-
EP2479780
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP2479780
| EP2479780 - FILM FORMATION APPARATUS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 03.07.2015 Database last updated on 12.07.2024 | Most recent event Tooltip | 03.07.2015 | Application deemed to be withdrawn | published on 05.08.2015 [2015/32] | Applicant(s) | For all designated states Tokyo Electron Limited 3-1 Akasaka 5-chome Minato-ku Tokyo 107-6325 / JP | [2012/30] | Inventor(s) | 01 /
SAWADA Ikuo c/o TOKYO ELECTRON LIMITED 650 Mitsuzawa Hosaka-cho Nirasaki-shi Yamanashi 407-0192 / JP | 02 /
KANG Song Yun c/o TOKYO ELECTRON LIMITED 650 Mitsuzawa Hosaka-cho Nirasaki-shi Yamanashi 407-0192 / JP | 03 /
MATSUKUMA Masaaki c/o TOKYO ELECTRON LIMITED 650 Mitsuzawa Hosaka-cho Nirasaki-shi Yamanashi 407-0192 / JP | 04 /
KASAI Shigeru c/o TOKYO ELECTRON AT LIMITED 650 Mitsuzawa Hosaka-cho Nirasaki-shi Yamanashi 407-0192 / JP | 05 /
MORISHIMA Masato c/o TOKYO ELECTRON LIMITED 650 Mitsuzawa Hosaka-cho Nirasaki-shi Yamanashi 407-0192 / JP | [2012/30] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE | [N/P] |
| Former [2012/30] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 10817040.8 | 30.08.2010 | WO2010JP64707 | Priority number, date | JP20090215851 | 17.09.2009 Original published format: JP 2009215851 | JP20100161955 | 16.07.2010 Original published format: JP 2010161955 | [2012/30] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2011033927 | Date: | 24.03.2011 | Language: | JA | [2011/12] | Type: | A1 Application with search report | No.: | EP2479780 | Date: | 25.07.2012 | Language: | EN | [2012/30] | Search report(s) | International search report - published on: | JP | 24.03.2011 | (Supplementary) European search report - dispatched on: | EP | 25.06.2014 | Classification | IPC: | H01L21/205, C23C16/50, H01L31/04, C23C16/44, C23C16/455, C23C16/452, H01J37/32, C23C16/509 | [2014/30] | CPC: |
C23C16/4412 (EP,KR,US);
C23C16/452 (EP,KR,US);
C23C16/45502 (EP,KR,US);
C23C16/45574 (EP,KR,US);
C23C16/509 (EP,KR,US);
H01J37/32082 (EP,KR,US);
H01J37/32431 (EP,US);
H01J37/3244 (EP,KR,US);
H01J37/32568 (EP,KR,US);
|
| Former IPC [2012/30] | H01L21/205, C23C16/50, H01L31/04 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2012/30] | Title | German: | FILMERZEUGUNGSVORRICHTUNG | [2012/30] | English: | FILM FORMATION APPARATUS | [2012/30] | French: | APPAREIL DE FORMATION DE FILM | [2012/30] | Entry into regional phase | 19.03.2012 | Translation filed | 19.03.2012 | National basic fee paid | 19.03.2012 | Search fee paid | 19.03.2012 | Designation fee(s) paid | 19.03.2012 | Examination fee paid | Examination procedure | 30.06.2011 | Request for preliminary examination filed International Preliminary Examining Authority: JP | 19.03.2012 | Examination requested [2012/30] | 22.01.2015 | Application deemed to be withdrawn, date of legal effect [2015/32] | 10.03.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2015/32] | Fees paid | Renewal fee | 20.08.2012 | Renewal fee patent year 03 | 30.08.2013 | Renewal fee patent year 04 | 25.08.2014 | Renewal fee patent year 05 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]US5908565 (MORITA TATSUO [JP], et al) [X] 1-3,11 * col. 7, lines 15-20 col. 7, lines 31-37 col. 7, lines 39-52 col. 8, lines 31-35;; figures 1, 3, 7 * [I] 4,10; | [Y]JP2001085414 (MATSUSHITA ELECTRIC IND CO LTD) [Y] 8,9* paragraphs [0039] - [0042] *; | [XYI]US2006096539 (KAWASAKI SHINICHI [JP], et al) [X] 1-3,5-7,11,12 * paragraphs [0125] - [0129] - [ 186] , [0196] , [ 203] - [204 325]; figures 1,11, 14 * [Y] 8,9 [I] 4,10 | International search | [Y]JPH0613329 (CANON KK); | [X]JPH11149998 (FOI KK, et al); | [Y]JP2000012471 (AGENCY IND SCIENCE TECHN, et al) | by applicant | JP2004289026 |