blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability
Register Forum

2022.02.11

More...
blank News flashes

News flashes

New version of the European Patent Register - SPC information for Unitary Patents.

2024-03-06

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register Resource Book
European Patent Register – pocket guide
FAQ - European Patent Register
FAQ - Register Alert
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP2247968

EP2247968 - OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL ELEMENT AND DEVICE MANUFACTURING METHOD [Right-click to bookmark this link]
Former [2010/45]OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL ELEMENT, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
[2011/43]
StatusNo opposition filed within time limit
Status updated on  08.02.2013
Database last updated on 20.07.2024
Most recent event   Tooltip17.07.2015Lapse of the patent in a contracting state
New state(s): HU		published on 19.08.2015  [2015/34]
Applicant(s)For all designated states
ASML Netherlands B.V.
De Run 6501
5504 DR Veldhoven / NL
[2010/45]
Inventor(s)01 / SOER, Wouter, Anthon
Hegdambroek 1717
NL-6546 VV Nijmegen / NL
02 / BANINE, Vadim, Yevgenyevich
Eendracht 21
NL-5751 SB Deurne / NL
03 / MOORS, Johannes, Hubertus, Josephina
Dierdonklaan 56
NL-5709 MT Helmond / NL
04 / VAN HERPEN, Maarten, Marinus, Johannes, Wilhelmus
De Sikkel 32
NL-5384 HS Heesch / NL
05 / YAKURIN, Andrey, Mikhailovich
Oudaen 117
NL-5653 KD Eindhoven / NL
 [2010/45]
Representative(s)Slenders, Petrus Johannes Waltherus, et al
ASML Netherlands B.V.
Corporate Intellectual Property
De Run 6501
P.O. Box 324
5500 AH Veldhoven / NL
[N/P]
Former [2012/52]Slenders, Petrus J. W., et al
ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
Former [2012/14]Slenders, Petrus J. W.
ASML Netherlands B.V. De Run 6504
5504 DR Veldhoven / NL
Former [2010/45]Slenders, Petrus J. W.
ASML Netherlands B.V. De Run 6504
5504 DR Veldhoven / NL
Application number, filing date09715126.024.02.2009
[2010/45]
WO2009EP01299
Priority number, dateUS20080064313P27.02.2008         Original published format: US 64313 P
US20080129689P11.07.2008         Original published format: US 129689 P
[2010/45]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2009106291
Date:03.09.2009
Language:EN
[2009/36]
Type: A1 Application with search report 
No.:EP2247968
Date:10.11.2010
Language:EN
The application published by WIPO in one of the EPO official languages on 03.09.2009 takes the place of the publication of the European patent application.
[2010/45]
Type: B1 Patent specification 
No.:EP2247968
Date:04.04.2012
Language:EN
[2012/14]
Search report(s)International search report - published on:EP03.09.2009
ClassificationIPC:G02B5/20, G02B5/22, G02B5/26, G03F7/20, G21K1/06, G02B5/08
[2010/45]
CPC:
G02B5/208 (EP,US); B82Y10/00 (EP,US); G02B5/0891 (EP,US);
G02B5/22 (EP,US); G02B5/26 (EP,US); G03F7/70191 (EP,US);
G03F7/702 (EP,US); G03F7/70575 (EP,US); G03F7/70958 (EP,US);
G21K1/067 (EP,US); G21K2201/061 (EP,US); G21K2201/064 (EP,US);
