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Extract from the Register of European Patents

EP About this file: EP2356672

EP2356672 - CHEMICAL VAPOR DEPOSITION FLOW INLET ELEMENTS [Right-click to bookmark this link]
Former [2011/33]CHEMICAL VAPOR DEPOSITION FLOW INLET ELEMENTS AND METHODS
[2018/13]
StatusNo opposition filed within time limit
Status updated on  19.07.2019
Database last updated on 15.06.2024
FormerThe patent has been granted
Status updated on  10.08.2018
FormerGrant of patent is intended
Status updated on  25.03.2018
Most recent event   Tooltip03.07.2020Lapse of the patent in a contracting state
New state(s): CY, MK		published on 05.08.2020  [2020/32]
Applicant(s)For all designated states
Veeco Instruments Inc.
Terminal Drive
Plainview, NY 11803 / US
[2011/33]
Inventor(s)01 / BELOUSOV, Mikhail
16 Gulick Lane
Plainsboro NJ 08536 / US
02 / MITROVIC, Bojan
57 Freemont Court
Somerset NJ 08873 / US
03 / MOY, Keng
24 Cedar Creek Drive
Basking Ridge NJ 07920 / US
 [2011/33]
Representative(s)Hamer, Christopher K., et al
Mathys & Squire The Shard
32 London Bridge Street
London SE1 9SG / GB
[N/P]
Former [2018/37]Hamer, Christopher K., et al
Mathys & Squire LLP The Shard
32 London Bridge Street
London SE1 9SG / GB
Former [2011/33]Hamer, Christopher K., et al
Mathys & Squire LLP 120 Holborn London
EC1N 2SQ / GB
Application number, filing date09831089.903.12.2009
[2011/33]
WO2009US66502
Priority number, dateUS20080201074P04.12.2008         Original published format: US 201074 P
[2011/33]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2010065695
Date:10.06.2010
Language:EN
[2010/23]
Type: A2 Application without search report 
No.:EP2356672
Date:17.08.2011
Language:EN
The application published by WIPO in one of the EPO official languages on 10.06.2010 takes the place of the publication of the European patent application.
[2011/33]
Type: B1 Patent specification 
No.:EP2356672
Date:12.09.2018
Language:EN
[2018/37]
Search report(s)International search report - published on:KR10.09.2010
(Supplementary) European search report - dispatched on:EP15.12.2016
ClassificationIPC:H01L21/205, C23C16/455, C23C16/458
[2016/39]
CPC:
C23C16/45574 (EP,KR,US); C30B25/14 (US); C23C16/45578 (EP,KR,US);
C23C16/4584 (EP,KR,US)
Former IPC [2011/33]H01L21/205, C23C16/455
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2018/37]
Former [2011/33]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  SE,  SI,  SK,  SM,  TR 
Extension statesALNot yet paid
BANot yet paid
RSNot yet paid
TitleGerman:STRÖMUNGSEINLASSELEMENTE FÜR CHEMISCHE GASPHASENABSCHEIDUNG[2018/13]
English:CHEMICAL VAPOR DEPOSITION FLOW INLET ELEMENTS[2018/13]
French:ÉLÉMENTS D'ENTRÉE D'ÉCOULEMENT DE DÉPÔT CHIMIQUE EN PHASE VAPEUR[2018/13]
Former [2011/33]STRÖMUNGSEINLASSELEMENTE UND VERFAHREN FÜR CHEMISCHE GASPHASENABSCHEIDUNG
Former [2011/33]CHEMICAL VAPOR DEPOSITION FLOW INLET ELEMENTS AND METHODS
Former [2011/33]ÉLÉMENTS D'ENTRÉE D'ÉCOULEMENT DE DÉPÔT CHIMIQUE EN PHASE VAPEUR ET PROCÉDÉS CORRESPONDANTS
Entry into regional phase01.06.2011National basic fee paid 
01.06.2011Search fee paid 
01.06.2011Designation fee(s) paid 
01.06.2011Examination fee paid 
Examination procedure01.06.2011Examination requested  [2011/33]
16.02.2017Amendment by applicant (claims and/or description)
26.03.2018Communication of intention to grant the patent
02.08.2018Fee for grant paid
02.08.2018Fee for publishing/printing paid
02.08.2018Receipt of the translation of the claim(s)
Divisional application(s)EP18193544.6  / EP3483919
EP18193548.7  / EP3471130
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  26.03.2018
Opposition(s)13.06.2019No opposition filed within time limit [2019/34]
Fees paidRenewal fee
07.12.2011Renewal fee patent year 03
07.12.2012Renewal fee patent year 04
06.12.2013Renewal fee patent year 05
05.12.2014Renewal fee patent year 06
07.12.2015Renewal fee patent year 07
08.12.2016Renewal fee patent year 08
27.12.2017Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU03.12.2009
AT12.09.2018
CY12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
MC12.09.2018
MK12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
TR12.09.2018
LU03.12.2018
MT03.12.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
