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EP2468692
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EP About this file: EP2468692
| EP2468692 - TIO2-CONTAINING SILICIA GLASS, AND OPTICAL MEMBER FOR EUV LITHOGRAPHY [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 21.06.2013 Database last updated on 26.06.2024 | Most recent event Tooltip | 21.06.2013 | Withdrawal of application | published on 24.07.2013 [2013/30] | Applicant(s) | For all designated states Asahi Glass Company, Limited 5-1, Marunouchi 1-chome Chiyoda-ku Tokyo 100-8405 / JP | [2012/26] | Inventor(s) | 01 /
KOIKE Akio c/o Asahi Glass Company Limited. 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8405 / JP | 02 /
IWAHASHI Yasutomi c/o Asahi Glass Company Limited. 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8405 / JP | 03 /
KIKUGAWA Shinya c/o Asahi Glass Company Limited. 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8405 / JP | [2012/26] | Representative(s) | Müller-Boré & Partner Patentanwälte PartG mbB Friedenheimer Brücke 21 80639 München / DE | [N/P] |
| Former [2012/26] | Müller-Boré & Partner Patentanwälte Grafinger Strasse 2 81671 München / DE | Application number, filing date | 10809950.8 | 16.08.2010 | WO2010JP63834 | Priority number, date | JP20090189899 | 19.08.2009 Original published format: JP 2009189899 | [2012/26] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2011021609 | Date: | 24.02.2011 | Language: | JA | [2011/08] | Type: | A1 Application with search report | No.: | EP2468692 | Date: | 27.06.2012 | Language: | EN | [2012/26] | Search report(s) | International search report - published on: | JP | 24.02.2011 | Classification | IPC: | C03C3/06, H01L21/027 | [2012/26] | CPC: |
C03C3/06 (EP,KR,US);
C03C15/00 (KR);
C03C4/0085 (EP,KR,US);
G03F7/70958 (EP,KR,US);
H01L21/0274 (KR);
C03C2201/42 (EP,KR,US);
C03C2203/44 (EP,KR,US)
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| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2012/26] | Title | German: | TIO2-HALTIGES QUARZGLAS UND OPTISCHES ELEMENT FÜR DIE EUV-LITHOGRAFIE DAMIT | [2012/26] | English: | TIO2-CONTAINING SILICIA GLASS, AND OPTICAL MEMBER FOR EUV LITHOGRAPHY | [2012/26] | French: | VERRE DE SILICE À TENEUR EN TIO2 ET ÉLÉMENT OPTIQUE POUR UNE LITHOGRAPHIE EN EXTRÊME UV | [2012/26] | Entry into regional phase | 17.02.2012 | Translation filed | 23.02.2012 | National basic fee paid | 23.02.2012 | Search fee paid | 23.02.2012 | Designation fee(s) paid | 23.02.2012 | Examination fee paid | Examination procedure | 23.02.2012 | Examination requested [2012/26] | 28.06.2012 | Amendment by applicant (claims and/or description) | 13.06.2013 | Application withdrawn by applicant [2013/30] | Fees paid | Renewal fee | 30.08.2012 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]JP2004315351 (ASAHI GLASS CO LTD); | [Y]JP2005507353 (CORNING INC.); | [X]JP2008303100 (SHINETSU CHEMICAL CO); | [XP]JP2010163345 (ASAHI GLASS CO LTD) | by applicant | JPS6324937B | US2002157421 | JP2005104820 | JP2009189899 | - P.C. SCHULTZ; H.T. SMYTH; R.W. DOUGLAS; B. ELLIS, Amorphous Materials, WILLEY, (1972), page 453 | - J. P. WILLIAMS, AMERICAN CERAMIC SOCIETY BULLETIN, (1976), vol. 55, no. 5, page 524 |