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EP2360290
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EP About this file: EP2360290
| EP2360290 - Method for producing an ITO layer and sputtering system [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 10.05.2013 Database last updated on 16.07.2024 | Most recent event Tooltip | 10.05.2013 | Application deemed to be withdrawn | published on 12.06.2013 [2013/24] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [2011/34] | Inventor(s) | 01 /
Hellmich, Anke Bergwerkstrasse 2 63796 Kahl / DE | 02 /
Schnappenberger, Frank In der Doerrwies 34 55218 Ingelheim / DE | 03 /
Krempel-Hesse, Joerg An der Pfingstweide 1 63694 Limeshain / DE | [2011/34] | Representative(s) | Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE | [N/P] |
| Former [2011/34] | Zimmermann & Partner Postfach 330 920 80069 München / DE | Application number, filing date | 10153359.4 | 11.02.2010 | [2011/34] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2360290 | Date: | 24.08.2011 | Language: | EN | [2011/34] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 22.07.2010 | Classification | IPC: | C23C14/08, C23C14/34, C23C14/35 | [2011/34] | CPC: |
C23C14/086 (EP,US);
C23C14/3407 (EP,US);
C23C14/3421 (EP,US);
C23C14/35 (EP,US);
H01J37/3405 (EP,US);
H01J37/342 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2011/34] | Title | German: | Verfahren zur Herstellung einer ITO-Schicht und Sputtersystem | [2011/34] | English: | Method for producing an ITO layer and sputtering system | [2011/34] | French: | Procédé de production d'une couche ITO et système de pulvérisation | [2011/34] | Examination procedure | 24.02.2012 | Amendment by applicant (claims and/or description) | 24.02.2012 | Examination requested [2012/14] | 08.08.2012 | Despatch of a communication from the examining division (Time limit: M04) | 19.12.2012 | Application deemed to be withdrawn, date of legal effect [2013/24] | 24.01.2013 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2013/24] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 08.08.2012 | Fees paid | Renewal fee | 22.02.2012 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 28.02.2013 | 04 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]WO2009129115 (ANGSTROM SCIENCES INC [US], et al) [Y] 1-15 * paragraphs [0027] - [0042]; example 1 *; | [Y]US2003134149 (MIYASHITA TAKEHIRO [JP], et al) [Y] 1-9 * paragraph [36 51]; example 1 *; | [Y]DE4106771 (LEYBOLD AG [DE]) [Y] 10-15 * column 1, line 45 - column 3, line 7 * |