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EP2353176
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EP About this file: EP2353176
| EP2353176 - REACTION CHAMBER [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 12.05.2017 Database last updated on 19.10.2024 | |
| Former | Examination is in progress Status updated on 06.02.2017 | Most recent event Tooltip | 12.05.2017 | Application deemed to be withdrawn | published on 14.06.2017 [2017/24] | Applicant(s) | For all designated states ASM America, Inc. 3440 East University Drive Phoenix, AZ 85034-7200 / US | [2011/32] | Inventor(s) | 01 /
GIVENS, Michael 3527 E. Sahuaro Drive Phoenix AZ 85028 / US | 02 /
GOODMAN, Matthew, G. 4560 W. Dublin Street Chandler AZ 85226 / US | 03 /
HAWKINS, Mark 347 W. Oxford Lane Gilbert AZ 85233 / US | 04 /
HALLECK, Brad 3306 Antigua Ln SE Salem OR 97317 / US | 05 /
TERHORST, Herbert Albert Schweitzersingel 4a NL-3822 BX Amersfoort / NL | [2011/32] | Representative(s) | f & e patent Braunsberger Feld 29 51429 Bergisch Gladbach / DE | [N/P] |
| Former [2013/22] | polypatent BGL Braunsberger Feld 29 51429 Bergisch Gladbach / DE | ||
| Former [2011/32] | Fleischer, Holm Herbert Fleischer, Godemeyer, Kierdorf & Partner, Patentanwälte polypatent Braunsberger Feld 29 D-51429 Bergisch Gladbach / DE | Application number, filing date | 09825280.2 | 02.11.2009 | [2011/32] | WO2009US62974 | Priority number, date | US20080112604P | 07.11.2008 Original published format: US 112604 P | [2011/32] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2010053866 | Date: | 14.05.2010 | Language: | EN | [2010/19] | Type: | A2 Application without search report | No.: | EP2353176 | Date: | 10.08.2011 | Language: | EN | The application published by WIPO in one of the EPO official languages on 14.05.2010 takes the place of the publication of the European patent application. | [2011/32] | Search report(s) | International search report - published on: | KR | 19.08.2010 | (Supplementary) European search report - dispatched on: | EP | 25.07.2013 | Classification | IPC: | H01L21/205, H01L21/00, C23C16/455, C30B25/14, H01L21/67 | [2013/35] | CPC: |
H01L21/6719 (EP,KR,US);
C23C16/45504 (EP,KR,US);
C23C16/45589 (EP,KR,US);
C23C16/45591 (EP,KR,US)
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| Former IPC [2011/32] | H01L21/205, H01L21/00 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2011/32] | Title | German: | REAKTIONSKAMMER | [2011/32] | English: | REACTION CHAMBER | [2011/32] | French: | CHAMBRE DE RÉACTION | [2011/32] | Entry into regional phase | 20.05.2011 | National basic fee paid | 20.05.2011 | Search fee paid | 20.05.2011 | Designation fee(s) paid | 20.05.2011 | Examination fee paid | Examination procedure | 20.05.2011 | Examination requested [2011/32] | 14.02.2014 | Amendment by applicant (claims and/or description) | 30.11.2015 | Invitation to indicate the basis for amendments (Time limit: M01) | 11.12.2015 | Reply to an invitation to indicate the basis for amendments | 31.08.2016 | Despatch of a communication from the examining division (Time limit: M04) | 11.01.2017 | Application deemed to be withdrawn, date of legal effect [2017/24] | 07.02.2017 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2017/24] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 31.08.2016 | Fees paid | Renewal fee | 14.11.2011 | Renewal fee patent year 03 | 13.11.2012 | Renewal fee patent year 04 | 18.11.2013 | Renewal fee patent year 05 | 10.11.2014 | Renewal fee patent year 06 | 10.11.2015 | Renewal fee patent year 07 | 10.11.2016 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]US4846102 (OZIAS ALBERT E [US]) [X] 1,6,7 * column 8, line 38 - column 13, line 25; figures 5-10 * [I] 2-5,8-12; | [I]US5077875 (HOKE WILLIAM E [US], et al) [I] 1-12 * column 8, line 50 - column 9, line 35; figures 3, 4 *; | [A]US2002088389 (KOMMU SRIKANTH [US], et al) [A] 1-12* paragraph [0022] - paragraph [0028] * | International search | [A]JPH06302519 (KOMATSU DENSHI KINZOKU KK, et al); | [X]JPH07147236 (SONY CORP); | [A]JP2005116689 (SHARP KK) |