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Extract from the Register of European Patents

EP About this file: EP2351062

EP2351062 - MEASUREMENT AND ENDPOINTING OF SAMPLE THICKNESS [Right-click to bookmark this link]
StatusThe application has been refused
Status updated on  16.10.2015
Database last updated on 27.07.2024
Most recent event   Tooltip16.10.2015Refusal of applicationpublished on 18.11.2015  [2015/47]
Applicant(s)For all designated states
FEI Company
5350 NE Dawson Creek Drive
Hillsboro, OR 97124 / US
[2011/31]
Inventor(s)01 / YOUNG, Richard J.
16515 Sw Peninsula Ct
Beaverton Oregon 97006 / US
02 / PETERSON, Brennan
2924 Ne 26th Ave
Portland Oregon 97214 / US
03 / MORIARTY, Michael
880 NE 25th
Suite 2 109
Hillsboro Oregon 97124 / US
04 / SCHAMPERS, Rudolf Johannes Peter Gerardus
Gelrestraat 61
NL-5951 JE Belfeld / NL
 [2011/39]
Former [2011/31]01 / YOUNG, Richard J.
16515 Sw Peninsula Ct
Beaverton Oregon 97006 / US
02 / PETERSON, Brennan
2924 Ne 26th Ave
Portland Oregon 97214 / US
03 / MORIARTY, Michael
Apt 2201 3120 Nw John Olsen Rd
Hillsboro Oregon 97124 / US
04 / SCHAMPERS, Rudolf Johannes Peter Gerardus
Gelrestraat 61
NL-5951 JE Belfeld / NL
Representative(s)Bakker, Hendrik
FEI Company
Patent Department
P.O. Box 1745
5602 BS Eindhoven / NL
[N/P]
Former [2011/31]Bakker, Hendrik
FEI Company Patent Department P.O. Box 1745
5602 BS Eindhoven / NL
Application number, filing date09824231.602.11.2009
[2011/31]
WO2009US63007
Priority number, dateUS20080110394P31.10.2008         Original published format: US 110394 P
[2011/31]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2010051546
Date:06.05.2010
Language:EN
[2010/18]
Type: A2 Application without search report 
No.:EP2351062
Date:03.08.2011
Language:EN
The application published by WIPO in one of the EPO official languages on 06.05.2010 takes the place of the publication of the European patent application.
[2011/31]
Search report(s)International search report - published on:KR05.08.2010
(Supplementary) European search report - dispatched on:EP27.09.2012
ClassificationIPC:H01J37/304, H01J37/305, G01N1/28
[2012/44]
CPC:
H01J37/3056 (EP,US); G01N1/286 (EP,US); H01J37/304 (EP,US);
H01J2237/24455 (EP,US); H01J2237/30466 (EP,US); H01J2237/31745 (EP,US);
H01J2237/31749 (EP,US) (-)
Former IPC [2011/31]H01J37/00, H01J37/26
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2011/31]
TitleGerman:MESSUNG UND ENDPUNKTBESTIMMUNG VON PROBENDICKEN[2011/31]
English:MEASUREMENT AND ENDPOINTING OF SAMPLE THICKNESS[2011/31]
French:MESURE ET DÉTECTION DU POINT LIMITE DE L'ÉPAISSEUR D'UN ÉCHANTILLON[2011/31]
Entry into regional phase28.04.2011National basic fee paid 
28.04.2011Search fee paid 
28.04.2011Designation fee(s) paid 
28.04.2011Examination fee paid 
Examination procedure28.04.2011Examination requested  [2011/31]
09.01.2012Despatch of communication of loss of particular rights: Claims {1}
10.04.2013Amendment by applicant (claims and/or description)
21.11.2013Despatch of a communication from the examining division (Time limit: M06)
21.05.2014Reply to a communication from the examining division
07.05.2015Cancellation of oral proceeding that was planned for 19.06.2015
19.06.2015Date of oral proceedings (cancelled)
30.06.2015Despatch of communication that the application is refused, reason: substantive examination [2015/47]
10.07.2015Application refused, date of legal effect [2015/47]
Divisional application(s)EP11165381.2  / EP2367195
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  21.11.2013
Request for further processing for:Loss of rights: Claims
30.01.2012Request for further processing filed
30.01.2012Full payment received (date of receipt of payment)
Request granted
15.02.2012Decision despatched
Fees paidRenewal fee
23.11.2011Renewal fee patent year 03
26.11.2012Renewal fee patent year 04
27.11.2013Renewal fee patent year 05
26.11.2014Renewal fee patent year 06
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]JPH085528  (SHARP KK) [A] 1-13,15-17* abstract *;
 [A]US5525806  (IWASAKI KOJI [JP], et al) [A] 1-13,15-17 * column 3, line 22 - column 4, line 52; figures 1, 2 * * column 5, line 48 - column 7, line 21; figure 4b *;
 [Y]US5656811  (ITOH FUMIKAZU [JP], et al) [Y] 1-8,10-13,15-17 * column col. 3, lines 44-66 * * column 9, lines 14-31; figure 12 * * column 13, line 62 - column 14, line 42; figure 25 *;
 [YA]US2006097166  (ISHITANI TOHRU [JP], et al) [Y] 9 * paragraphs [0033] - [0043]; figures 1,4,5 * [A] 1-8,10-13,15-17;
 [A]  - Ludwig Reimer, "Scanning Electron Microscopy", Scanning Electron Microscopy, Berlin Heidelberg New York Tokyo, (19850101), ISBN 978-3-54-013530-2, XP055038522 [A] 1,17 * page 301 *
 [Y]  - WEISE J, "Messung des Materialtransports in dünnen Al-Filmen mit dem Raster-Elektronenmikroskop", BEITR. ELEKTRONENMIKROSKOP. DIREKTABB. OBERFL., (1971), vol. 4, no. 2, pages 477 - 488, XP009162881 [Y] 1-13,15-17 * pages 480-483 *
International search[A]US2004129880  (OKOROANYANWU UZODINMA [US], et al);
 [A]US2005184233  (PARK GYEONG-SU [KR], et al);
 [A]US2003025087  (SCHAMBER FREDERICK [US], et al)
Examination   - "Lookup table", (20081130), URL: http://en.wikipedia.org/w/index.php?title=Lookup_table&oldid=255001897, (20131114), XP055088319
by applicantUS5656811
 US5525806
 US2006097166
 JPH085528
    - LUDWIG REIMER, SCANNING ELECTRON MICROSCOPY
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.