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EP2017675
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EP About this file: EP2017675
| EP2017675 - Exposure apparatus [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 14.10.2011 Database last updated on 24.07.2024 | Most recent event Tooltip | 14.10.2011 | Withdrawal of application | published on 16.11.2011 [2011/46] | Applicant(s) | For all designated states CANON KABUSHIKI KAISHA 3-30-2, Shimomaruko, Ohta-ku Tokyo / JP | [N/P] |
| Former [2009/04] | For all designated states CANON KABUSHIKI KAISHA 3-30-2 Shimomaruko Ohta-ku, Tokyo / JP | Inventor(s) | 01 /
Emoto, Keiji Canon Kabushiki Kaisha 30-2, Shimomaruko 3-chome, Ohta-ku Tokyo Tokyo 146-8501 / JP | 02 /
Matsushita, Hirohide Canon Kabushiki Kaisha 30-2, Shimomaruko 3-chome, Ohta-ku Tokyo Tokyo 146-8501 / JP | 03 /
Akutsu, Kotaro Canon Kabushiki Kaisha 30-2, Shimomaruko 3-chome, Ohta-ku Tokyo Tokyo 146-8501 / JP | [2009/04] | Representative(s) | TBK Bavariaring 4-6 80336 München / DE | [N/P] |
| Former [2009/04] | TBK-Patent Bavariaring 4-6 80336 München / DE | Application number, filing date | 08168735.2 | 26.06.2002 | [2009/04] | Priority number, date | JP20010207363 | 09.07.2001 Original published format: JP 2001207363 | JP20010208961 | 10.07.2001 Original published format: JP 2001208961 | JP20010274762 | 11.09.2001 Original published format: JP 2001274762 | [2009/04] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2017675 | Date: | 21.01.2009 | Language: | EN | [2009/04] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 04.12.2008 | Classification | IPC: | G03F7/20 | [2009/04] | CPC: |
G03F7/70525 (EP,US);
H01L21/027 (KR);
G03F7/70758 (EP,US);
G03F7/70858 (EP,US);
G03F7/70875 (EP,US);
G03F7/70925 (EP,US);
| Designated contracting states | DE, GB, NL [2009/04] | Title | German: | Beleuchtungsapparat | [2009/04] | English: | Exposure apparatus | [2009/04] | French: | Appareil d'exposition | [2009/04] | Examination procedure | 04.06.2009 | Amendment by applicant (claims and/or description) | 21.07.2009 | Examination requested [2009/35] | 29.03.2011 | Despatch of a communication from the examining division (Time limit: M06) | 10.10.2011 | Application withdrawn by applicant [2011/46] | Parent application(s) Tooltip | EP02254504.0 / EP1276016 | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20020254504) is 30.01.2006 | Fees paid | Renewal fee | 10.03.2009 | Renewal fee patent year 03 | 10.03.2009 | Renewal fee patent year 04 | 10.03.2009 | Renewal fee patent year 05 | 10.03.2009 | Renewal fee patent year 06 | 10.03.2009 | Renewal fee patent year 07 | 30.06.2009 | Renewal fee patent year 08 | 30.03.2010 | Renewal fee patent year 09 | 30.06.2011 | Renewal fee patent year 10 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JPH01245893 (FUJITSU LTD) [A] 1-3* abstract *; | [A]JPH0390847 (FUJI ELECTRIC CO LTD) [A] 1-3 * abstract *; | [A]US5959732 (HARA HIDEAKI [JP], et al) [A] 1-3 * column 1, lines 5-8 * * column 7, line 59 - column 8, line 1 * * column 9, lines 6-8 * * figures 1,3 *; | [X]JP2000348932 (NIKON CORP) [X] 1-3 * paragraph [0036] * * figure 1 * | by applicant | JPH10309071 | EP1276016 | EP2254504 |