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EP2084747

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EP About this file: EP2084747

EP2084747 - MONOLITHIC IC AND MEMS MICROFABRICATION PROCESS [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 31.05.2013 Database last updated on 23.09.2024
Most recent event Tooltip	31.05.2013	Application deemed to be withdrawn	published on 03.07.2013 [2013/27]
Applicant(s)	For all designated states Alces Technology, Inc. 650 West Elk Avenue Jackson, Wyoming 83001 / US
	[2009/32]
Inventor(s)	01 / YEH, Richard P.O. Box 12685 Jackson, Wyoming 83002 / US
	02 / BLOOM, David M. 4750 Cortland Drive Jackson, Wyoming 83001 / US
	[2009/32]
Representative(s)	Richards, John, et al Ladas & Parry LLP Temple Chambers 3-7 Temple Avenue London EC4Y 0DA / GB
	[N/P]
Former [2012/07]	Richards, John, et al Ladas & Parry LLP Dachauerstrasse 37 80335 München / DE
Former [2009/32]	Galloway, Peter David, et al Ladas & Parry LLP Dachauerstrasse 37 80335 München / DE
Application number, filing date	07864561.1	16.11.2007
	[2009/32]
	WO2007US85022
Priority number, date	US20060602087	20.11.2006 Original published format: US 602087
	[2009/32]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2008064135
	Date:	29.05.2008
	Language:	EN
	[2008/22]
	Type:	A1 Application with search report
	No.:	EP2084747
	Date:	05.08.2009
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 29.05.2008 takes the place of the publication of the European patent application.
	[2009/32]
Search report(s)	International search report - published on:	KR	29.05.2008
	(Supplementary) European search report - dispatched on:	EP	03.05.2012
Classification	IPC:	B81C1/00	[2012/22]
	CPC:	H01L27/06 (EP,US); B81C1/00246 (EP,US); B81C2203/0742 (EP,US)
	Former IPC [2009/32]	H01L29/00
Designated contracting states	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2009/32]
Title	German:	MIKROHERSTELLUNGSERFAHREN FÜR MONOLITHISCHE IC UND MEMS	[2009/32]
	English:	MONOLITHIC IC AND MEMS MICROFABRICATION PROCESS	[2009/32]
	French:	PROCEDE DE MICROFABRICATION DE CI ET DE MEMS MONOLITHIQUES	[2009/32]
Entry into regional phase	15.06.2009	National basic fee paid
	15.06.2009	Search fee paid
	15.06.2009	Designation fee(s) paid
	15.06.2009	Examination fee paid
Examination procedure	15.06.2009	Examination requested [2009/32]
	04.12.2012	Application deemed to be withdrawn, date of legal effect [2013/27]
	25.01.2013	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2013/27]
Fees paid	Renewal fee
	30.10.2009	Renewal fee patent year 03
	26.10.2010	Renewal fee patent year 04
	24.10.2011	Renewal fee patent year 05
	Penalty fee
	Additional fee for renewal fee
	30.11.2012	06 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[Y]US6531331 (BENNETT REID [US], et al) [Y] 1-21 * paragraphs [0028] - [0041]; figure 1 *;
		[Y]US2005177045 (DEGERTEKIN F L [US], et al) [Y] 1-21 * paragraphs [0051] - [0063]; figure 3 *;
		[A] - BROSRIHAN T J ET AL, "Optical IMEMS- a fabrication process for mems optical switches with integrated on-chip electronics", TRANSDUCERS, SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, 12TH INN ATIONAL CONFERENCE ON, 2003, PISCATAWAY, NJ, USA,IEEE, (20030609), vol. 2, ISBN 978-0-7803-7731-8, pages 1638 - 1642, XP010647532 [A] 13 * page 1641, column l, lines 11-13; figures 1,4 *
		[A] - JIN X ET AL, "The microfabrication of capacitive ultrasonic transducers", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, US, (19980903), vol. 7, no. 3, doi:10.1109/84.709646, ISSN 1057-7157, pages 295 - 301, XP002976182 [A] 15,21 * Section "III. FABRICATION" starting on page 296, right-hand column,;; figure 5 * DOI: http://dx.doi.org/10.1109/84.709646
		[A] - BLOOM ET AL, "The Grating light valve: revolutionizing display technology", PROCEEDINGS OF SPIE, SPIE, US, (19970201), vol. 3013, doi:10.1117/12.273868, ISSN 0277-786X, pages 165 - 171, XP009018300 [A] 1-21 * Section "2. Building the GLV device" starting on page 166 * DOI: http://dx.doi.org/10.1117/12.273868
	International search	[A]US5573679 (MITCHELL ALAN W [US], et al);
		[X]US6943037 (ANAGNOSTOPOULOS CONSTANTINE N [US], et al);
		[A]US7078337 (CAMPBELL TIMOTHY S [US], et al)

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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