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EP2094603
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EP About this file: EP2094603
| EP2094603 - METHOD FOR FORMING NON-ALIGNED MICROCAVITIES OF DIFFERENT DEPTHS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 03.11.2015 Database last updated on 29.07.2024 | Most recent event Tooltip | 03.11.2015 | Application deemed to be withdrawn | published on 02.12.2015 [2015/49] | Applicant(s) | For all designated states Commissariat à l'Énergie Atomique et aux Énergies Alternatives Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris / FR | [N/P] |
| Former [2010/18] | For all designated states Commissariat à l'énergie atomique et aux énergies alternatives Bâtiment D "Le Ponant" 25, rue Leblanc 75015 Paris / FR | ||
| Former [2009/36] | For all designated states Commissariat à l'Energie Atomique 25, rue Leblanc Immeuble "Le Ponant D" 75015 Paris / FR | Inventor(s) | 01 /
BARBE, Jean-Charles 524 Charvolet 38160 Izeron / FR | 02 /
DORNEL, Erwan 2 bis Le Puisel 35770 Vern sur Seiche / FR | 03 /
DE CRECY, François 10 bis, rue du Priou 38180 Seyssins / FR | 04 /
EYMERY, Joël 2 rue du clapier 38360 Sassenage / FR | [2009/46] |
| Former [2009/36] | 01 /
BARBE, Jean-Charles 52, Rue St Laurent 38000 Grenoble / FR | ||
| 02 /
DORNEL, Erwan 2 bis Le Puisel 35770 Vern sur Seiche / FR | |||
| 03 /
DE CRECY, François 10 bis, rue du Priou 38180 Seyssins / FR | |||
| 04 /
EYMERY, Joël 2 rue du clapier 38360 Sassenage / FR | Representative(s) | Ilgart, Jean-Christophe BREVALEX 95, Rue d'Amsterdam 75378 Paris Cedex 8 / FR | [N/P] |
| Former [2009/36] | Ilgart, Jean-Christophe BREVALEX 3, rue du Docteur Lancereaux 75008 Paris / FR | Application number, filing date | 07857945.5 | 20.12.2007 | [2009/36] | WO2007EP64324 | Priority number, date | FR20060055817 | 21.12.2006 Original published format: FR 0655817 | [2009/36] | Filing language | FR | Procedural language | FR | Publication | Type: | A1 Application with search report | No.: | WO2008074861 | Date: | 26.06.2008 | Language: | FR | [2008/26] | Type: | A1 Application with search report | No.: | EP2094603 | Date: | 02.09.2009 | Language: | FR | The application published by WIPO in one of the EPO official languages on 26.06.2008 takes the place of the publication of the European patent application. | [2009/36] | Search report(s) | International search report - published on: | EP | 26.06.2008 | Classification | IPC: | B81C1/00, B01L3/00 | [2009/36] | CPC: |
B81C1/00047 (EP,US);
B01L3/5027 (EP,US);
B81B2201/058 (EP,US);
B81B2203/0384 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2009/36] | Title | German: | VERFAHREN ZUR HERSTELLUNG VON NICHT AUSGERICHTETEN MIKROHOHLRÄUMEN MIT VERSCHIEDENER TIEFE | [2009/36] | English: | METHOD FOR FORMING NON-ALIGNED MICROCAVITIES OF DIFFERENT DEPTHS | [2009/36] | French: | PROCEDE DE REALISATION DE MICRO-CAVITES NON-ALIGNEES ET A DIFFERENTES PROFONDEURS | [2009/36] | Entry into regional phase | 22.06.2009 | National basic fee paid | 22.06.2009 | Designation fee(s) paid | 22.06.2009 | Examination fee paid | Examination procedure | 10.06.2008 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 22.06.2009 | Amendment by applicant (claims and/or description) | 22.06.2009 | Examination requested [2009/36] | 31.03.2014 | Despatch of a communication from the examining division (Time limit: M04) | 17.07.2014 | Reply to a communication from the examining division | 01.07.2015 | Application deemed to be withdrawn, date of legal effect [2015/49] | 24.07.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2015/49] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 31.03.2014 | Fees paid | Renewal fee | 23.12.2009 | Renewal fee patent year 03 | 23.12.2010 | Renewal fee patent year 04 | 23.12.2011 | Renewal fee patent year 05 | 22.11.2012 | Renewal fee patent year 06 | 22.11.2013 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 31.12.2014 | 08 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]US6100132 (SATO TSUTOMU [JP], et al) [X] 1,10-13 * figures 23A,23B,23F,24A,24B * * column 16, line 30 - column 18, line 3 *; | [A]US6383924 (FARRAR PAUL A [US], et al) [A] 1,10,11,13 * figures 4-12 ** column 3, line 43 - column 6, line 50 *; | [A]EP1427010 (ST MICROELECTRONICS SRL [IT]) [A] 13 * paragraph [0034] - paragraph [0079] * * figures 17a-17f * * figures 26a-26f *; | [DX] - SATO T ET AL, "MICRO-STRUCTURE TRANSFORMATION OF SILICON: A NEWLY DEVELOPED TRANSFORMATION TECHNOLOGY FOR PATTERNING SILICON SURFACES USING THE SURFACE MIGRATION OF SILICON ATOMS BY HYDROGEN ANNEALING", JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, TOKYO, JP, (200009), vol. 39, no. 9A, PART 1, ISSN 0021-4922, pages 5033 - 5038, XP000977143 [DX] 1,10-12 * page 5033 - page 5035 * * figures 8,9 * DOI: http://dx.doi.org/10.1143/JJAP.39.5033 | by applicant | - T. SATO ET AL., "Microstructure Transformation of Silicon : A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing", JAPANESE JOURNAL OF APPLIED PHYSICS, (2000), vol. 39, doi:doi:10.1143/JJAP.39.5033, pages 5033 - 5038, XP000977143 DOI: http://dx.doi.org/10.1143/JJAP.39.5033 | - T. SATO ET AL., "Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique", JAPANESE JOURNAL OF APPLIED PHYSICS, (2004), vol. 43, no. 1, doi:doi:10.1143/JJAP.43.12, pages 12 - 18, XP001191452 DOI: http://dx.doi.org/10.1143/JJAP.43.12 | - SPULBER ET AL., ISPSD | - J.M. HARTMANN ET AL., JOURNAL OF CRYSTAL GROWTH, (2006), pages 288 - 295 |