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Extract from the Register of European Patents

EP About this file: EP2328168

EP2328168 - CHARGED PARTICLE BEAM APPARATUS AND GEOMETRIC ABERRATION MEASURING METHOD EMPLOYED THEREIN [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  04.03.2016
Database last updated on 29.06.2024
Most recent event   Tooltip22.06.2018Lapse of the patent in a contracting state
New state(s): MK		published on 25.07.2018  [2018/30]
Applicant(s)For all designated states
Hitachi High-Technologies Corporation
24-14, Nishishinbashi 1-chome
Minato-ku
Tokyo 105-8717 / JP
[2015/18]
Former [2011/22]For all designated states
Hitachi High-Technologies Corporation
24-14, Nishishinbashi 1-chome Minato-ku
Tokyo 105-8717 / JP
Inventor(s)01 / NAKANO, Tomonori
c/o Central Research Laboratory
Hitachi Ltd.
280 Higashikoigakubo 1-chome
Kokubunji-shi
Tokyo 185-8601 / JP
02 / KAWASAKI, Takeshi
c/o Central Research Laboratory
Hitachi Ltd.
280 Higashikoigakubo 1-chome
Kokubunji-shi
Tokyo 185-8601 / JP
03 / HIROSE, Kotoko
c/o Central Research Laboratory
Hitachi Ltd.
280 Higashikoigakubo 1-chome
Kokubunji-shi
Tokyo 185-8601 / JP
04 / ITO, Hiroyuki
c/o Naka Division
Hitachi High-Technologies Corporation
882 Oaza Ichige
Hitachinaka-shi
Ibaraki 312-8504 / JP
 [2015/18]
Former [2011/22]01 / NAKANO, Tomonori
c/o Central Research Laboratory Hitachi Ltd. 280 Higashikoigakubo 1-chome Kokubunji-shi
Tokyo 185-8601 / JP
02 / KAWASAKI, Takeshi
c/o Central Research Laboratory Hitachi Ltd. 280 Higashikoigakubo 1-chome Kokubunji-shi
Tokyo 185-8601 / JP
03 / HIROSE, Kotoko
c/o Central Research Laboratory Hitachi Ltd. 280 Higashikoigakubo 1-chome Kokubunji-shi
Tokyo 185-8601 / JP
04 / ITO, Hiroyuki
c/o Naka Division Hitachi High-Technologies Corporation 882 Oaza Ichige Hitachinaka-shi
Ibaraki 312-8504 / JP
Representative(s)Strehl Schübel-Hopf & Partner
Maximilianstrasse 54
80538 München / DE
[2015/18]
Former [2011/22]Strehl Schübel-Hopf & Partner
Maximilianstrasse 54
80538 München / DE
Application number, filing date09815808.205.08.2009
[2011/22]
WO2009JP03751
Priority number, dateJP2008024651425.09.2008         Original published format: JP 2008246514
[2011/22]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2010035386
Date:01.04.2010
Language:JA
[2010/13]
Type: A1 Application with search report 
No.:EP2328168
Date:01.06.2011
Language:EN
[2011/22]
Type: B1 Patent specification 
No.:EP2328168
Date:29.04.2015
Language:EN
[2015/18]
Search report(s)International search report - published on:JP01.04.2010
(Supplementary) European search report - dispatched on:EP06.12.2012
ClassificationIPC:H01J37/153, H01J37/09, H01J37/22, H01J37/21, H01J37/26
[2013/02]
CPC:
H01J37/153 (EP,US); H01J37/21 (EP,US); H01J37/26 (EP,US);
H01J2237/282 (EP,US)
Former IPC [2011/22]H01J37/153, H01J37/09, H01J37/22
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2015/18]
Former [2011/22]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  SE,  SI,  SK,  SM,  TR 
Extension statesALNot yet paid
BANot yet paid
RSNot yet paid
TitleGerman:VORRICHTUNG FÜR GELADENE TEILCHENSTRAHLEN UND DARIN ANGEWENDETES VERFAHREN ZUR MESSUNG GEOMETRISCHER ABWEICHUNGEN[2011/22]
English:CHARGED PARTICLE BEAM APPARATUS AND GEOMETRIC ABERRATION MEASURING METHOD EMPLOYED THEREIN[2011/22]
French:APPAREIL À FAISCEAU DE PARTICULES CHARGÉES ET PROCÉDÉ DE MESURE D'ABERRATION GÉOMÉTRIQUE EMPLOYÉ DANS CELUI-CI[2011/22]
Entry into regional phase11.02.2011Translation filed 
15.04.2011National basic fee paid 
15.04.2011Search fee paid 
15.04.2011Designation fee(s) paid 
15.04.2011Examination fee paid 
Examination procedure15.04.2011Examination requested  [2011/22]
10.07.2013Amendment by applicant (claims and/or description)
07.11.2014Communication of intention to grant the patent
16.03.2015Fee for grant paid
16.03.2015Fee for publishing/printing paid
16.03.2015Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  07.11.2014
Opposition(s)01.02.2016No opposition filed within time limit [2016/14]
Fees paidRenewal fee
23.08.2011Renewal fee patent year 03
28.08.2012Renewal fee patent year 04
28.08.2013Renewal fee patent year 05
28.08.2014Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU05.08.2009
AT29.04.2015
BE29.04.2015
BG29.04.2015
CY29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
IT29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
MK29.04.2015
