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Extract from the Register of European Patents

EP About this file: EP2078695

EP2078695 - Process for depositing polycrystalline silicon [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  29.03.2013
Database last updated on 02.07.2024
Most recent event   Tooltip08.11.2013Lapse of the patent in a contracting state
New state(s): FR
published on 11.12.2013  [2013/50]
Applicant(s)For all designated states
Wacker Chemie AG
Hanns-Seidel-Platz 4
81737 München / DE
[2009/29]
Inventor(s)01 / Hesse, Karl
Hechenbergstr. 46
84489 Burghausen / DE
02 / Schreieder, Franz
Sperberstr. 12
84367 Tann / DE
 [2009/29]
Representative(s)Fritz, Helmut, et al
Wacker Chemie AG
Zentralbereich Patente, Marken und Lizenzen
Hanns-Seidel-Platz 4
81737 München / DE
[N/P]
Former [2009/29]Fritz, Helmut, et al
Wacker Chemie AG Zentralbereich Patente, Marken und Lizenzen Hanns-Seidel-Platz 4
81737 München / DE
Application number, filing date09150271.609.01.2009
[2009/29]
Priority number, dateDE2008100005214.01.2008         Original published format: DE102008000052
[2009/29]
Filing languageDE
Procedural languageDE
PublicationType: A2 Application without search report 
No.:EP2078695
Date:15.07.2009
Language:DE
[2009/29]
Type: A3 Search report 
No.:EP2078695
Date:19.08.2009
[2009/34]
Type: B1 Patent specification 
No.:EP2078695
Date:23.05.2012
Language:DE
[2012/21]
Search report(s)(Supplementary) European search report - dispatched on:EP17.07.2009
ClassificationIPC:C01B33/035
[2009/29]
CPC:
C01B33/035 (EP,US); C01B33/03 (KR); C01B33/027 (KR)
Designated contracting statesDE,   ES,   FR,   IT,   NL,   NO [2010/17]
Former [2009/29]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Verfahren zur Abscheidung von polykristallinem Silicium[2009/29]
English:Process for depositing polycrystalline silicon[2009/29]
French:Procédé et appareil pour séparer un produit gazeux d'un flux d'alimentation comprenant des contaminants[2009/29]
Examination procedure09.01.2009Examination requested  [2009/29]
02.02.2010Despatch of a communication from the examining division (Time limit: M04)
19.05.2010Reply to a communication from the examining division
28.07.2011Despatch of a communication from the examining division (Time limit: M04)
16.11.2011Reply to a communication from the examining division
02.01.2012Communication of intention to grant the patent
29.03.2012Fee for grant paid
29.03.2012Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  02.02.2010
Opposition(s)26.02.2013No opposition filed within time limit [2013/18]
Fees paidRenewal fee
24.01.2011Renewal fee patent year 03
25.01.2012Renewal fee patent year 04
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipNL23.05.2012
NO23.08.2012
FR31.01.2013
[2013/50]
Former [2013/08]NL23.05.2012
NO23.08.2012
Former [2012/47]NO23.08.2012
Documents cited:Search[A]DE2918066  (SIEMENS AG) [A] 1-11 * page 4, line 7 - page 5, line 9 * * page 7, lines 21-29; example 1 *;
 [A]EP1264798  (MITSUBISHI MATERIALS POLYCRYST [JP]) [A] 1-11* paragraph [0001] - paragraph [0008] *;
 [A]WO2005085133  (DEGUSSA [DE], et al) [A] 1-11 * page 4, line 24 - page 7, line 25 *;
 [A]RU2004124874  (STEPANOVICH GRIGOR'EVICH VLADIMIROVICH VJACHESLAVOVICH ALEKSANDROVICH) [A] 1-11 * abstract *;
 [PA]WO2008027101  (HEMLOCK SEMICONDUCTOR CORP [US], et al) [PA] 1-11 * paragraph [0002] - paragraph [0013] * * figures 1,2 *
by applicantUS3933985
 DE2918066
 US4252780
 US4340574
 JPH01188414
 JPH09263405
 WO0212122
 WO02100776
 DE102006009953
 DE102007021003
    - W.C. O MARA; R.B. HERRING; L.P. HUNT, Handbook of Semiconductor Silicon Technology, (1990), page 77
    - Handbook of Semiconductor Silicon Technology, (1990), page 72
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.