH31.12.2013
LI31.12.2013
Former [2014/48]AT10.07.2013
BE10.07.2013
CY10.07.2013
CZ10.07.2013
DK10.07.2013
EE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
MC10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
SK10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
IE11.12.2013
LU11.12.2013
CH31.12.2013
LI31.12.2013
Former [2014/46]AT10.07.2013
BE10.07.2013
CY10.07.2013
CZ10.07.2013
DK10.07.2013
EE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
MC10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
SK10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
LU11.12.2013
CH31.12.2013
LI31.12.2013
Former [2014/38]AT10.07.2013
BE10.07.2013
CY10.07.2013
CZ10.07.2013
DK10.07.2013
EE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
MC10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
SK10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
LU11.12.2013
Former [2014/23]AT10.07.2013
BE10.07.2013
CY10.07.2013
CZ10.07.2013
DK10.07.2013
EE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
SK10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
Former [2014/22]AT10.07.2013
BE10.07.2013
CY10.07.2013
DK10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
NL10.07.2013
PL10.07.2013
RO10.07.2013
SE10.07.2013
SI10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
Former [2014/21]AT10.07.2013
BE10.07.2013
CY10.07.2013
DK10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
NL10.07.2013
PL10.07.2013
SE10.07.2013
SI10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
Former [2014/18]AT10.07.2013
BE10.07.2013
CY10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
NL10.07.2013
PL10.07.2013
SE10.07.2013
SI10.07.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
Former [2014/14]AT10.07.2013
BE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
NL10.07.2013
PL10.07.2013
SE10.07.2013
SI10.07.2013
CY07.08.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
Former [2014/12]AT10.07.2013
BE10.07.2013
FI10.07.2013
LT10.07.2013
LV10.07.2013
PL10.07.2013
SE10.07.2013
SI10.07.2013
CY07.08.2013
GR11.10.2013
ES21.10.2013
IS10.11.2013
PT11.11.2013
Former [2014/11]AT10.07.2013
BE10.07.2013
FI10.07.2013
LT10.07.2013
PL10.07.2013
SE10.07.2013
SI10.07.2013
CY07.08.2013
IS10.11.2013
PT11.11.2013
Former [2014/10]AT10.07.2013
BE10.07.2013
LT10.07.2013
SE10.07.2013
SI10.07.2013
CY07.08.2013
IS10.11.2013
PT11.11.2013
Former [2014/09]AT10.07.2013
BE10.07.2013
LT10.07.2013
SE10.07.2013
SI10.07.2013
PT11.11.2013
Former [2014/08]LT10.07.2013
SI10.07.2013
PT11.11.2013
Former [2013/49]SI10.07.2013
Documents cited:Search   [ ] - No further relevant documents disclosed
International search[X]WO2005111724  (NISSAN CHEMICAL IND LTD [JP], et al);
 [A]JP2005070154  (TOKYO OHKA KOGYO CO LTD)
by applicantUS6156479
 JP2004054286
 JP2005070154
 WO2005093513
 WO2005111719
 WO2005111724
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.