EP2357661 - EPITAXIAL SUBSTRATE FOR ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF [Right-click to bookmark this link] | Status | The application has been refused Status updated on 06.03.2015 Database last updated on 12.07.2024 | Most recent event Tooltip | 06.03.2015 | Refusal of application | published on 08.04.2015 [2015/15] | Applicant(s) | For all designated states DOWA Electronics Materials Co., Ltd. 4-14-1, Soto-Kanda Chiyoda-ku Tokyo 101-0021 / JP | [2011/33] | Inventor(s) | 01 /
IKUTA, Tetsuya c/o DOWA Electronics Materials Co. Ltd. 4-14-1 Sotokanda Chiyoda-ku Tokyo 101-0021 / JP | 02 /
SHIMIZU, Jo c/o DOWA Electronics Materials Co. Ltd. 4-14-1 Sotokanda Chiyoda-ku Tokyo 101-0021 / JP | 03 /
SHIBATA, Tomohiko c/o DOWA Electronics Materials Co. Ltd. 4-14-1 Sotokanda Chiyoda-ku Tokyo 101-0021 / JP | [2011/33] | Representative(s) | Müller-Boré & Partner Patentanwälte PartG mbB Friedenheimer Brücke 21 80639 München / DE | [N/P] |
Former [2014/11] | Müller-Boré & Partner Patentanwälte PartG mbB Friedenheimer Brücke 21 80639 München / DE | ||
Former [2011/33] | Perrey, Ralf Müller-Boré & Partner Grafinger Strasse 2 D-81671 München / DE | Application number, filing date | 09829111.5 | 18.11.2009 | [2011/33] | WO2009JP69896 | Priority number, date | JP20080302620 | 27.11.2008 Original published format: JP 2008302620 | JP20090260014 | 13.11.2009 Original published format: JP 2009260014 | [2011/33] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2010061865 | Date: | 03.06.2010 | Language: | JA | [2010/22] | Type: | A1 Application with search report | No.: | EP2357661 | Date: | 17.08.2011 | Language: | EN | [2011/33] | Search report(s) | International search report - published on: | JP | 03.06.2010 | (Supplementary) European search report - dispatched on: | EP | 19.09.2012 | Classification | IPC: | H01L21/20, H01L21/205, H01L21/338, H01L29/778, H01L29/812, H01L29/737, H01L21/02, H01L29/66 | [2012/42] | CPC: |
H01L21/0254 (EP,KR,US);
H01L21/02381 (EP,KR,US);
H01L21/02458 (EP,US);
H01L21/02505 (EP,US);
H01L21/02507 (EP,KR,US);
H01L29/66462 (EP,KR,US);
|
Former IPC [2011/33] | H01L21/20, H01L21/205, H01L21/338, H01L29/778, H01L29/812 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2011/33] | Title | German: | EPITAKTISCHES SUBSTRAT FÜR EINE ELEKTRONISCHE VORRICHTUNG UND HERSTELLUNGSVERFAHREN DAFÜR | [2011/33] | English: | EPITAXIAL SUBSTRATE FOR ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF | [2011/33] | French: | SUBSTRAT ÉPITAXIAL POUR DISPOSITIF ÉLECTRONIQUE ET SON PROCÉDÉ DE FABRICATION | [2011/33] | Entry into regional phase | 27.05.2011 | Translation filed | 01.06.2011 | National basic fee paid | 01.06.2011 | Search fee paid | 01.06.2011 | Designation fee(s) paid | 01.06.2011 | Examination fee paid | Examination procedure | 01.06.2011 | Examination requested [2011/33] | 19.03.2013 | Amendment by applicant (claims and/or description) | 23.04.2013 | Despatch of a communication from the examining division (Time limit: M04) | 20.08.2013 | Reply to a communication from the examining division | 10.10.2013 | Despatch of a communication from the examining division (Time limit: M02) | 10.12.2013 | Reply to a communication from the examining division | 27.06.2014 | Cancellation of oral proceeding that was planned for 01.07.2014 | 01.07.2014 | Date of oral proceedings (cancelled) | 19.09.2014 | Application refused, date of legal effect [2015/15] | 19.09.2014 | Date of oral proceedings | 07.11.2014 | Minutes of oral proceedings despatched | 13.11.2014 | Despatch of communication that the application is refused, reason: substantive examination [2015/15] | Divisional application(s) | EP13001425.1 / EP2613341 | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 23.04.2013 | Fees paid | Renewal fee | 29.11.2011 | Renewal fee patent year 03 | 28.11.2012 | Renewal fee patent year 04 | 28.11.2013 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 30.11.2014 | 06   M06   Not yet paid |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XA]US2005118752 (OTSUKA KOJI [JP], et al) [X] 1,4-9 * paragraph [0026] - paragraph [0053] * * paragraph [0111] - paragraph [0113] * * figures 1, 11 * [A] 2,3; | [XA]US2007210329 (GOTO HIROKAZU [JP]) [X] 1,4-9 * paragraph [0025] - paragraph [0059] * * figures 1, 3 * [A] 2,3; | [A]US2008203382 (YANAGIHARA MASATAKA [JP]) [A] 1-9 * paragraph [0034] - paragraph [0122] * * figures 4, 6 *; | [A] - TOMOYA SUGAHARA ET AL, "Role of AlN/GaN Multilayer in Crack-Free GaN Layer Growth on 5"[phi] Si (111) Substrate", JAPANESE JOURNAL OF APPLIED PHYSICS, (20041201), vol. 43, No. 12B, doi:10.1143/JJAP.43.L1595, ISSN 0021-4922, pages 1595 - 1597, XP055037579 [A] 1-9 * the whole document * DOI: http://dx.doi.org/10.1143/JJAP.43.L1595 | International search | [A]JP2005159207 (SANKEN ELECTRIC CO LTD); | [A]JP2005158846 (SANKEN ELECTRIC CO LTD); | [A]JP2007273814 (FURUKAWA ELECTRIC CO LTD); | [A]JP2008251704 (FURUKAWA ELECTRIC CO LTD) | Examination | - SEMI MF1451-92, 3081 ZANKER ROAD, SAN JOSE, CA 95134, USA, (2003), pages 1 - 15, XP040450901 | - SEMI MF534-0707, 3081 ZANKER ROAD, SAN JOSE, CA 95134, USA, (2007), pages 1 - 5, XP040459992 | - NATSU W ET AL, "Effects of support method and mechanical property of 300mm silicon wafer on sori measurement", PRECISION ENGINEERING, ELSEVIER, AMSTERDAM, NL, vol. 29, no. 1, ISSN 0141-6359, (20050101), pages 19 - 26, (20050101), XP027766645 | - SEMI M1-0302, 3081 ZANKER ROAD, SAN JOSE, CA 95134, USA, (2002), pages 1 - 27, XP040448387 | by applicant | JPH06112120 | JP2003059948 | JP2008522447 |