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EP2176441
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EP About this file: EP2176441
| EP2176441 - SPUTTERING TARGET HAVING INCREASED LIFE AND SPUTTERING UNIFORMITY [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 18.01.2013 Database last updated on 19.10.2024 | Most recent event Tooltip | 18.01.2013 | Application deemed to be withdrawn | published on 20.02.2013 [2013/08] | Applicant(s) | For all designated states Applied Materials, Inc. Patent Department, M/S 2061 P.O. Box 450A Santa Clara, CA 95052 / US | [N/P] |
| Former [2010/16] | For all designated states APPLIED MATERIALS, INC. Patent Department, M/S 2061 P.O. Box 450A Santa Clara, CA 95052 / US | Inventor(s) | 01 /
ALLEN, Adolph Miller 4958 Stoneridge Ct. Oakland, California 94605 / US | 02 /
YOON, Ki Hwan 14291 Elva Ave. Saratoga, CA, 95070 / US | 03 /
GUO, Ted 777 San Antonio Road, 37 Palo Alto, California 94303 / US | 04 /
YANG, Hong S. 3518 Ovella Way Pleasanton, California 94566 / US | 05 /
YU, Sang-Ho 11676 Palm Spring Court Cupertino, California 95014 / US | [2012/02] |
| Former [2010/16] | 01 /
ALLEN, Adolph Miller 4958 Stoneridge Ct. Oakland, California 94605 / US | ||
| 02 /
YOON, Ki Hwan 1553 Tainan Drive San Jose, California 95131 / US | |||
| 03 /
GUO, Ted 777 San Antonio Road, 37 Palo Alto, California 94303 / US | |||
| 04 /
YANG, Hong S. 3518 Ovella Way Pleasanton, California 94566 / US | |||
| 05 /
YU, Sang-Ho 11676 Palm Spring Court Cupertino, California 95014 / US | Representative(s) | Zimmermann, Gerd Heinrich Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE | [N/P] |
| Former [2010/16] | Zimmermann, Gerd Heinrich Zimmermann & Partner Isartorplatz 1 80331 München / DE | Application number, filing date | 08768603.6 | 18.06.2008 | [2010/16] | WO2008US07611 | Priority number, date | US20070764772 | 18.06.2007 Original published format: US 764772 | [2010/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2008156794 | Date: | 24.12.2008 | Language: | EN | [2008/52] | Type: | A2 Application without search report | No.: | EP2176441 | Date: | 21.04.2010 | Language: | EN | The application published by WIPO in one of the EPO official languages on 24.12.2008 takes the place of the publication of the European patent application. | [2010/16] | Search report(s) | International search report - published on: | EP | 19.03.2009 | Classification | IPC: | C23C14/34 | [2010/16] | CPC: |
C23C14/3407 (EP,US);
C23C14/34 (KR);
C23C14/14 (KR);
C23C14/54 (KR);
H01J37/3423 (EP,KR,US);
H01J37/3435 (EP,KR,US);
H01L21/02631 (KR);
H01L21/20 (KR);
H01L21/67207 (KR);
H04L43/00 (EP,US);
H04L65/765 (EP,US);
H04L65/80 (EP,US);
H04L43/06 (EP,US);
H04L43/0829 (EP,US);
H04L43/087 (EP,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2010/16] | Title | German: | SPUTTERTARGET MIT ERHÖHTER LEBENSDAUER UND SPUTTEREINHEITLICHKEIT | [2010/16] | English: | SPUTTERING TARGET HAVING INCREASED LIFE AND SPUTTERING UNIFORMITY | [2010/16] | French: | CIBLE DE PULVÉRISATION CATHODIQUE AYANT UNE DURÉE DE VIE ACCRUE ET UNE UNIFORMITÉ DE PULVÉRISATION CATHODIQUE | [2010/16] | Entry into regional phase | 18.01.2010 | National basic fee paid | 18.01.2010 | Designation fee(s) paid | 18.01.2010 | Examination fee paid | Examination procedure | 18.01.2010 | Amendment by applicant (claims and/or description) | 18.01.2010 | Examination requested [2010/16] | 17.04.2012 | Despatch of a communication from the examining division (Time limit: M04) | 28.08.2012 | Application deemed to be withdrawn, date of legal effect [2013/08] | 04.10.2012 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2013/08] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 17.04.2012 | Fees paid | Renewal fee | 30.06.2010 | Renewal fee patent year 03 | 07.06.2011 | Renewal fee patent year 04 | Penalty fee | Additional fee for renewal fee | 30.06.2012 | 05 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X]JPS59232271 (NIPPON ELECTRIC CO) [X] 1-11 * abstract *; | [X]US5215639 (BOYS DONALD R [US]) [X] 1-11 * the whole document *; | [X]JPH06140330 (NIPPON STEEL CORP) [X] 1-11 * abstract *; | [A]US6497797 (KIM JAEYEON [US]) [A] 1-11* column W *; | [X]US2005011749 (KACHALOV MIKHAIL Y [US], et al) [X] 1-11 * claim 2 * |