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Extract from the Register of European Patents

EP About this file: EP2302360

EP2302360 - Method and apparatus for reconstruction of microscopic structures [Right-click to bookmark this link]
Former [2011/13]Methods and apparatus for modeling electromagnetic scattering properties of microscopic structures and methods and apparatus for reconstruction of microscopic structures
[2012/31]
StatusNo opposition filed within time limit
Status updated on  29.11.2013
Database last updated on 22.05.2024
Most recent event   Tooltip12.10.2018Lapse of the patent in a contracting state
New state(s): AL		published on 14.11.2018  [2018/46]
Applicant(s)For all designated states
ASML Netherlands B.V.
De Run 6501
5504 DR Veldhoven / NL
[2011/13]
Inventor(s)01 / Van Beurden, Martijn
Stevinstraat 9
5621 GH Eindhoven / NL
 [2011/13]
Representative(s)van de Ven, Jan-Piet, et al
ASML Netherlands B.V.
Corporate Intellectual Property
De Run 6501
P.O. Box 324
5500 AH Veldhoven / NL
[N/P]
Former [2012/52]van de Ven, Jan-Piet, et al
ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
Former [2011/13]van de Ven, Jan-Piet
ASML Netherlands B.V. De Run 6501
5504 DR Veldhoven / NL
Application number, filing date10175689.808.09.2010
[2011/13]
Priority number, dateUS20090245546P24.09.2009         Original published format: US 245546 P
[2011/13]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2302360
Date:30.03.2011
Language:EN
[2011/13]
Type: A3 Search report 
No.:EP2302360
Date:04.05.2011
[2011/18]
Type: B1 Patent specification 
No.:EP2302360
Date:23.01.2013
Language:EN
[2013/04]
Search report(s)(Supplementary) European search report - dispatched on:EP06.04.2011
ClassificationIPC:G01N21/47, G01N21/956, G03F7/20
[2011/13]
CPC:
G03F7/705 (EP,US); G03F7/70625 (EP,US); G01B2210/56 (EP,US);
G01N21/9501 (EP,US); G01N21/95607 (EP,US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2011/13]
TitleGerman:Verfahren und Vorrichtung zur Rekonstruktion mikroskopischer Strukturen[2012/31]
English:Method and apparatus for reconstruction of microscopic structures[2012/31]
French:Procédés et appareils pour la reconstruction de structures microscopiques[2012/31]
Former [2011/13]Verfahren und Vorrichtung zur Simulation elektromagnetischer Streuungseigenschaften mikroskopischer Strukturen und Verfahren und Vorrichtung zur Rekonstruktion mikroskopischer Strukturen
Former [2011/13]Methods and apparatus for modeling electromagnetic scattering properties of microscopic structures and methods and apparatus for reconstruction of microscopic structures
Former [2011/13]Procédés et appareil pour modeler les propriétés de diffusion électromagnétique de structures microscopiques, procédés et appareils pour la reconstruction de structures microscopiques
Examination procedure23.08.2011Examination requested  [2011/40]
12.12.2011Despatch of communication that the application is deemed to be withdrawn, reason: reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report not received in time
14.02.2012Amendment by applicant (claims and/or description)
25.04.2012Despatch of a communication from the examining division (Time limit: M02)
14.06.2012Reply to a communication from the examining division
23.08.2012Communication of intention to grant the patent
14.12.2012Fee for grant paid
14.12.2012Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  25.04.2012
Opposition(s)24.10.2013No opposition filed within time limit [2014/01]
Request for further processing for:The application is deemed to be withdrawn due to failure to reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report/Supplementary European search report
14.02.2012Request for further processing filed
14.02.2012Full payment received (date of receipt of payment)
Request granted
27.02.2012Decision despatched
Fees paidRenewal fee
20.09.2012Renewal fee patent year 03
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Lapses during opposition  TooltipHU08.09.2010
AL23.01.2013
AT23.01.2013
BE23.01.2013
CY23.01.2013
CZ23.01.2013
DK23.01.2013
EE23.01.2013
FI23.01.2013
HR23.01.2013
IT23.01.2013
LT23.01.2013
LV23.01.2013
MC23.01.2013
MK23.01.2013
MT23.01.2013
NL23.01.2013
PL23.01.2013
RO23.01.2013
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SK23.01.2013
SM23.01.2013
TR23.01.2013
BG23.04.2013
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GR24.04.2013
ES04.05.2013
IS23.05.2013
PT23.05.2013
IE08.09.2013
LU08.09.2013
[2018/46]
Former [2015/34]HU08.09.2010
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IE08.09.2013
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BG23.04.2013
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ES04.05.2013
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IE08.09.2013
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BG23.04.2013
NO23.04.2013
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ES04.05.2013
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PT23.05.2013
IE08.09.2013
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Former [2013/33]LT23.01.2013
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Documents cited:Search[AD]US6867866  (CHANG YIA CHUNG [US], et al) [AD] 19-21,48* the whole document *;
 [A]US2008069430  (SETIJA IRWAN DANI [NL], et al) [A] 19-21,48 * the whole document *;
 [A]  - RAFLER S ET AL, "Investigation of methods to set up the normal vector field for the differential method", OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY II. PROCEEDINGS OF THE SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE - USA, (20080425), vol. 6995, ISSN 0277-786X, pages 1 - 9, XP002619830 [A] 19-21,48 * the whole document *

