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EP2280093
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EP About this file: EP2280093
| EP2280093 - Method of manufacturing enhanced finish sputtering targets [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 24.01.2014 Database last updated on 20.11.2024 | Most recent event Tooltip | 24.01.2014 | Application deemed to be withdrawn | published on 26.02.2014 [2014/09] | Applicant(s) | For all designated states Praxair S.T. Technology, Inc. 441 Sackett Point Road North Haven, CT 06473 / US | [2011/05] | Inventor(s) | 01 /
Joyce, James, Eliott 35 Tarleton Road Bedford, NY 10506 / US | 02 /
Hunt, Thomas, John 891 Lockwood Drive Peekskill, NY 10566 / US | 03 /
Gilman, Paul, Sanford 5 Marget Ann Lane Suffern, NY 10566 / US | [2011/05] | Representative(s) | Schwan Schorer & Partner mbB Patentanwälte Bauerstraße 22 80796 München / DE | [N/P] |
| Former [2011/05] | Schwan - Schwan - Schorer Patentanwälte Bauerstrasse 22 80796 München / DE | Application number, filing date | 10185974.2 | 02.09.1999 | [2011/05] | Priority number, date | US19980146600 | 03.09.1998 Original published format: US 146600 | [2011/05] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2280093 | Date: | 02.02.2011 | Language: | EN | [2011/05] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 06.12.2010 | Classification | IPC: | C23C14/34, C23F3/00, C23F1/16 | [2011/05] | CPC: |
C23C14/3414 (EP,KR,US);
C23F1/26 (EP,KR,US);
Y10T428/12472 (EP,US);
Y10T428/12993 (EP,US);
Y10T428/24355 (EP,US)
| Designated contracting states | DE, FR, IE, IT, NL [2011/05] | Title | German: | Herstellungsverfahren eines Targets zum Sputtern mit aufgebesserter Vorbehandlung | [2011/05] | English: | Method of manufacturing enhanced finish sputtering targets | [2011/05] | French: | Procédé de fabrication de cibles de pulverisation avec meilleur fini | [2011/05] | Examination procedure | 18.03.2011 | Request for decision received: Various | 03.08.2011 | Application deemed to be withdrawn, date of legal effect [2014/09] | 27.02.2012 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2014/09] | 02.03.2012 | Result of request for decision (Various): Request rejected | Appeal following examination | 23.04.2012 | Appeal received No. J0014/12 | 29.06.2012 | Statement of grounds filed | Parent application(s) Tooltip | EP99968653.8 / EP1115584 | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP19990968653) is 23.07.2003 | Fees paid | Renewal fee | 14.03.2011 | Renewal fee patent year 03 | 14.03.2011 | Renewal fee patent year 04 | 14.03.2011 | Renewal fee patent year 05 | 14.03.2011 | Renewal fee patent year 06 | 14.03.2011 | Renewal fee patent year 07 | 14.03.2011 | Renewal fee patent year 08 | 14.03.2011 | Renewal fee patent year 09 | 14.03.2011 | Renewal fee patent year 10 | 14.03.2011 | Renewal fee patent year 11 | 14.03.2011 | Renewal fee patent year 12 | 25.01.2012 | Renewal fee patent year 13 | Penalty fee | Additional fee for renewal fee | 01.10.2010 | 03 M06 Fee paid on 14.03.2011 | 01.10.2010 | 04 M06 Fee paid on 14.03.2011 | 01.10.2010 | 05 M06 Fee paid on 14.03.2011 | 01.10.2010 | 06 M06 Fee paid on 14.03.2011 | 01.10.2010 | 07 M06 Fee paid on 14.03.2011 | 01.10.2010 | 08 M06 Fee paid on 14.03.2011 | 01.10.2010 | 09 M06 Fee paid on 14.03.2011 | 01.10.2010 | 10 M06 Fee paid on 14.03.2011 | 01.10.2010 | 11 M06 Fee paid on 14.03.2011 | 01.10.2010 | 12 M06 Fee paid on 14.03.2011 | 30.09.2011 | 13 M06 Fee paid on 25.01.2012 | 30.09.2012 | 14 M06 Not yet paid | 30.09.2013 | 15 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XP]EP0872572 (JAPAN ENERGY CORP [JP]) [XP] 1,2 * page 5, lines 12-16,25-30 * * page 6, line 10 - line 21 * * page 7, lines 23-34,45-49 * * page 8, line 36 - line 46 * * page 8, line 57 - page 9, line 4 * * page 9, line 43 - line 54 *; | [XP]WO9850598 (HERAEUS INC [US], et al) [XP] 1,2 * page 3, line 20 - line 25 * * page 4, line 35 - page 5, line 7 * * page 7, line 22 - page 8, line 24 * * page 12, line 31 - page 13, line 3 *; | [X]EP0616045 (JAPAN ENERGY CORP [JP]) [X] 1,2 * page 5, line 51 - line 58 *; | [X]US5630918 (TAKAHARA TOSHIYA [JP], et al) [X] 1,2 * column 1, line 55 - column 2, line 7 * * column 7, line 19 - line 24 * * column 8, line 1 - line 5 * * column 9, line 5 - line 9 * * claim 1 *; | [X]JPH02259068 (SEIKO EPSON CORP) [X] 1,2 * abstract *; | [X]EP0634498 (APPLIED MATERIALS INC [US]) [X] 1,2 * page 3, lines 1-8,34-53 * * page 4; table 1 * |