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Extract from the Register of European Patents

EP About this file: EP2427586

EP2427586 - METHOD FOR THE PRODUCTION OF OXIDE AND NITRIDE COATINGS AND ITS USE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  01.10.2021
Database last updated on 26.06.2024
FormerThe patent has been granted
Status updated on  23.10.2020
FormerGrant of patent is intended
Status updated on  02.07.2020
FormerExamination is in progress
Status updated on  13.01.2017
Most recent event   Tooltip14.06.2024Lapse of the patent in a contracting state
New state(s): TR		published on 17.07.2024 [2024/29]
Applicant(s)For all designated states
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Hansastrasse 27c
80686 München / DE
[N/P]
Former [2012/11]For all designated states
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Hansastrasse 27c
80686 München / DE
Inventor(s)01 / BRUNS, Stefan
Ebertallee 57a
38104 Braunschweig / DE
02 / WERNER, Oliver
Altstadtring 32
38118 Braunschweig / DE
03 / VERGÖHL, Michael
Vor dem Elm 8
38162 Destedt / DE
 [2012/11]
Representative(s)Pfenning, Meinig & Partner mbB
Patent- und Rechtsanwälte
Theresienhöhe 11a
80339 München / DE
[2020/48]
Former [2012/11]Pfenning, Meinig & Partner GbR
Theresienhöhe 13
80339 München / DE
Application number, filing date10727350.005.05.2010
[2020/48]
WO2010EP02756
Priority number, dateDE2009102016207.05.2009         Original published format: DE102009020162
US20090213106P07.05.2009         Original published format: US 213106 P
[2012/11]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2010127845
Date:11.11.2010
Language:EN
[2010/45]
Type: A1 Application with search report 
No.:EP2427586
Date:14.03.2012
Language:EN
The application published by WIPO in one of the EPO official languages on 11.11.2010 takes the place of the publication of the European patent application.
[2012/11]
Type: B1 Patent specification 
No.:EP2427586
Date:25.11.2020
Language:EN
[2020/48]
Search report(s)International search report - published on:EP11.11.2010
ClassificationIPC:H05H1/24, C23C14/34, C23C14/00, C23C14/35, H01J37/34
[2019/35]
CPC:
C23C14/0078 (EP,US); C23C14/3485 (EP,US); C23C14/35 (EP,US);
H01J37/3405 (EP,US); H01J37/342 (EP,US); H01J37/3467 (EP,US)
Former IPC [2012/11]C23C14/00, C23C14/35, H01J37/34
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2012/11]
Extension statesBANot yet paid
MENot yet paid
RSNot yet paid
TitleGerman:VERFAHREN ZUR HERSTELLUNG VON OXID- UND NITRIDÜBERZÜGEN UND VERWENDUNG DAVON[2012/11]
English:METHOD FOR THE PRODUCTION OF OXIDE AND NITRIDE COATINGS AND ITS USE[2012/11]
French:PROCÉDÉ DE PRODUCTION DE REVÊTEMENTS D'OXYDES ET DE NITRURES ET SON UTILISATION[2012/11]
Entry into regional phase02.12.2011National basic fee paid 
02.12.2011Designation fee(s) paid 
02.12.2011Examination fee paid 
Examination procedure02.12.2011Examination requested  [2012/11]
18.06.2012Amendment by applicant (claims and/or description)
13.01.2017Despatch of a communication from the examining division (Time limit: M04)
23.05.2017Reply to a communication from the examining division
23.08.2019Despatch of a communication from the examining division (Time limit: M02)
05.09.2019Reply to a communication from the examining division
03.07.2020Communication of intention to grant the patent
13.10.2020Fee for grant paid
13.10.2020Fee for publishing/printing paid
13.10.2020Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  13.01.2017
Opposition(s)26.08.2021No opposition filed within time limit [2021/44]
Fees paidRenewal fee
31.05.2012Renewal fee patent year 03
29.05.2013Renewal fee patent year 04
28.03.2014Renewal fee patent year 05
28.05.2015Renewal fee patent year 06
27.05.2016Renewal fee patent year 07
24.05.2017Renewal fee patent year 08
30.05.2018Renewal fee patent year 09
28.05.2019Renewal fee patent year 10
27.03.2020Renewal fee patent year 11
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU05.05.2010
AL25.11.2020
CY25.11.2020
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BG25.02.2021
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GB05.05.2021
IE05.05.2021
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BE31.05.2021
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PT25.03.2021
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PT25.03.2021
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GR26.02.2021
IS25.03.2021
PT25.03.2021
LU05.05.2021
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NL25.11.2020
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GR26.02.2021
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SK25.11.2020
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Cited inInternational search[A]EP0347567  (LEYBOLD AG [DE]) [A] 1* figure 1; claim 1 *;
 [XY]DE19919742  (FRAUNHOFER GES FORSCHUNG [DE], et al) [X] 8,9 * claims 1,3 * [Y] 7,10;
 [Y]US6274014  (MATSUMOTO SHIGEHARU [JP], et al) [Y] 2 * column 6, line 14 - line 64; figure 1 *;
 [Y]WO2006049566  (CHEMFILT IONSPUTTERING AB [SE], et al) [Y] 1,3-6 * page 12, line 5 - line 11 * * page 12, line 14 * * page 20, line 16 *;
 [Y]  - KONSTANTINIDIS S ET AL, "Titanium oxide thin films deposited by high-power impulse magnetron sputtering", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH LNKD- DOI:10.1016/J.TSF.2006.07.089, vol. 515, no. 3, ISSN 0040-6090, (20061123), pages 1182 - 1186, (20061123), XP025006001 [Y] 1-7,10 * page 1183, paragraph 2 * * abstract *

DOI:   http://dx.doi.org/10.1016/j.tsf.2006.07.089
Examination   - Michael Vergöhl ET AL, "New developments in magnetron sputter processes for precision optics", Optical Sensing II, 1000 20th St. Bellingham WA 98225-6705 USA, (20080916), vol. 7101, doi:10.1117/12.797190, ISSN 0277-786X, ISBN 978-1-62841-971-9, page 71010B, XP055332606

DOI:   http://dx.doi.org/10.1117/12.797190
    - NOBORU SHIBATA, "PLASMA-CHEMICAL VAPOR-DEPOSITED SILICON OXIDE/SILICON OXYNITRIDE DOUBLE-LAYER ANTIREFLECTIVE COATING FOR SOLAR CELLS", JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, JP, (19910501), vol. 30, no. 5, doi:10.1143/JJAP.30.997, ISSN 0021-4922, pages 997 - 1001, XP000263711

DOI:   http://dx.doi.org/10.1143/JJAP.30.997
    - LAU K ET AL, "Reactive pulse magnetron sputtered SiO"xN"y coatings on polymers", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 517, no. 10, doi:10.1016/J.TSF.2008.11.084, ISSN 0040-6090, (20090331), pages 3110 - 3114, (20081120), XP026005688

DOI:   http://dx.doi.org/10.1016/j.tsf.2008.11.084
by applicant   - M. VERGOHL ET AL., "Real- time control of reactive magnetron-sputter deposited optical filters by in-situ spectroscopic ellipsome- try", THIN SOLID FILMS, (2000), vol. 377, 378, pages 43 - 47
    - LAU ET AL., "Reactive pulse magnetron sputtered SiOxNy coatings on polymers", THIN SOLID FILMS, (2009), vol. 517, no. 10, doi:doi:10.1016/j.tsf.2008.11.084, pages 3110 - 3114, XP026005688

DOI:   http://dx.doi.org/10.1016/j.tsf.2008.11.084
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