EP2366039 - IMPROVED SUBSTRATE TEMPERATURE CONTROL BY USING LIQUID CONTROLLED MULTIZONE SUBSTRATE SUPPORT [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 19.12.2014 Database last updated on 03.09.2024 | Most recent event Tooltip | 19.12.2014 | Application deemed to be withdrawn | published on 21.01.2015 [2015/04] | Applicant(s) | For all designated states LAM Research Corporation 4650 Cushing Parkway Fremont, CA 94538 / US | [2011/38] | Inventor(s) | 01 /
SINGH, Harmeet 759 Praderia Circle Fremont California 94539 / US | 02 /
COMENDANT, Keith 4350 Glidden Way Fremont California 94536 / US | [2011/38] | Representative(s) | Kontrus, Gerhard SEZ-Strasse 1 9500 Villach / AT | [2011/38] | Application number, filing date | 09825828.8 | 03.11.2009 | WO2009IB54876 | Priority number, date | US20080292081 | 12.11.2008 Original published format: US 292081 | [2011/38] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2010055441 | Date: | 20.05.2010 | Language: | EN | [2010/20] | Type: | A2 Application without search report | No.: | EP2366039 | Date: | 21.09.2011 | Language: | EN | The application published by WIPO in one of the EPO official languages on 20.05.2010 takes the place of the publication of the European patent application. | [2011/38] | Search report(s) | International search report - published on: | KR | 08.07.2010 | (Supplementary) European search report - dispatched on: | EP | 21.08.2013 | Classification | IPC: | C23C16/50, C23C16/46, H01L21/67, H01L21/683, C23C16/52, C23C16/458 | [2013/38] | CPC: |
H01L21/67248 (EP,KR,US);
C23C16/4586 (EP,KR,US);
C23C14/50 (CN);
C23C14/3471 (KR);
C23C16/46 (EP,CN,KR,US);
C23C16/463 (EP,KR,US);
C23C16/50 (EP,KR,US);
C23C16/52 (EP,KR,US);
H01L21/67109 (EP,KR,US);
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Former IPC [2011/38] | C23C14/50, C23C16/46 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR | Title | German: | VERBESSERTE SUBSTRATTEMPERATURSTEUERUNG DURCH VERWENDUNG VON FLÜSSIGKEITSGESTEUERTEM MULTIZONENSUBSTRATTRÄGER | [2011/38] | English: | IMPROVED SUBSTRATE TEMPERATURE CONTROL BY USING LIQUID CONTROLLED MULTIZONE SUBSTRATE SUPPORT | [2011/38] | French: | COMMANDE DE TEMPÉRATURE À SUBSTRAT AMÉLIORÉ PAR L UTILISATION DE SUPPORT DE SUBSTRAT À ZONES MULTIPLES CONTRÔLÉES | [2011/38] | Entry into regional phase | 14.06.2011 | National basic fee paid | 14.06.2011 | Search fee paid | 14.06.2011 | Designation fee(s) paid | 07.04.2011 | Examination fee paid | Examination procedure | 07.04.2011 | Amendment by applicant (claims and/or description) | 07.04.2011 | Examination requested [2011/38] | 01.04.2014 | Despatch of a communication from the examining division (Time limit: M04) | 12.08.2014 | Application deemed to be withdrawn, date of legal effect [2015/04] | 12.09.2014 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2015/04] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 01.04.2014 | Fees paid | Renewal fee | 23.11.2011 | Renewal fee patent year 03 | 26.11.2012 | Renewal fee patent year 04 | 02.12.2013 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [YA]US2004163601 (KADOTANI MASANORI [JP], et al) [Y] 1-13 * paragraph [0066] - paragraph [0068]; figure 2a * [A] 14; | [YA]US5802856 (SCHAPER CHARLES D [US], et al) [Y] 1-13 * column 7, line 3 - line 5; figure 5 * [A] 14; | [XA]JP2002076103 (HITACHI LTD, et al) [X] 14,15 * abstract * [A] 1,7,10; | [XA]US2006219360 (IWASAKI MASAHIDE [JP]) [X] 14,15 * paragraph [0092] - paragraph [0094]; figure 1 * [A] 1,7,10; | [A]JPH11329926 (DAINIPPON SCREEN MFG) [A] 1,7,10,14 * abstract *; | [A]JPH0863236 (KOMATSU ELECTRONICS) [A] 1,7,10,14 * abstract * | International search | [A]US2004187787 (DAWSON KEITH E [US], et al); | [A]US2008029032 (SUN JENNIFER Y [US], et al); | [A]JPH0718438 (ANELVA CORP); | [A]US2004261721 (STEGER ROBERT J [US]); | [A]JP2000031253 (KOMATSU MFG CO LTD) |