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EP2267766
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EP About this file: EP2267766
| EP2267766 - CONTROL DEVICE AND CONTROL METHOD [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 14.03.2014 Database last updated on 19.07.2024 | Most recent event Tooltip | 14.03.2014 | Application deemed to be withdrawn | published on 16.04.2014 [2014/16] | Applicant(s) | For all designated states Tokyo Electron Limited 3-1 Akasaka 5-chome Minato-ku Tokyo 107-6325 / JP | [2010/52] | Inventor(s) | 01 /
OWAKI, Ryosuke c/o TOKYO ELECTRON SOFTWARE TECHNOLOGIES LIMITED Nishi 4-chome Kita 3-jo Chuo-ku Sapporo-shi Hokkaido 060-0003 / JP | [2010/52] | Representative(s) | Manitz Finsterwald Patent- und Rechtsanwaltspartnerschaft mbB Martin-Greif-Strasse 1 80336 München / DE | [N/P] |
| Former [2010/52] | Manitz, Finsterwald & Partner GbR Martin-Greif-Strasse 1 80336 München / DE | Application number, filing date | 09721369.8 | 02.03.2009 | [2010/52] | WO2009JP53853 | Priority number, date | JP20080067486 | 17.03.2008 Original published format: JP 2008067486 | [2010/52] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2009116383 | Date: | 24.09.2009 | Language: | JA | [2009/39] | Type: | A1 Application with search report | No.: | EP2267766 | Date: | 29.12.2010 | Language: | EN | [2010/52] | Search report(s) | International search report - published on: | JP | 24.09.2009 | (Supplementary) European search report - dispatched on: | EP | 27.03.2013 | Classification | IPC: | H01L21/68, H01L21/027, H01L21/67 | [2013/17] | CPC: |
H01L21/68 (EP,KR,US);
H01L21/67706 (KR);
H01L21/0274 (KR);
H01L21/67259 (EP,KR,US);
H01L21/67276 (EP,KR,US)
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| Former IPC [2010/52] | H01L21/68, H01L21/027 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2010/52] | Title | German: | STEUEREINRICHTUNG UND STEUERVERFAHREN | [2010/52] | English: | CONTROL DEVICE AND CONTROL METHOD | [2010/52] | French: | DISPOSITIF DE COMMANDE ET PROCÉDÉ DE COMMANDE | [2010/52] | Entry into regional phase | 14.10.2010 | Translation filed | 14.10.2010 | National basic fee paid | 14.10.2010 | Search fee paid | 14.10.2010 | Designation fee(s) paid | 14.10.2010 | Examination fee paid | Examination procedure | 14.10.2010 | Examination requested [2010/52] | 19.10.2010 | Amendment by applicant (claims and/or description) | 23.10.2013 | Application deemed to be withdrawn, date of legal effect [2014/16] | 28.11.2013 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2014/16] | Fees paid | Renewal fee | 30.03.2011 | Renewal fee patent year 03 | 30.03.2012 | Renewal fee patent year 04 | 28.03.2013 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]US2004168633 (NOZAWA TOSHIHISA [JP], et al) [Y] 1-7 * abstract * * claims 1-3 * * page 3, paragraphs 52,53 * * figures 1,5-8 *; | [Y]JP2001117064 (TOKYO ELECTRON LTD) [Y] 1-7 * pages 7,8, paragraph 54 * * figure 2 *; | [Y]JP2005019963 (TOKYO ELECTRON LTD) [Y] 1-7 * page 5, paragraph 4 * * page 7, paragraph 15 * * pages 9,10, paragraphs 22,23 * * figures 1,6 * | International search | [Y]JP2001117064 (TOKYO ELECTRON LTD); | [Y]JP2005019963 (TOKYO ELECTRON LTD); | [A]JP2006123157 (NIDEC SANKYO CORP) |