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Extract from the Register of European Patents

EP About this file: EP2513954

EP2513954 - DEVICE AND PROCESS FOR LIQUID TREATMENT OF A WAFER SHAPED ARTICLE [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  24.01.2014
Database last updated on 24.04.2024
Most recent event   Tooltip24.01.2014Application deemed to be withdrawnpublished on 26.02.2014  [2014/09]
Applicant(s)For all designated states
Lam Research AG
SEZ-Strasse 1
9500 Villach / AT
[2012/43]
Inventor(s)01 / FRANK, Dieter
Dr. Karl Rennerweg 8
A-9220 Lind ob Velden / AT
02 / PUGGL, Michael
Eitweg 95
A-9421 Eitweg / AT
 [2012/43]
Representative(s)Kontrus, Gerhard
SEZ-Strasse 1
9500 Villach / AT
[2012/43]
Application number, filing date10837141.002.12.2010
WO2010IB55550
Priority number, dateUS2009064211718.12.2009         Original published format: US 642117
[2012/43]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2011073840
Date:23.06.2011
Language:EN
[2011/25]
Type: A2 Application without search report 
No.:EP2513954
Date:24.10.2012
Language:EN
The application published by WIPO in one of the EPO official languages on 23.06.2011 takes the place of the publication of the European patent application.
[2012/43]
Search report(s)International search report - published on:KR01.12.2011
(Supplementary) European search report - dispatched on:EP23.01.2013
ClassificationIPC:H01L21/302, H01L21/67, H01L21/02
[2013/08]
CPC:
H01L21/67051 (EP,KR,US); H01L21/02052 (KR); H01L21/6708 (EP,KR,US);
H01L21/6715 (EP,KR,US); H01L21/67253 (EP,KR,US); H01L21/6838 (EP);
H01L21/68728 (EP,KR,US); H01L21/68735 (EP,KR,US); H01L21/68764 (KR) (-)
Former IPC [2012/43]H01L21/302
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2012/43]
TitleGerman:VORRICHTUNG UND VERFAHREN ZUR FLÜSSIGBEHANDLUNG WAFERFÖRMIGER ARTIKEL[2012/43]
English:DEVICE AND PROCESS FOR LIQUID TREATMENT OF A WAFER SHAPED ARTICLE[2012/43]
French:DISPOSITIF ET PROCÉDÉ POUR TRAITEMENT LIQUIDE D'UN ARTICLE EN FORME DE TRANCHE[2012/43]
Entry into regional phase18.07.2012National basic fee paid 
18.07.2012Search fee paid 
18.07.2012Designation fee(s) paid 
18.07.2012Examination fee paid 
Examination procedure18.07.2012Examination requested  [2012/43]
22.08.2013Application deemed to be withdrawn, date of legal effect  [2014/09]
08.10.2013Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2014/09]
Fees paidRenewal fee
02.01.2013Renewal fee patent year 03
02.01.2014Renewal fee patent year 04
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]US4350562  (BONUE BONUE) [A] 1-15 * abstract * * column 3, lines 34-36 * * column 3, lines 46-61 * * figure 1 *;
 [A]US4903717  (SUMNITSCH FRANZ [AT]) [A] 1-15 * abstract * * column 1, lines 5-22,63-68 * * column 2, lines 1,2 * * column 3, lines 37-50 * * column 4, lines 5-11,33-48 * * figure 1 *;
 [A]US5705223  (BUNKOFSKE RAYMOND JAMES [US]) [A] 1-15 * column 1, lines 7-11,25-41 * * column 2, lines 18-53 * * column 3, lines 30-67 * * column 4, lines 1-11 * * column 5, lines 1-12 * * column 5, lines 32-39 * * claim 1 ** figure 1 *;
 [YA]US6328846  (LANGEN KURT [AT], et al) [Y] 1-4,7-15 * claim 1 * * column 1, lines 21-25,34-43,50-67 * * figures 1-3B * [A] 5,6;
 [A]US2003073309  (EMAMI RAMIN [US]) [A] 1-15 * abstract * * figures 2C-3B *;
 [A]US2004092128  (GRANT CASEY J [US], et al) [A] 1-15 * abstract * * page 1, paragraphs 2,6,7 * * page 2, paragraph 25 * * figure 3 *;
 [YA]US2004255985  (XIA CHANGFENG [US], et al) [Y] 1-4,7-15 * pages 2,3, paragraph 21 * * figure 1 * [A] 5,6
International search[A]JP2001070859  (TAKATA CORP);
 [A]US2004055707  (SATO MASANOBU [JP], et al);
 [A]US2005193952  (GOODMAN MATT G [US], et al);
 [A]US2007087568  (KOYATA SAKAE [JP], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.