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EP2267535
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EP About this file: EP2267535
| EP2267535 - Lithographic apparatus and device manufacturing method [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 02.12.2011 Database last updated on 08.06.2024 | Most recent event Tooltip | 02.12.2011 | Application deemed to be withdrawn | published on 04.01.2012 [2012/01] | Applicant(s) | For all designated states ASML Netherlands BV De Run 6501 5504 DR Veldhoven / NL | [2010/52] | Inventor(s) | 01 /
Ottens, Joost Dotterbeek 37 5501 BG Veldhoven / NL | 02 /
Zaal, Koen St. Catharinastraat 53 5611 JB Eindhoven / NL | [2010/52] | Representative(s) | Slenders, Petrus Johannes Waltherus ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2010/52] | Slenders, Petrus J. W. ASML Netherlands B.V. De Run 6504 5504 DR Veldhoven / NL | Application number, filing date | 10179219.0 | 25.10.2004 | [2010/52] | Priority number, date | US20030735848 | 16.12.2003 Original published format: US 735848 | EP20030078504 | 05.11.2003 Original published format: EP 03078504 | [2010/52] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2267535 | Date: | 29.12.2010 | Language: | EN | [2010/52] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 11.11.2010 | Classification | IPC: | G03F7/20 | [2010/52] | CPC: |
G03F7/707 (EP,KR,US);
G03F7/70783 (EP,KR,US);
G03F7/70708 (EP,KR,US);
G03F7/70875 (EP,KR,US);
H01L21/67103 (KR)
| Designated contracting states | DE, FR, GB, IT, NL [2010/52] | Title | German: | Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung | [2010/52] | English: | Lithographic apparatus and device manufacturing method | [2010/52] | French: | Appareil lithographique et procédé de fabrication d'un dispositif | [2010/52] | Examination procedure | 24.09.2010 | Examination requested [2010/52] | 30.06.2011 | Application deemed to be withdrawn, date of legal effect [2012/01] | 11.08.2011 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2012/01] | Parent application(s) Tooltip | EP04077936.5 / EP1530089 | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20040077936) is 21.09.2005 | Fees paid | Renewal fee | 24.09.2010 | Renewal fee patent year 03 | 24.09.2010 | Renewal fee patent year 04 | 24.09.2010 | Renewal fee patent year 05 | 24.09.2010 | Renewal fee patent year 06 | 24.09.2010 | Renewal fee patent year 07 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]WO0041875 (EUV LLC [US], et al) [A] 1,11 * abstract * * figure 2 * * page 12, line 16 - page 13, line 7 * * page 14, line 6 - line 14 ** page 15, line 16 - line 26 *; | [A]GB2358955 (ADVANTEST CORP [JP]) [A] 1,11 * abstract * * figure 2 * * page 1, line 5 - line 11 * * page 9, line 18 - line 28 * * page 11, line 21 - line 23 *; | [X]EP1241706 (NIKON CORP [JP]) [X] 1-7,9-11 * abstract * * figures 1-,5 * * paragraphs [0017] , [0019] , [0020] , [0022] , [0024] , [0025] , [0029] * | by applicant | EP0947884 | EP1241706 |