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Extract from the Register of European Patents

EP About this file: EP2462486

EP2462486 - OBJECT INSPECTION SYSTEMS AND METHODS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  19.02.2021
Database last updated on 11.09.2024
FormerThe patent has been granted
Status updated on  13.03.2020
FormerGrant of patent is intended
Status updated on  20.11.2019
FormerExamination is in progress
Status updated on  03.07.2019
Most recent event   Tooltip08.07.2022Lapse of the patent in a contracting state
New state(s): MK		published on 10.08.2022  [2022/32]
Applicant(s)For all designated states
ASML Netherlands BV
De Run 6501
5504 DR Veldhoven / NL
[2020/16]
Former [2012/24]For all designated states
ASML Netherlands BV
De Run 6501
5504 DR Veldhoven / NL
Inventor(s)01 / IVANOV, Vitalii
str. Sengera 9/9
PL-02-790 Warsaw / PL
02 / DEN BOEF, Arie
Eikenlaan 18
NL-5581 NA Waalre / NL
03 / BANINE, Vadim
Eendracht 21
NL-5751 SB Deurne / NL
04 / SCACCABAROZZI, Luigi
De Meule 39
NL-5554 KD Valkenswaard / NL
05 / IOSAD, Nikolay
Westernisse 9
NL-5663 RH Geldrop / NL
 [2012/24]
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[N/P]
Former [2020/16]Slenders, Petrus Johannes Waltherus, et al
ASML Netherlands B.V.
Corporate Intellectual Property
De Run 6501
P.O. Box 324
5500 AH Veldhoven / NL
Former [2012/52]Slenders, Petrus J. W., et al
ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
Former [2012/24]Slenders, Petrus J. W.
ASML Netherlands B.V. De Run 6504
5504 DR Veldhoven / NL
Application number, filing date10728666.802.07.2010
[2020/16]
WO2010EP59460
Priority number, dateUS20090231161P04.08.2009         Original published format: US 231161 P
[2012/24]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2011015412
Date:10.02.2011
Language:EN
[2011/06]
Type: A1 Application with search report 
No.:EP2462486
Date:13.06.2012
Language:EN
The application published by WIPO in one of the EPO official languages on 10.02.2011 takes the place of the publication of the European patent application.
[2012/24]
Type: B1 Patent specification 
No.:EP2462486
Date:15.04.2020
Language:EN
[2020/16]
Search report(s)International search report - published on:EP10.02.2011
ClassificationIPC:G03F1/00, G03F1/84, G01N21/65, G01N21/94, G01N21/956, G01N21/95, G01N21/64, G03F1/24
[2019/48]
CPC:
G03F1/84 (EP,KR,US); G01N21/65 (EP,KR,US); G01N21/6408 (EP,KR,US);
G01N21/6489 (EP,KR,US); G01N21/94 (EP,KR,US); G01N21/9501 (EP,KR,US);
G01N21/956 (EP,KR,US); G03F1/24 (EP,KR,US) (-)
Former IPC [2012/24]G03F1/00, G03F1/14, G01N21/64, G01N21/95
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2012/24]
Extension statesBANot yet paid
MENot yet paid
RSNot yet paid
TitleGerman:VERFAHREN UND SYSTEME ZUR INSPEKTION VON GEGENSTÄNDEN[2019/48]
English:OBJECT INSPECTION SYSTEMS AND METHODS[2012/24]
French:PROCÉDÉS ET SYSTEMES POUR L'INSPECTION D'OBJETS[2019/48]
Former [2012/24]SYSTEME UND VERFAHREN ZUR OBJEKTUNTERSUCHUNG
Former [2012/24]SYSTÈMES ET PROCÉDÉS D'INSPECTION D'OBJET
Entry into regional phase01.12.2011National basic fee paid 
01.12.2011Designation fee(s) paid 
01.12.2011Examination fee paid 
Examination procedure01.12.2011Examination requested  [2012/24]
15.08.2012Amendment by applicant (claims and/or description)
08.07.2019Despatch of a communication from the examining division (Time limit: M04)
15.10.2019Reply to a communication from the examining division
21.11.2019Communication of intention to grant the patent
04.03.2020Fee for grant paid
04.03.2020Fee for publishing/printing paid
04.03.2020Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  08.07.2019
Opposition(s)18.01.2021No opposition filed within time limit [2021/12]
Fees paidRenewal fee
23.07.2012Renewal fee patent year 03
22.07.2013Renewal fee patent year 04
23.07.2014Renewal fee patent year 05
23.07.2015Renewal fee patent year 06
22.07.2016Renewal fee patent year 07
24.07.2017Renewal fee patent year 08
27.07.2018Renewal fee patent year 09
25.07.2019Renewal fee patent year 10
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU02.07.2010
AL15.04.2020
AT15.04.2020
CY15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
MC15.04.2020
MK15.04.2020
MT15.04.2020
NL15.04.2020
PL15.04.2020
RO15.04.2020
SE15.04.2020
SI15.04.2020
SK15.04.2020
SM15.04.2020
TR15.04.2020
IE02.07.2020
LU02.07.2020
BG15.07.2020
GB15.07.2020
NO15.07.2020
GR16.07.2020
BE31.07.2020
CH31.07.2020
LI31.07.2020
IS15.08.2020
PT17.08.2020
[2022/32]
Former [2022/27]HU02.07.2010
AL15.04.2020
AT15.04.2020
CY15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
MC15.04.2020
MT15.04.2020
