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EP2299476
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EP About this file: EP2299476
| EP2299476 - METHOD AND APPARATUS FOR LASER ANNEALING [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 08.07.2016 Database last updated on 19.07.2024 | Most recent event Tooltip | 08.07.2016 | Withdrawal of application | published on 10.08.2016 [2016/32] | Applicant(s) | For all designated states IHI Corporation 1-1, Toyosu 3-chome Koto-ku Tokyo 135-8710 / JP | [N/P] |
| Former [2011/12] | For all designated states IHI Corporation 1-1, Toyosu 3-chome Koto-ku Tokyo 135-8710 / JP | Inventor(s) | 01 /
KAWAGUCHI Norihito c/o IHI Corporation 1-1, Toyosu 3-chome Koto-ku Tokyo 135-8710 / JP | 02 /
KAWAKAMI Ryusuke c/o IHI Corporation 1-1, Toyosu 3-chome Koto-ku Tokyo 135-8710 / JP | 03 /
NISHIDA Kenichiro c/o IHI Corporation 1-1, Toyosu 3-chome Koto-ku Tokyo 135-8710 / JP | 04 /
MASAKI Miyuki c/o IHI Corporation 1-1, Toyosu 3-chome Koto-ku Tokyo 135-8710 / JP | 05 /
MORITA Masaru c/o IHI Corporation 1-1, Toyosu 3-chome Koto-ku Tokyo 135-8710 / JP | [2011/12] | Representative(s) | Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstrasse 4 80802 München / DE | [N/P] |
| Former [2011/12] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Leopoldstrasse 4 80802 München / DE | Application number, filing date | 09770083.5 | 19.06.2009 | [2011/12] | WO2009JP61162 | Priority number, date | JP20080166747 | 26.06.2008 Original published format: JP 2008166747 | [2011/12] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2009157373 | Date: | 30.12.2009 | Language: | JA | [2009/53] | Type: | A1 Application with search report | No.: | EP2299476 | Date: | 23.03.2011 | Language: | EN | [2011/12] | Search report(s) | International search report - published on: | JP | 30.12.2009 | (Supplementary) European search report - dispatched on: | EP | 06.07.2011 | Classification | IPC: | H01L21/20, H01L21/268 | [2011/12] | CPC: |
H01L21/02678 (EP,KR,US);
B23K26/066 (EP,KR,US);
B23K26/0738 (EP,KR,US);
C30B1/023 (EP,KR,US);
C30B29/06 (EP,KR,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2011/12] | Title | German: | VERFAHREN UND VORRICHTUNG ZUM LASERAUSHEILEN | [2011/12] | English: | METHOD AND APPARATUS FOR LASER ANNEALING | [2011/12] | French: | PROCÉDÉ ET APPAREIL POUR RECUIT LASER | [2011/12] | Entry into regional phase | 21.12.2010 | Translation filed | 21.12.2010 | National basic fee paid | 21.12.2010 | Search fee paid | 21.12.2010 | Designation fee(s) paid | 21.12.2010 | Examination fee paid | Examination procedure | deleted | Communication of intention to grant the patent | 21.12.2010 | Examination requested [2011/12] | 06.02.2012 | Amendment by applicant (claims and/or description) | 30.06.2016 | Application withdrawn by applicant [2016/32] | Fees paid | Renewal fee | 24.06.2011 | Renewal fee patent year 03 | 31.03.2012 | Renewal fee patent year 04 | 27.06.2013 | Renewal fee patent year 05 | 31.03.2014 | Renewal fee patent year 06 | 26.06.2015 | Renewal fee patent year 07 | 31.03.2016 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]WO2006022196 (SEMICONDUCTOR ENERGY LAB [JP], et al) [A] 1-6* paragraph [0001] - paragraph [0130]; figures 1, 2A, 2B, 3, 4, 5A, 5B,20, 23-26 *; | [I]US2008118203 (TANAKA KOICHIRO [JP]) [I] 1-6 * paragraphs [0007] , [0012] - [0033] - [0108] - [0119]; figures 5,6A,6B,7,8,9,10 * | International search | [Y]JPH1116834 (MATSUSHITA ELECTRIC IND CO LTD); | [A]JP2006093677 (SEMICONDUCTOR ENERGY LAB); | [X]US2008118203 (TANAKA KOICHIRO [JP]) | by applicant | JP2000315652 | JP2005243747 |