MT29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SE29.04.2015
SI29.04.2015
SK29.04.2015
SM29.04.2015
TR29.04.2015
NO29.07.2015
GR30.07.2015
IE05.08.2015
LU05.08.2015
IS29.08.2015
CH31.08.2015
FR31.08.2015
LI31.08.2015
PT31.08.2015
[2018/30]
Former [2017/38]HU05.08.2009
AT29.04.2015
BE29.04.2015
BG29.04.2015
CY29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
IT29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
MT29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SE29.04.2015
SI29.04.2015
SK29.04.2015
SM29.04.2015
TR29.04.2015
NO29.07.2015
GR30.07.2015
IE05.08.2015
LU05.08.2015
IS29.08.2015
CH31.08.2015
FR31.08.2015
LI31.08.2015
PT31.08.2015
Former [2017/21]AT29.04.2015
BE29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
IT29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
MT29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SI29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
IE05.08.2015
LU05.08.2015
IS29.08.2015
CH31.08.2015
FR31.08.2015
LI31.08.2015
PT31.08.2015
Former [2016/36]AT29.04.2015
BE29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
IT29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SI29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
IE05.08.2015
LU05.08.2015
IS29.08.2015
CH31.08.2015
FR31.08.2015
LI31.08.2015
PT31.08.2015
Former [2016/33]AT29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
IT29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SI29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
IE05.08.2015
LU05.08.2015
IS29.08.2015
CH31.08.2015
LI31.08.2015
PT31.08.2015
Former [2016/24]AT29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
IT29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SI29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
LU05.08.2015
IS29.08.2015
CH31.08.2015
LI31.08.2015
PT31.08.2015
Former [2016/22]AT29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
IT29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
LU05.08.2015
IS29.08.2015
CH31.08.2015
LI31.08.2015
PT31.08.2015
Former [2016/21]AT29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
IT29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
LU05.08.2015
IS29.08.2015
PT31.08.2015
Former [2016/18]AT29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
LT29.04.2015
LV29.04.2015
MC29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
LU05.08.2015
IS29.08.2015
PT31.08.2015
Former [2016/17]AT29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
LT29.04.2015
LV29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
LU05.08.2015
IS29.08.2015
PT31.08.2015
Former [2016/10]AT29.04.2015
CZ29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
LT29.04.2015
LV29.04.2015
NL29.04.2015
PL29.04.2015
RO29.04.2015
SK29.04.2015
NO29.07.2015
GR30.07.2015
IS29.08.2015
PT31.08.2015
Former [2016/09]AT29.04.2015
DK29.04.2015
EE29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
LT29.04.2015
LV29.04.2015
NL29.04.2015
NO29.07.2015
GR30.07.2015
IS29.08.2015
PT31.08.2015
Former [2016/07]AT29.04.2015
DK29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
LT29.04.2015
LV29.04.2015
NL29.04.2015
NO29.07.2015
GR30.07.2015
IS29.08.2015
PT31.08.2015
Former [2015/51]AT29.04.2015
ES29.04.2015
FI29.04.2015
HR29.04.2015
LT29.04.2015
LV29.04.2015
NL29.04.2015
NO29.07.2015
GR30.07.2015
IS29.08.2015
PT31.08.2015
Former [2015/50]ES29.04.2015
FI29.04.2015
HR29.04.2015
LT29.04.2015
LV29.04.2015
NL29.04.2015
NO29.07.2015
GR30.07.2015
IS29.08.2015
PT31.08.2015
Former [2015/49]ES29.04.2015
FI29.04.2015
HR29.04.2015
LT29.04.2015
LV29.04.2015
NL29.04.2015
NO29.07.2015
GR30.07.2015
PT31.08.2015
Former [2015/42]NL29.04.2015
Documents cited:Search[A]GB2352323  (ADVANTEST CORP [JP]) [A] 1-15 * the whole document *;
 [A]US2002079448  (ISHITANI TOHRU [JP], et al) [A] 1-15* the whole document *;
 [X]US2006255269  (KAWASAKI TAKESHI [JP], et al) [X] 1-15 * abstract * * claims 1-4 * * paragraphs [0027] , [0 28]; figure 2 * * paragraphs [0005] - [0008] *
International search[A]JPH10294255  (CANON KK);
 [A]JP2005302359  (JEOL LTD);
 [A]JP2005310699  (JEOL LTD);
 [A]JP2006318774  (HITACHI HIGH TECH CORP);
 [A]JP2008159286  (HITACHI HIGH TECH CORP)
by applicantJP2005183085
 JP2006147381
 JP2006318774
 JP2008040815
    - NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH, (1995), vol. A363, pages 316 - 325
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.