BE31.12.2018
CH31.12.2018
LI31.12.2018
IS12.01.2019
PT12.01.2019
[2020/31]
Former [2020/30]HU03.12.2009
AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
MC12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
TR12.09.2018
LU03.12.2018
MT03.12.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
BE31.12.2018
CH31.12.2018
LI31.12.2018
IS12.01.2019
PT12.01.2019
Former [2020/17]AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
MC12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
TR12.09.2018
LU03.12.2018
MT03.12.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
BE31.12.2018
CH31.12.2018
LI31.12.2018
IS12.01.2019
PT12.01.2019
Former [2020/08]AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
MC12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
LU03.12.2018
MT03.12.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
BE31.12.2018
CH31.12.2018
LI31.12.2018
IS12.01.2019
PT12.01.2019
Former [2020/04]AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
MC12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
LU03.12.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
BE31.12.2018
CH31.12.2018
LI31.12.2018
IS12.01.2019
PT12.01.2019
Former [2019/51]AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
MC12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
LU03.12.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
BE31.12.2018
IS12.01.2019
PT12.01.2019
Former [2019/40]AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
MC12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
LU03.12.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
IS12.01.2019
PT12.01.2019
Former [2019/39]AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
LU03.12.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
IS12.01.2019
PT12.01.2019
Former [2019/37]AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SI12.09.2018
SK12.09.2018
SM12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
IS12.01.2019
PT12.01.2019
Former [2019/34]AT12.09.2018
CZ12.09.2018
DK12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SK12.09.2018
SM12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
IS12.01.2019
PT12.01.2019
Former [2019/26]AT12.09.2018
CZ12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SK12.09.2018
SM12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
IS12.01.2019
PT12.01.2019
Former [2019/23]AT12.09.2018
CZ12.09.2018
EE12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
SK12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
IS12.01.2019
Former [2019/22]CZ12.09.2018
ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
NL12.09.2018
PL12.09.2018
RO12.09.2018
SE12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
IS12.01.2019
Former [2019/21]ES12.09.2018
FI12.09.2018
HR12.09.2018
IT12.09.2018
LT12.09.2018
LV12.09.2018
NL12.09.2018
SE12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
IS12.01.2019
Former [2019/20]ES12.09.2018
FI12.09.2018
HR12.09.2018
LT12.09.2018
LV12.09.2018
NL12.09.2018
SE12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
Former [2019/12]ES12.09.2018
FI12.09.2018
HR12.09.2018
LT12.09.2018
LV12.09.2018
SE12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
Former [2019/11]FI12.09.2018
HR12.09.2018
LT12.09.2018
SE12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
Former [2019/10]FI12.09.2018
LT12.09.2018
SE12.09.2018
BG12.12.2018
NO12.12.2018
GR13.12.2018
Former [2019/08]FI12.09.2018
LT12.09.2018
NO12.12.2018
Former [2019/07]LT12.09.2018
Documents cited:Search[XA]US4446815  (KALBSKOPF REINHARD [CH], et al) [X] 6 * column 7 - column 8; figures 2, 3; claim 1 *[A] 7-11;
 [X]US2004067641  (YUDOVSKY JOSEPH [US]) [X] 1-5 * the whole document *;
 [XA]US2008173735  (MITROVIC BOJAN [US], et al) [X] 12-14 * paragraph [0031] - paragraph [0034]; figures 5, 6; claims 1-5 * * paragraph [0043] * [A] 6-11,15;
 [X]US2008182358  (COWDERY-CORVAN PETER J [US], et al) [X] 1-5 * paragraph [0142]; figures 3-4, 19; claims 1, 9 *
International search[A]US6161500  (KOPACZ STANISLAW [US], et al);
 [A]JP2003253431  (ULVAC CORP);
 [A]KR20080029198  (LEED CO LTD [KR])
by applicantUS4446815
 US2004067641
 US2006021574
 US2008173735
 US2008182358
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.