EP2499274 - DEPOSITION METHODS USING HAFNIUM-CONTAINING COMPOUNDS [Right-click to bookmark this link] | |||
Former [2012/38] | METHODS OF MAKING AND DEPOSITION METHODS USING HAFNIUM- OR ZIRCONIUM-CONTAINING COMPOUNDS | ||
[2015/48] | Status | No opposition filed within time limit Status updated on 24.02.2017 Database last updated on 03.09.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude 75, Quai d'Orsay 75007 Paris / FR | [N/P] |
Former [2012/38] | For all designated states L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude 75, Quai d'Orsay 75007 Paris / FR | Inventor(s) | 01 /
DUSSARRAT, Christian 108 Hunter Court Wilmington DE 19808 / US | 02 /
OMARJEE, Vincent M. 1207 Christiana Meadows Bear DE 19701 / US | 03 /
PALLEM, Venkateswara 724 King James Court Bear DE 19701 / US | [2012/38] | Representative(s) | Grout de Beaufort, François-Xavier L'Air Liquide Direction Propriété Intellectuelle 75, quai d'Orsay 75321 Paris Cedex 07 / FR | [N/P] |
Former [2012/38] | Grout de Beaufort, François-Xavier L'Air Liquide Direction Propriété Intellectuelle 75, quai d'Orsay 75321 Paris Cedex 07 / FR | Application number, filing date | 10829175.8 | 05.11.2010 | [2016/16] | WO2010US55693 | Priority number, date | US20090259433P | 09.11.2009 Original published format: US 259433 P | [2012/38] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2011057114 | Date: | 12.05.2011 | Language: | EN | [2011/19] | Type: | A2 Application without search report | No.: | EP2499274 | Date: | 19.09.2012 | Language: | EN | The application published by WIPO in one of the EPO official languages on 12.05.2011 takes the place of the publication of the European patent application. | [2012/38] | Type: | B1 Patent specification | No.: | EP2499274 | Date: | 20.04.2016 | Language: | EN | [2016/16] | Search report(s) | International search report - published on: | KR | 28.07.2011 | (Supplementary) European search report - dispatched on: | EP | 11.06.2013 | Classification | IPC: | C23C16/18, C23C16/455, C23C16/44, H01L21/205, C23C16/40 | [2013/28] | CPC: |
H01L21/02181 (EP,US);
C23C16/40 (EP,US);
C23C16/405 (EP,US);
C23C16/45553 (EP,US);
H01L21/0228 (EP,US)
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Former IPC [2012/38] | C23C16/18, C23C16/455, C23C16/44, H01L21/205 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2012/38] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | BESCHICHTUNGSVERFAHREN MIT HAFNIUMHALTIGEN VERBINDUNGEN | [2015/48] | English: | DEPOSITION METHODS USING HAFNIUM-CONTAINING COMPOUNDS | [2015/48] | French: | PROCÉDÉS DE DÉPÔT UTILISANT DES COMPOSÉS CONTENANT DU HAFNIUM | [2015/48] |
Former [2012/38] | HERSTELLUNGS- UND ABLAGERUNGSVERFAHREN MIT HAFNIUM- ODER ZIRKONIUMHALTIGEN VERBINDUNGEN | ||
Former [2012/38] | METHODS OF MAKING AND DEPOSITION METHODS USING HAFNIUM- OR ZIRCONIUM-CONTAINING COMPOUNDS | ||
Former [2012/38] | PROCÉDÉS DE FABRICATION ET PROCÉDÉS DE DÉPÔT UTILISANT DES COMPOSÉS CONTENANT DU HAFNIUM OU DU ZIRCONIUM | Entry into regional phase | 11.06.2012 | National basic fee paid | 11.06.2012 | Search fee paid | 11.06.2012 | Designation fee(s) paid | 11.06.2012 | Examination fee paid | Examination procedure | 11.06.2012 | Examination requested [2012/38] | 11.12.2013 | Amendment by applicant (claims and/or description) | 17.02.2014 | Despatch of a communication from the examining division (Time limit: M06) | 04.08.2014 | Reply to a communication from the examining division | 13.11.2015 | Communication of intention to grant the patent | 04.03.2016 | Fee for grant paid | 04.03.2016 | Fee for publishing/printing paid | 04.03.2016 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 17.02.2014 | Opposition(s) | 23.01.2017 | No opposition filed within time limit [2017/13] | Fees paid | Renewal fee | 23.11.2012 | Renewal fee patent year 03 | 28.11.2013 | Renewal fee patent year 04 | 25.11.2014 | Renewal fee patent year 05 | 24.11.2015 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 05.11.2010 | AL | 20.04.2016 | AT | 20.04.2016 | BE | 20.04.2016 | BG | 20.04.2016 | CY | 20.04.2016 | CZ | 20.04.2016 | DK | 20.04.2016 | EE | 20.04.2016 | ES | 20.04.2016 | FI | 20.04.2016 | HR | 20.04.2016 | IS | 20.04.2016 | IT | 20.04.2016 | LT | 20.04.2016 | LV | 20.04.2016 | MC | 20.04.2016 | MK | 20.04.2016 | NL | 20.04.2016 | PL | 20.04.2016 | RO | 20.04.2016 | RS | 20.04.2016 | SE | 20.04.2016 | SI | 20.04.2016 | SK | 20.04.2016 | SM | 20.04.2016 | TR | 20.04.2016 | NO | 20.07.2016 | GR | 21.07.2016 | PT | 22.08.2016 | GB | 05.11.2016 | IE | 05.11.2016 | MT | 05.11.2016 | CH | 30.11.2016 | LI | 30.11.2016 | LU | 30.11.2016 | [2018/46] |
Former [2018/43] | HU | 05.11.2010 | |
AT | 20.04.2016 | ||
BE | 20.04.2016 | ||
BG | 20.04.2016 | ||
CY | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IS | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
MC | 20.04.2016 | ||
MK | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SI | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
TR | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