DOI:   http://dx.doi.org/10.1117/12.780482
 [A]  - MELISEW TEFERA BELACHEW, "Preconditioning Dense Complex Linear Systems from a VIM Discretization", THESIS TECHNISCHE UNIVERSITEIT EINDHOVEN,, (20090801), pages 1 - 93, XP007916546 [A] 19-21,48 * the whole document *
 [AD]  - CHANG Y-C ET AL, "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films", JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A: OPTICS AND IMAGE SCIENCE, AND VISION, OPTICAL SOCIETY OF AMERICA US, (20060301), vol. 23, no. 3, pages 638 - 645, XP002619829 [AD] 19-21 * the whole document *
by applicantUS6867866
 EP1628164
 US7038850
    - "Electromagnetic modelling of antennas mounted on a bandgap slab - discretisation issues and domain and boundary integral equations", M. C. VAN BEURDEN; B. P. DE HON, Proceedings of the International Conference on Electromagnetics in Advanced Applications ICEAA '03, (2003), pages 637 - 640
    - YIA-CHUNG CHANG; GUANGWEI LI; HANYOU CHU; JON OPSAL, "Efficient finite- element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films", J. OPT. SOC. AM. A, (200603), vol. 23, no. 3, pages 638 - 6454
    - LIFENG LI, "Use of Fourier series in the analysis of discontinuous periodic structures", J. OPT. SOC. AM. A, (199609), vol. 13, no. 9, pages 1870 - 1876
    - LIFENG LI, "New formulation of the Fourier modal method for crossed surface- relief gratings", J. OPT. SOC. AM. A, (199710), vol. 14, no. 10, pages 2758 - 2767
    - PHILIPPE LALANNE, "Improved formulation of the coupled-wave method for two-dimensional gratings", J. OPT. SOC. AM. A, (199707), vol. 14, no. 7, pages 1592 - 1598
    - EVGENY POPOV; MICHEL NEVIèRE, "Maxwell equations in Fourier space: fast- converging formulation for diffraction by arbitrary shaped, periodic, anisotropic media", J. OPT. SOC. AM. A, (200111), vol. 18, no. 11, pages 2886 - 2894
    - THOMAS SCHUSTER; JOHANNES RUOFF; NORBERT KERWIEN; STEPHAN RAFLER; WOLFGANG OSTEN, "Normal vector method for convergence improvement using the RCWA for crossed gratings", J. OPT. SOC. AM. A, (200709), vol. 24, no. 9, page 2880
    - PETER GOTZ; THOMAS SCHUSTER; KARSTEN FRENNER; STEPHAN RAFLER; WOLFGANG OSTEN, "Normal vector method for the RCWA with automated vector field generation", OPTICS EXPRESS, (200810), vol. 16, no. 22, pages 17295 - 17301
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