G21K2201/065 (EP,US); G21K2201/067 (EP,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2010/45]
TitleGerman:OPTISCHES ELEMENT, LITHOGRAFIEVORRICHTUNG MIT DERARTIGEM OPTISCHEN ELEMENT UND VERFAHREN ZUR HERSTELLUNG EINES BAUELEMENTS[2011/43]
English:OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL ELEMENT AND DEVICE MANUFACTURING METHOD[2011/43]
French:ELÉMENT OPTIQUE, APPAREIL LITHOGRAPHIQUE COMPRENANT UN TEL ÉLÉMENT OPTIQUE ET PROCÉDÉ DE FABRICATION DU DISPOSITIF[2011/43]
Former [2010/45]OPTISCHES ELEMENT, LITHOGRAFIEVORRICHTUNG MIT DERARTIGEM OPTISCHEN ELEMENT, VERFAHREN ZUR HERSTELLUNG DER VORRICHTUNG UND IN DIESEM VERFAHREN HERGESTELLTE VORRICHTUNG
Former [2010/45]OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL ELEMENT, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
Former [2010/45]ELÉMENT OPTIQUE, APPAREIL LITHOGRAPHIQUE COMPRENANT UN TEL ÉLÉMENT OPTIQUE, PROCÉDÉ DE FABRICATION DU DISPOSITIF ET DISPOSITIF FABRIQUÉ SELON CE PROCÉDÉ
Entry into regional phase13.09.2010National basic fee paid 
13.09.2010Designation fee(s) paid 
13.09.2010Examination fee paid 
Examination procedure13.09.2010Examination requested  [2010/45]
04.11.2010Amendment by applicant (claims and/or description)
11.11.2011Communication of intention to grant the patent
14.02.2012Fee for grant paid
14.02.2012Fee for publishing/printing paid
Divisional application(s)EP12155788.8  / EP2515149
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  11.11.2011
Opposition(s)07.01.2013No opposition filed within time limit [2013/11]
Fees paidRenewal fee
22.02.2011Renewal fee patent year 03
22.02.2012Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU24.02.2009
AT04.04.2012
BE04.04.2012
CY04.04.2012
CZ04.04.2012
DK04.04.2012
EE04.04.2012
FI04.04.2012
HR04.04.2012
IT04.04.2012
LT04.04.2012
LV04.04.2012
MK04.04.2012
MT04.04.2012
NL04.04.2012
PL04.04.2012
RO04.04.2012
SE04.04.2012
SI04.04.2012
SK04.04.2012
TR04.04.2012
BG04.07.2012
NO04.07.2012
GR05.07.2012
ES15.07.2012
IS04.08.2012
PT06.08.2012
[2015/34]
Former [2015/32]AT04.04.2012
BE04.04.2012
CY04.04.2012
CZ04.04.2012
DK04.04.2012
EE04.04.2012
FI04.04.2012
HR04.04.2012
IT04.04.2012
LT04.04.2012
LV04.04.2012
MK04.04.2012
MT04.04.2012
NL04.04.2012
PL04.04.2012
RO04.04.2012
SE04.04.2012
SI04.04.2012
SK04.04.2012
TR04.04.2012
BG04.07.2012
NO04.07.2012
GR05.07.2012
ES15.07.2012
IS04.08.2012
PT06.08.2012
Former [2014/32]AT04.04.2012
BE04.04.2012
CY04.04.2012
CZ04.04.2012
DK04.04.2012
EE04.04.2012
FI04.04.2012
HR04.04.2012
IT04.04.2012
LT04.04.2012
LV04.04.2012
MT04.04.2012
NL04.04.2012
PL04.04.2012
RO04.04.2012
SE04.04.2012
SI04.04.2012
SK04.04.2012
BG04.07.2012
NO04.07.2012
GR05.07.2012
ES15.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/34]AT04.04.2012
BE04.04.2012
CY04.04.2012
CZ04.04.2012
DK04.04.2012
EE04.04.2012
FI04.04.2012
HR04.04.2012
IT04.04.2012
LT04.04.2012
LV04.04.2012
NL04.04.2012
PL04.04.2012
RO04.04.2012
SE04.04.2012
SI04.04.2012
SK04.04.2012
BG04.07.2012
NO04.07.2012
GR05.07.2012
