-
EP2206137
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP2206137
| EP2206137 - PLASMA ELECTRON FLOOD FOR ION BEAM IMPLANTER [Right-click to bookmark this link] | Status | The application has been refused Status updated on 19.04.2013 Database last updated on 19.10.2024 | Most recent event Tooltip | 19.04.2013 | Refusal of application | published on 22.05.2013 [2013/21] | Applicant(s) | For all designated states Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly, MA 01915 / US | [2010/28] | Inventor(s) | 01 /
VANDERBERG, Bo 36 Woodbury Street Gloucester, MA 01930 / US | 02 /
DIVERGILIO, William 10 Rogers Street, 701 Cambridge, MA 02142 / US | [2010/48] |
| Former [2010/28] | 01 /
VANDERBERG, Bo 36 Woodbury Street Gloucester, MA 01930 / US | ||
| 02 /
DIVERGILIO, William 1284 Beacon Street Brookline, MA 02446 / US | Representative(s) | Treeby, Philip David William, et al Maucher Jenkins Seventh Floor Offices Artillery House 11-19 Artillery Row London SW1P 1RT / GB | [N/P] |
| Former [2010/28] | Treeby, Philip David William, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB | Application number, filing date | 08847752.6 | 06.11.2008 | [2010/28] | WO2008US12599 | Priority number, date | US20070935738 | 06.11.2007 Original published format: US 935738 | [2010/28] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2009061485 | Date: | 14.05.2009 | Language: | EN | [2009/20] | Type: | A1 Application with search report | No.: | EP2206137 | Date: | 14.07.2010 | Language: | EN | The application published by WIPO in one of the EPO official languages on 14.05.2009 takes the place of the publication of the European patent application. | [2010/28] | Search report(s) | International search report - published on: | EP | 14.05.2009 | Classification | IPC: | H01J37/077, H01J3/00, H01J37/02, H01J37/317 | [2010/28] | CPC: |
H01J37/026 (EP,US);
H01J37/3171 (EP,US);
H01J2237/0041 (EP,US);
H01J2237/06366 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2010/28] | Title | German: | PLASMAELEKTRONENFLUSS FÜR EINEN IONENIMPLANTER | [2010/28] | English: | PLASMA ELECTRON FLOOD FOR ION BEAM IMPLANTER | [2010/28] | French: | ARROSAGE D'ÉLECTRONS PAR PLASMA POUR IMPLANTEUR À FAISCEAU IONIQUE | [2010/28] | Entry into regional phase | 16.04.2010 | National basic fee paid | 16.04.2010 | Designation fee(s) paid | 16.04.2010 | Examination fee paid | Examination procedure | 16.04.2010 | Examination requested [2010/28] | 26.07.2010 | Amendment by applicant (claims and/or description) | 14.10.2010 | Despatch of a communication from the examining division (Time limit: M04) | 23.02.2011 | Reply to a communication from the examining division | 21.03.2011 | Despatch of a communication from the examining division (Time limit: M04) | 27.07.2011 | Reply to a communication from the examining division | 11.10.2012 | Application refused, date of legal effect [2013/21] | 11.10.2012 | Date of oral proceedings | 04.01.2013 | Minutes of oral proceedings despatched | 09.01.2013 | Despatch of communication that the application is refused, reason: substantive examination [2013/21] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 14.10.2010 | Fees paid | Renewal fee | 22.10.2010 | Renewal fee patent year 03 | 24.02.2012 | Renewal fee patent year 04 | Penalty fee | Additional fee for renewal fee | 30.11.2011 | 04 M06 Fee paid on 24.02.2012 | 30.11.2012 | 05 M06 Not yet paid |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [XA]EP0291279 (APPLIED MATERIALS INC [US]) [X] 1,3-5 * abstract * * column 6, line 49 - column 8, line 38 * * column 10, line 14 - line 55 *[A] 13,6,7,12,24; | [XA]US6271529 (FARLEY MARVIN [US], et al) [X] 1,8,14,15,19,20,23 * abstract * * column 7, line 11 - column 8, line 41 * * column 9, line 29 - line 67 * * column 11, line 17 - line 30 * * column 12, line 6 - line 13 * [A] 7,13,6,12,24; | [XA]US2003183780 (SANO MAKOTO [JP], et al) [X] 1,8,14,19,20,23 * paragraph [0049] - paragraph [0058]; figures 2a-c,3-5 * * paragraph [0068] * [A] 6,7,12,13,24 | by applicant | EP0291279 | US6271529 | US2003183780 |