NL15.04.2020
PL15.04.2020
RO15.04.2020
SE15.04.2020
SI15.04.2020
SK15.04.2020
SM15.04.2020
TR15.04.2020
IE02.07.2020
LU02.07.2020
BG15.07.2020
GB15.07.2020
NO15.07.2020
GR16.07.2020
BE31.07.2020
CH31.07.2020
LI31.07.2020
IS15.08.2020
PT17.08.2020
Former [2022/26]AL15.04.2020
AT15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
MC15.04.2020
NL15.04.2020
PL15.04.2020
RO15.04.2020
SE15.04.2020
SI15.04.2020
SK15.04.2020
SM15.04.2020
TR15.04.2020
IE02.07.2020
LU02.07.2020
BG15.07.2020
GB15.07.2020
NO15.07.2020
GR16.07.2020
BE31.07.2020
CH31.07.2020
LI31.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/24]AL15.04.2020
AT15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
MC15.04.2020
NL15.04.2020
PL15.04.2020
RO15.04.2020
SE15.04.2020
SI15.04.2020
SK15.04.2020
SM15.04.2020
IE02.07.2020
LU02.07.2020
BG15.07.2020
GB15.07.2020
NO15.07.2020
GR16.07.2020
BE31.07.2020
CH31.07.2020
LI31.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/22]AL15.04.2020
AT15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
MC15.04.2020
NL15.04.2020
PL15.04.2020
RO15.04.2020
SE15.04.2020
SK15.04.2020
SM15.04.2020
IE02.07.2020
LU02.07.2020
BG15.07.2020
GB15.07.2020
NO15.07.2020
GR16.07.2020
CH31.07.2020
LI31.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/20]AL15.04.2020
AT15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
MC15.04.2020
NL15.04.2020
PL15.04.2020
RO15.04.2020
SE15.04.2020
SK15.04.2020
SM15.04.2020
IE02.07.2020
LU02.07.2020
BG15.07.2020
NO15.07.2020
GR16.07.2020
CH31.07.2020
LI31.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/13]AL15.04.2020
AT15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
MC15.04.2020
NL15.04.2020
PL15.04.2020
RO15.04.2020
SE15.04.2020
SK15.04.2020
SM15.04.2020
BG15.07.2020
NO15.07.2020
GR16.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/10]AL15.04.2020
AT15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
NL15.04.2020
PL15.04.2020
RO15.04.2020
SE15.04.2020
SK15.04.2020
SM15.04.2020
BG15.07.2020
NO15.07.2020
GR16.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/09]AL15.04.2020
AT15.04.2020
CZ15.04.2020
DK15.04.2020
EE15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
IT15.04.2020
LT15.04.2020
LV15.04.2020
NL15.04.2020
RO15.04.2020
SE15.04.2020
SM15.04.2020
BG15.07.2020
NO15.07.2020
GR16.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/08]AL15.04.2020
DK15.04.2020
ES15.04.2020
FI15.04.2020
HR15.04.2020
LT15.04.2020
LV15.04.2020
NL15.04.2020
RO15.04.2020
SE15.04.2020
SM15.04.2020
BG15.07.2020
NO15.07.2020
GR16.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/04]AL15.04.2020
FI15.04.2020
HR15.04.2020
LT15.04.2020
LV15.04.2020
NL15.04.2020
SE15.04.2020
BG15.07.2020
NO15.07.2020
GR16.07.2020
IS15.08.2020
PT17.08.2020
Former [2021/01]FI15.04.2020
HR15.04.2020
LT15.04.2020
LV15.04.2020
NL15.04.2020
SE15.04.2020
BG15.07.2020
NO15.07.2020
GR16.07.2020
IS15.08.2020
PT17.08.2020
Former [2020/50]FI15.04.2020
HR15.04.2020
LT15.04.2020
LV15.04.2020
NL15.04.2020
SE15.04.2020
NO15.07.2020
GR16.07.2020
IS15.08.2020
PT17.08.2020
Former [2020/48]FI15.04.2020
LT15.04.2020
NL15.04.2020
SE15.04.2020
NO15.07.2020
IS15.08.2020
PT17.08.2020
Former [2020/47]LT15.04.2020
NO15.07.2020
IS15.08.2020
Former [2020/46]IS15.08.2020
Cited inInternational search[XI]WO9811425  (BIO RAD MICROMEASUREMENTS LTD [GB], et al) [X] 1,2,5,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * abstract * * page 3 - page 11 * [I] 3,4,6-8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
 [XI]WO0229883  (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * claims 1,6,15 * * page 3, line 25 - page 6, line 28 * * page 10, line 7 - line 13 * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
 [XI]WO02077621  (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * page 4 - page 13 * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
 [XI]WO2004008125  (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * the whole document * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
 [XI]US2008084555  (YOO WOO SIK [US]) [X] 1,2,5,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * figures 7, 8A, 8B * * paragraph [0004] - paragraph [0019] * * paragraph [0069] - paragraph [0080] * [I] 3,4,6-8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
 [A]  - WESTRATE S ET AL, "PHOTOLUMINESCENCE MAPPING DETECTS CU CONTAMINATION IN SI WAFERS", SOLID STATE TECHNOLOGY, PENNWELL CORPORATION, TULSA, OK, US, (20020201), vol. 45, no. 2, ISSN 0038-111X, page 57/58, XP001092608 [A] 1-70 * the whole document *
by applicantJPH11304717
 JP2007258567
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