GB | 05.11.2016 | ||
IE | 05.11.2016 | ||
MT | 05.11.2016 | ||
CH | 30.11.2016 | ||
LI | 30.11.2016 | ||
LU | 30.11.2016 | ||
Former [2018/38] | HU | 05.11.2010 | |
AT | 20.04.2016 | ||
BE | 20.04.2016 | ||
BG | 20.04.2016 | ||
CY | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IS | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
MC | 20.04.2016 | ||
MK | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SI | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
TR | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
GB | 05.11.2016 | ||
IE | 05.11.2016 | ||
CH | 30.11.2016 | ||
LI | 30.11.2016 | ||
LU | 30.11.2016 | ||
Former [2018/30] | HU | 05.11.2010 | |
AT | 20.04.2016 | ||
BE | 20.04.2016 | ||
CY | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IS | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
MC | 20.04.2016 | ||
MK | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SI | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
TR | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
GB | 05.11.2016 | ||
IE | 05.11.2016 | ||
CH | 30.11.2016 | ||
LI | 30.11.2016 | ||
LU | 30.11.2016 | ||
Former [2018/29] | HU | 05.11.2010 | |
AT | 20.04.2016 | ||
BE | 20.04.2016 | ||
CY | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
MC | 20.04.2016 | ||
MK | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SI | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
TR | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
GB | 05.11.2016 | ||
IE | 05.11.2016 | ||
CH | 30.11.2016 | ||
LI | 30.11.2016 | ||
LU | 30.11.2016 | ||
Former [2018/28] | HU | 05.11.2010 | |
AT | 20.04.2016 | ||
BE | 20.04.2016 | ||
CY | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
MC | 20.04.2016 | ||
MK | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SI | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
GB | 05.11.2016 | ||
IE | 05.11.2016 | ||
CH | 30.11.2016 | ||
LI | 30.11.2016 | ||
LU | 30.11.2016 | ||
Former [2017/51] | AT | 20.04.2016 | |
BE | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SI | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
GB | 05.11.2016 | ||
IE | 05.11.2016 | ||
CH | 30.11.2016 | ||
LI | 30.11.2016 | ||
LU | 30.11.2016 | ||
Former [2017/43] | AT | 20.04.2016 | |
BE | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SI | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
CH | 30.11.2016 | ||
LI | 30.11.2016 | ||
LU | 30.11.2016 | ||
Former [2017/37] | AT | 20.04.2016 | |
BE | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SI | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
CH | 30.11.2016 | ||
LI | 30.11.2016 | ||
Former [2017/11] | AT | 20.04.2016 | |
BE | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SK | 20.04.2016 | ||
SM | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
Former [2017/10] | AT | 20.04.2016 | |
BE | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
SK | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
Former [2017/09] | AT | 20.04.2016 | |
BE | 20.04.2016 | ||
CZ | 20.04.2016 | ||
DK | 20.04.2016 | ||
EE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RO | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
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BE | 20.04.2016 | ||
DK | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
Former [2017/03] | AT | 20.04.2016 | |
BE | 20.04.2016 | ||
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
IT | 20.04.2016 | ||
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RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
Former [2016/52] | AT | 20.04.2016 | |
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RS | 20.04.2016 | ||
SE | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
Former [2016/51] | AT | 20.04.2016 | |
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RS | 20.04.2016 | ||
NO | 20.07.2016 | ||
GR | 21.07.2016 | ||
PT | 22.08.2016 | ||
Former [2016/50] | AT | 20.04.2016 | |
ES | 20.04.2016 | ||
FI | 20.04.2016 | ||
HR | 20.04.2016 | ||
LT | 20.04.2016 | ||
LV | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
RS | 20.04.2016 | ||
NO | 20.07.2016 | ||
Former [2016/49] | FI | 20.04.2016 | |
LT | 20.04.2016 | ||
NL | 20.04.2016 | ||
PL | 20.04.2016 | ||
NO | 20.07.2016 | ||
Former [2016/46] | LT | 20.04.2016 | |
NO | 20.07.2016 | Documents cited: | Search | [ID]US2007259111 (SINGH KAUSHAL K [US], et al) [ID] 1-10 * page 14, paragraph 151 - paragraph 154 *; | [A] - JONES A C ET AL, "MOCVD AND ALD OF HIGH-K DIELECTRIC OXIDES USING ALKOXIDE PRECURSORS", CHEMICAL VAPOR DEPOSITION, WILEY-VCH VERLAG, WEINHEIM, DE, (20060101), vol. 12, no. 2/03, doi:10.1002/CVDE.200500023, ISSN 0948-1907, pages 83 - 98, XP001501904 [A] 1-10 * section 2.1; page 84 - page 88 * DOI: http://dx.doi.org/10.1002/cvde.200500023 | International search | [A]KR20070121281 (DNF CO LTD [KR]); | [A]US2008044569 (MYO NYI O [US], et al); | [A]US2008063798 (KHER SHREYAS S [US], et al); | [Y]KR20080050510 (APPLIED MATERIALS INC [US]); | [Y]EP2050767 (BRASKEM SA [BR]) |