ES15.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/22]AT04.04.2012
BE04.04.2012
CY04.04.2012
CZ04.04.2012
DK04.04.2012
EE04.04.2012
FI04.04.2012
HR04.04.2012
IT04.04.2012
LT04.04.2012
LV04.04.2012
NL04.04.2012
PL04.04.2012
RO04.04.2012
SE04.04.2012
SI04.04.2012
SK04.04.2012
NO04.07.2012
GR05.07.2012
ES15.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/11]AT04.04.2012
BE04.04.2012
CY04.04.2012
CZ04.04.2012
DK04.04.2012
EE04.04.2012
FI04.04.2012
HR04.04.2012
IT04.04.2012
LT04.04.2012
LV04.04.2012
NL04.04.2012
PL04.04.2012
RO04.04.2012
SE04.04.2012
SI04.04.2012
SK04.04.2012
NO04.07.2012
GR05.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/10]AT04.04.2012
BE04.04.2012
CY04.04.2012
CZ04.04.2012
DK04.04.2012
EE04.04.2012
FI04.04.2012
HR04.04.2012
LT04.04.2012
LV04.04.2012
NL04.04.2012
PL04.04.2012
RO04.04.2012
SE04.04.2012
SI04.04.2012
SK04.04.2012
NO04.07.2012
GR05.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/09]AT04.04.2012
BE04.04.2012
CY04.04.2012
DK04.04.2012
EE04.04.2012
FI04.04.2012
HR04.04.2012
LT04.04.2012
LV04.04.2012
NL04.04.2012
PL04.04.2012
SE04.04.2012
SI04.04.2012
NO04.07.2012
GR05.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/08]AT04.04.2012
BE04.04.2012
CY04.04.2012
DK04.04.2012
FI04.04.2012
HR04.04.2012
LT04.04.2012
LV04.04.2012
NL04.04.2012
PL04.04.2012
SE04.04.2012
SI04.04.2012
NO04.07.2012
GR05.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/07]AT04.04.2012
BE04.04.2012
CY04.04.2012
FI04.04.2012
HR04.04.2012
LT04.04.2012
LV04.04.2012
PL04.04.2012
SE04.04.2012
SI04.04.2012
NO04.07.2012
GR05.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/04]BE04.04.2012
CY04.04.2012
FI04.04.2012
HR04.04.2012
LT04.04.2012
LV04.04.2012
PL04.04.2012
SE04.04.2012
SI04.04.2012
NO04.07.2012
GR05.07.2012
IS04.08.2012
PT06.08.2012
Former [2013/01]CY04.04.2012
FI04.04.2012
HR04.04.2012
LT04.04.2012
LV04.04.2012
PL04.04.2012
SE04.04.2012
SI04.04.2012
NO04.07.2012
GR05.07.2012
IS04.08.2012
PT06.08.2012
Former [2012/50]CY04.04.2012
FI04.04.2012
HR04.04.2012
LT04.04.2012
LV04.04.2012
PL04.04.2012
SE04.04.2012
SI04.04.2012
NO04.07.2012
GR05.07.2012
IS04.08.2012
Former [2012/49]CY04.04.2012
FI04.04.2012
LT04.04.2012
PL04.04.2012
SE04.04.2012
SI04.04.2012
NO04.07.2012
IS04.08.2012
Former [2012/48]FI04.04.2012
LT04.04.2012
SE04.04.2012
NO04.07.2012
Former [2012/47]LT04.04.2012
NO04.07.2012
Cited inInternational search[X]US5963365  (SHIRAI TAKESHI [JP]) [X] 1 * column 4, lines 30-48; figure 1 *;
 [X]EP1065568  (ASM LITHOGRAPHY BV [NL]) [X] 1,26,32,38 * paragraphs [0021] - [0025]; figure 1 * * paragraphs [0065] - [0069]; figure 13 *;
 [A]US6281964  (SATO HIROSHI [JP]) [A] 1,26,32,38 * column 4, lines 38-56; figure 1 *;
 [X]US2003021997  (VEERASAMY VIJAYEN S [US], et al) [X] 1* paragraph [0110]; figure 12 *;
 [X]US2006141367  (BAKKER LEVINUS P [NL]) [X] 1,26,32,38 * paragraphs [0041] - [0044] *;
 [A]US2007080307  (BRUIJN RENE D [DE], et al) [A] 1,26,32,38 * paragraphs [0043] - [0058] *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.